Product Specifications; Individual Unit Specifications - Ulvac VPC-051A User Manual

3. Product Specifications

Ultimate pressure
Evacuation time
Necessary power
External dimensions
(Main unit)
Weight (Main unit)
Finished color(Rack)

4. Individual Unit Specifications

Unit
1) Oil diffusion pump
(MAIN. PUMP)
2) Oil-sealed rotary
vacuum pump
(BACK. PUMP)
3) Main valve
4) Foreline solenoid
valve
5) Three-way valve
-4
7.0 x 10 Pa
(Upon no-load cleaning in vacuum chamber)
-4
1.5 x 10 Pa
(Using liquid nitrogen, upon no-load cleaning in
vacuum chamber)
15 minutes or less up to the 1.0 x 10
(Upon no-load cleaning in vacuum chamber)
10 minutes or less up to the 1.0 x 10
(Using liquid nitrogen, upon no-load cleaning in
vacuum chamber)
Single-phase 100 V, 0.63 kVA
Width:350 mm × Depth: 320 mm × Height: 461 mm
Approx. 21 kg
baking finish (Munsell 6Y 8/0.8)
Model and Specifications
- Model:
- Evacuation speed:
- Ultimate pressure:
- Evacuation or
suction opening:
- Required power:
Oil for use:
- Model:
- Evacuation speed:
- Ultimate pressure:
- Required power:
Oil for use:
- Model:
- Internal diameter:
- Model:
- Model:
３
-3
Pa
-3
Pa
DPF-050
50 L/sec
–5
10 Pa
VG 25 or equivalent,
φ13.6 or equivalent
0.25 kVA
SY, 0.02L
G-20DA
20 L/min
–1
1.3 x 10 Pa
0.1 VA
SMR-100, 0.18L
Butterfly Valve
VG-25
Slide valve type
Ball valve type
Quantity
1 set
1 set
1 set
1 set
1 set