Figure 48. Removing the roughing pump adapter access plate screws
3. Unplug the ion source cable harness from the connector. See
Figure 49. Unplugging the ion source cable harness connector
4. Remove the ion optics cage assembly:
a. Using a hex ball driver, remove the three screws fastening the ion optics cage assembly to
Thermo Scientific
Access plate
screws
the ion source mount assembly. See
Figure
Figure
50.
6
Maintenance
Cleaning the Q00 Ion Optics
49.
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