Vacuum System And Inlet Gases Hardware; Vacuum Manifold; Auxiliary Gas Valve; Collision Gas Valve - Thermo Scientific TSQ Series Hardware Manual

Vacuum System and Inlet Gases Hardware

The vacuum system evacuates the region around the ion source interface, ion optics, mass analyzer,
and ion detection system. The principal components of the vacuum system include the following:

• Vacuum manifold

• Turbomolecular pump
• Forepump
• Convectron
• Ion gauges
The inlet gases hardware controls the flow of collision gas, sheath gas, auxiliary gas, and air (during
venting) into the mass spectrometer. The inlet gasses hardware includes the following components:

• Vent valve

• Collision gas flow control valves

• Sheath gas valve

• Auxiliary gas valve

A functional block diagram of the vacuum system and inlet gasses hardware is shown in
Figure 30. Functional block diagram of the vacuum system and inlet gasses hardware
Nitrogen
gas port
Auxiliary
gas
HPLC
(or other
sample input
device)
Sample tube
Exhaust
Forepump(s)
Thermo Scientific
™
gauges
Sheath Sweep
gas gas
Atmospheric
pressure
region
(760 Torr)
Convectron
gauge
Ion
transfer
Q00
tube/
ion optics ion optics
skimmer/
region
S-lens
(50 mTorr) (1 mTorr)
region
(1 Torr)
Triple-inlet
turbomolecular pump
2
Nitrogen
gas port
Vent
valve
Q0 Analyzer
region
-5
region (1×10 Torr) Collision
(or less)
cell
Collision gas
divert valve
Collision
gas valve
TSQ Series Hardware Manual
Functional Description
Mass Spectrometer
Figure 30.
Ion
gauge
Convectron
gauge
Argon
gas port
35