Collision Cell Chamber - Thermo Scientific TSQ Series Hardware Manual

2
Functional Description
Mass Spectrometer
Vacuum Manifold
The vacuum manifold encloses the ion source interface, ion optics, mass analyzer, and ion
detection system assemblies. The vacuum manifold is a thick-walled, aluminum chamber with two
removable side cover plates, with openings on the front, sides, and top, and various electrical
feedthroughs and gas inlets.
The vacuum manifold is divided into four chambers by three baffles. See
evacuates the region inside the first chamber, called the ion transfer tube/skimmer region, to
1 Torr. The third inlet in the molecular drag section of the triple-inlet turbomolecular vacuum
pump evacuates the region inside the second chamber, called the Q00 ion optics region, to
50 mTorr. The interstage port of the turbomolecular vacuum pump evacuates the region inside the
third chamber, called the Q0 ion optics region, to 1 mTorr. The high vacuum port of the
turbomolecular pump evacuates the region inside the fourth chamber, called the analyzer region, to
less than 10
foreline.
Figure 31. Vacuum manifold (interior)
The collision cell chamber, inside the analyzer chamber, has a user controlled argon pressure of
between one and four mTorr when CID is turned on. Argon in the collision cell is evacuated by the
forepump when CID is turned off.
36 TSQ Series Hardware Manual
-5
Torr. The turbomolecular pump in turn discharges into the forepump through the
O-ring
Ion gauge
Collision cell
chamber
Turbomolecular pump
Analyzer
chamber
Figure 31. The forepump
Q0 ion optics
chamber
Baffle
Baffle
Convectron
gauge
Thermo Scientific