Edwards EXT75iDX Instruction Manual

Compound turbomolecular pumps

Hide thumbs

Table Of Contents

Table of Contents

Quick Links

Download this manual

EXT75DX, EXT75iDX, EXT255DX and EXT255iDX

Description

EXT75DX

ISO63

EXT75DX

CF63

EXT75DX

NW40

EXT75DX

ISO100

EXT75DX

ISO100 (NW25 Backing)

EXT75DX

ISO63 Reversed

EXT75iDX

NW40

EXT75iDX

ISO63 (NW16 Interstage)

EXT75iDX

ISO63 (NW25 Interstage)

EXT255DX

ISO100

EXT255DX

CF100

EXT255iDX

ISO100 (Interstage)

Instruction Manual

EXT Compound Turbomolecular Pumps

B722-40-880

Issue F Original

Item Number

B722-41-000

B722-42-000

B722-43-000

B722-45-000

B722-46-000

B722-48-000

B722-35-000

B722-37-000

B722-38-000

B753-11-000

B753-12-000

B753-13-000

Table of Contents

Need help?

Do you have a question about the EXT75iDX and is the answer not in the manual?

Questions and answers

Summary of Contents for Edwards EXT75iDX

Page 1 B722-40-880 Issue F Original Instruction Manual EXT Compound Turbomolecular Pumps EXT75DX, EXT75iDX, EXT255DX and EXT255iDX Description Item Number EXT75DX ISO63 B722-41-000 EXT75DX CF63 B722-42-000 EXT75DX NW40 B722-43-000 EXT75DX ISO100 B722-45-000 EXT75DX ISO100 (NW25 Backing) B722-46-000 EXT75DX ISO63 Reversed B722-48-000 EXT75iDX...
Page 2 Manor Royal, Crawley, West Sussex, RH10 9LW, UK declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s)  EXT75iDX NW40 (interstage) B722-35-000  EXT75iDX ISO63/NW16 (interstage) B722-37-000 ...
Page 3 Declaration of Conformity Edwards Limited, Crawley Business Quarter, Manor Royal, Crawley, West Sussex, RH10 9LW, UK declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s)  EXT255DX ISO100 B753-11-000 ...
Page 4 This page intentionally blank.
Page 5: Table Of Contents
Connect the logic interface to the customer control equipment ..........24 3.5.5 Connect the electrical supply ..................25 Parallel interface mode ....................26 © Edwards Limited 2013. All rights reserved. Page i Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 6 Operation at high temperatures ..................50 4.9.3 Operation at over-speed ....................50 4.9.4 Electrical supply failure ....................50 4.10 Bakeout ........................51 Maintenance ..................53 Introduction ......................53 Page ii © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 7 Conceptual diagram for multi-drop connection ..............29 Schematic diagram of the logic interface connections ............33 Installation of optional accessories and spares ..............67 © Edwards Limited 2013. All rights reserved. Page iii Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 8 Example decoding of system status words ................58 Inlet flange seals ......................64 Vent restrictors ......................65 Trademark credits Windows™ is trademark of Microsoft Corporation. Page iv © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 9: Introduction
B722-40-880 Issue F Introduction Scope and definitions This manual provides installation, operation, maintenance and storage instructions for the Edwards DX Compound Turbomolecular Pumps. The pumps must be used as specified in this manual. Read this manual before installing and operating the pumps.
Page 10: Drive Electronics
DX pumps are supplied with an inlet screen fitted into the bore of the inlet flange. Both the EXT255iDX and the EXT75iDX with an NW25 interstage port are supplied with an inlet strainer that fits into the interstage port. The inlet screen and inlet strainer protect the pump against damage that would be caused by debris entering the pump.
Page 11: Operational Features
Timer can be disabled. With the Timer disabled, the pump will Fail and decelerate to rest as soon as pump rotational speed falls below 50%. © Edwards Limited 2013. All rights reserved. Page 3 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 12: Analogue Output
1.4.5 Automatic vent options An Edwards TAV vent valve can be connected directly to the DX pump’s Podule. The Podule is capable of controlling a number of different venting options. The drive electronics can control the rate of venting. Using this feature, the pump can be vented from full rotational speed in a controlled manner that will not damage the pump bearings.
Page 13: Electronic Braking
The simple parallel interface is a quick and easy way to control the pump. This is the same interface used on existing 24V Edwards Turbo Pumps. The controls that are available to use are Start and Standby. The system status can be monitored using the Normal, Fail and Analogue output signals.
Page 14: Full Serial Control
Standby speed using this line. The Serial Enable signal must be linked to 0 V for serial communications to take place. Edwards suggests making a special cable for serial communications that includes a link between Serial Enable and 0 V. This way, Serial Enable is automatically activated when the cable is connected and then deactivated when the cable is removed.
Page 15: Technical Data
Ensure that the gases will not react or combine to form dangerous gases and substances. WARNING Do not expose any part of the human body to vacuum. © Edwards Limited 2013. All rights reserved. Page 7 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 17 <5 x 10 mbar <5 x 10 mbar <5 x 10 mbar (DN100ISO-K inlet (DN100ISO-K inlet (DN100CF inlet flange) flange) flange) © Edwards Limited 2013. All rights reserved. Page 9 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 18 A suitable diaphragm pump with ultimate <5 mbar may also be used. †† Power limit setting 80 W (EXT75DX), 160 W (EXT255DX). Page 10 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 19: Ext75Dx Dimensions (Mm)
8. Cooling block mounting face 4. Manual vent valve in vent port 9. Podule indicator LEDs 5. Logic interface connector 10. Backing port © Edwards Limited 2013. All rights reserved. Page 11 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 20: Ext255Dx Dimensions (Mm)
3. Interstage port (EXT255iDX only) 9. Podule indicator LEDs 4. Manual vent valve in vent port 10. Backing port 5. Logic interface connector Page 12 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 21: Vent Gas Specification And Vent Control Data
Figure 3 - Maximum allowed rate of pressure rise during venting: pressure against time (with pump initially at full rotational speed) © Edwards Limited 2013. All rights reserved. Page 13 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 22: Purge Gas Specification
Aluminium alloys, stainless steels, fluoroelastomer and nitrile O-rings, hydrocarbon lubricant, felt, rare earth magnets, silicon nitride, phenolic resin, carbon-fibre-reinforced epoxy resin, fire retardant polypropylene, polyamide and PVC. Page 14 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 23: Electrical Data
B722-40-880 Issue F Electrical data DX pumps can be driven either by the customer system or by the Edwards TIC Turbo Instrument Controller or TIC Turbo Controller. If using the customer system, the size of the power supply required depends on the application. The power limit setting determines how quickly the pump ramps up and dictates the size of power supply required.
Page 24: Podule Connector Socket
4, with the polarity of the pins marked when the vent valve/fan is energised. The podule connector plug is available as an accessory, see Section 7.4. Page 16 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 25: Maximum Allowed Rate Of Pressure Rise During Venting: Pressure Against Time (With Pump Initially At Full Rotational Speed) 13 4 Podule Connector Plug
Connector plug Phoenix part number FKMC1881325 Voltage output 24 V d.c. +10%, -20% (19.2 to 26.4 V d.c.) Current output 120 mA © Edwards Limited 2013. All rights reserved. Page 17 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 26: Indicator Leds
Ambient operating humidity range 10 to 90% RH (non-condensing) Maximum operating altitude 2000 m Ambient storage temperature range -30 °C to 70 °C Page 18 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 27: Installation
Inlet strainer (iDX fitted in the NW25 interstage port only)  Note: An inlet strainer is not available for the NW16 interstage port of the EXT75iDX. Typical installation A typical pumping system with a DX pump is shown in Figure...
Page 28: Typical Pumping System With A Dx Pump
6. Backing valve 16. Regulated purge gas supply 7. Vacuum gauge 17. WCX water cooler and connections 8. Flexible bellows 9. Foreline trap Page 20 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 29: Inlet Screen (Supplied Fitted)
1. EXT inlet flange 2. Inlet screen Figure 7 - Correct installation of the inlet screen (EXT255DX) 1. EXT inlet flange 2. Inlet screen © Edwards Limited 2013. All rights reserved. Page 21 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 30: Mechanical Fixing
 complement of bolts to connect the inlet flange of the pump to the vacuum system. If the pump has an ISO flange, use the Edwards trapped O-ring supplied with the pump and use a minimum of  four claw clamps (each torqued to 10 Nm) to connect the inlet flange of the pump to the vacuum system.
Page 31: Backing Connection
B722-40-880 Issue F Edwards recommends that the following requirements be met to ensure the pump remains secure in the event of a total pump seizure: Support must withstand a destructive torque of: 333 Nm (EXT75DX) 620 Nm (EXT255DX) Fixing screws: To ISO898-1 strength class 12.9...
Page 32: Recommended Purge Gas Flow
Connect the logic interface to the TIC If an Edwards TIC Turbo Instrument Controller or TIC Turbo Controller is used to power and control the pump, the DX pump logic interface cable connects directly into the back of the TIC. Refer to the TIC Instruction Manual for further information.
Page 33: Connect The Electrical Supply
0 V and earth. Refer to Table 10 - Logic Interface Connector Pins when connecting the electrical supply to the customer connector mating half. © Edwards Limited 2013. All rights reserved. Page 25 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 34: Parallel Interface Mode
15) and to pin 2 of the logic interface mating half. The output can be used to control other devices in the pumping system. The output can drive a low power relay of up to 24 V coil rating. Page 26 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 35: Serial Interface Mode
Figure 9 - Logic interface connections - serial mode 1. RS232 interface on control equipments 3. Fuse 2. 24 V d.c. electrical supply 4. DX pump logic interface © Edwards Limited 2013. All rights reserved. Page 27 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 36: Serial Enable
To send a Serial message, first activate Serial Enable. This is achieved by linking the Serial Enable input signal (pin 5) to pin 2 of the customer logic interface mating half. Edwards recommends incorporating this link into the customer Serial communications cable so that Serial Enable is only activated when the serial cable is connected. When the cable is removed, Serial Enable will become inactive.
Page 37: Message Structure
 The message protocol in multi-drop mode is marginally different, refer to Section 3.7.7. © Edwards Limited 2013. All rights reserved. Page 29 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 38: Command Set
>50% speed or hard vent if stop and <50% speed Hard vent if stop or fail Same as option 6 Vent = Permanently Enabled (Fan) Page 30 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 39 There is no open vent valve command but the stop command (!C852 0) will clear the override. © Edwards Limited 2013. All rights reserved. Page 31 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 40 Missing parameter Parameter out of range Invalid command in current state - e.g. serial command to start/stop when in parallel control mode Page 32 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 41: Multi-Drop Mode
The remainder of the message (command, query or reply) follows the same protocol as already described for  single pump systems. The wild card address 99 is very useful and means ‘any’ node.  © Edwards Limited 2013. All rights reserved. Page 33 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 42: Vent Options, Vent Valve Connection And Control
A manual vent valve is supplied with the DX pump. It is not possible to accurately control the rate of pressure rise using the manual vent valve so take care not to open it too quickly. Edwards recommends opening the manual vent valve only after the pump speed has fallen to 50% of full rotational speed.
Page 43: Alternative Valve Connected To The Vacuum System
Serial Interface to close the vent valve before sending a Start command. This is known as a delayed start. If the DX pump is controlled with an Edwards TIC Turbo and Instrument Controller or TIC Turbo Controller, the TAV solenoid valve can be driven from the TIC. Refer to the TIC Instruction Manuals for more information.
Page 44: Cooling
(40 cfm). The air cooler can be powered by a customer external power supply, the Edwards TIC Turbo and Instrument Controller, the TIC Turbo Controller or by the Podule. It cannot be powered by the Podule if a TAV solenoid valve is already connected to the Podule.
Page 45 Make sure there is a layer of thermal contact grease on the water cooler before refitting it to the pump. © Edwards Limited 2013. All rights reserved. Page 37 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 47: Operation
The DX pump can be configured using the customer serial system. Section 4.1 details the commands that will be needed to configure the Podule. Alternatively, use the Edwards TIC Turbo and Instrument Controller or TIC Turbo Controller. Further information regarding this is detailed in Section 4.2.
Page 48: Powering A Fan From The Podule
To check what Venting Option is set, send a query as follows: Command The reply will be in the following format: Reply Page 40 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 49: Standby Speed Setting
The Normal Speed is now stored in memory within the DX pump. To check what Normal Speed is set, send a query as follows: Command The reply will be as follows: Reply © Edwards Limited 2013. All rights reserved. Page 41 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 50: Timer Setting And Options
To check whether the Timer is enabled or disabled, send the following query: Command The reply will be as follows (where d=0 means disabled and d=1 means enabled): Reply Page 42 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 51: Analogue Signal Options
The reply will be as follows: Reply To check whether Electronic Braking is enabled or disabled, send the following query: Command © Edwards Limited 2013. All rights reserved. Page 43 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 52: Factory Settings
XX denotes the address of the node that is sending the command): Page 44 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 53: Configuring The Dx Pump Using A Tic
Configuring the DX pump using a TIC The DX pump can be configured using the Edwards TIC Turbo and Instrument Controller or TIC Turbo Controller. It is possible to set the following parameters of the DX pump using the TIC: Power limit setting ...
Page 54: Pre-Start Checks
Stop the DX pump by disconnecting the Start/Stop control input from the 0 V control reference on the logic interface connector. The pump rotor will decelerate to rest. Page 46 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 55: Parallel Monitoring
If the pump is currently below Standby Speed, it will accelerate until it reaches Standby Speed. If it is running faster than Standby Speed, it will decelerate until Standby Speed is reached. © Edwards Limited 2013. All rights reserved. Page 47 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 56: Stop The Pump
The reply will be as follows, where the first returned number refers to motor rotational speed in revolutions per second (Hz): Reply sp d Page 48 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 57: Simultaneous Parallel And Serial Operation
Operation with a TIC For operation with an Edwards Turbo Instrument Controller or TIC Turbo Controller, the DX pump can be connected directly to this type of unit, which will provide the power necessary to drive the DX pump. Instructions on the setup and operation with the TIC or TIC Turbo Controller can be found on CD ROM part number D397-00-879 which is supplied with the TIC or TIC Turbo Controller.
Page 58: Operation At High Temperatures
The Podule will signal a Fail condition if over-speed has been detected. If the pump appears to be running at over-speed, switch it off and consult Edwards or the supplier. 4.9.4...
Page 59: Bakeout
Heating the pump will also prevent condensation of vapours inside the pump. The Edwards BX bakeout band may be used to heat the pump (refer to Section 7.4). Fit the appropriate band around the pump, just below the CF inlet flange.
Page 60 Any Fail signals that were triggered during the regenerative power period are lost when the power is reinstated. Page 52 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 61: Maintenance
If the DX pump is contaminated inside, it may not be possible to achieve the specified ultimate vacuum or pump- down time may increase. The pump should be returned to an Edwards Service Centre where the pump will be dismantled and cleaned.
Page 62: Fault Finding
B722-40-880 Issue F Any organic solvents can be used to clean the external surfaces of the pump. Edwards recommends using non-CFC solvents, such as isopropanol or ethanol. Use a cleaning solution that is suitable for the contaminants on the pump surfaces.
Page 63 If so, the rotor is out of balance. pitched noise? Contact the supplier or Edwards. Any other problems Contact the supplier or Edwards. © Edwards Limited 2013. All rights reserved. Page 55 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 64: Flashing Error Codes
The reply will be as follows, where the first returned number refers to motor rotational speed in revolutions per second (Hz): Reply sp d Page 56 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 65 Bit number Status flag Active flags means Fail Fail status condition active Stopped speed Below stopped speed Normal speed Above normal speed © Edwards Limited 2013. All rights reserved. Page 57 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 66 Over-speed and Over-current trip not activated Pump internal temperature measurement system is fine Serial enable has not become inactive during serial control Page 58 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 67: Useful Service Information
Send the following query to find out the PIC software version: Command The reply is as follows, where String1 is the PIC software version number: Reply String 1 © Edwards Limited 2013. All rights reserved. Page 59 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 69: Storage And Disposal
Do not incinerate the pump. The pump contains phenolic and fluorosilicone materials that can decompose to very dangerous substances when heated to high temperatures. © Edwards Limited 2013. All rights reserved. Page 61 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 71: Service, Spares And Accessories
Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, China, France, Germany, Israel, Italy, Japan, Korea, Singapore, United Kingdom, USA, and a world-wide network of distributors. Order spare parts and accessories from the nearest Edwards company or distributor. When ordering, please state for each part required: Model and Item Number of the equipment ...
Page 72: Inlet Strainer
B722-40-880 Issue F 7.3.2 Inlet strainer The EXT75iDX and EXT255iDX pumps are supplied with an inlet strainer for the interstage port. The Item Number for a replacement inlet strainer is given below. Flange Size Inlet Screen DN25ISO-K A223-05-067 7.3.3 Inlet flange seals DX pumps are supplied with an inlet seal.
Page 73: Bx Bakeout Band
The vent port adaptor has a 1/8 inch BSP male thread that can be screwed into both the vent port and purge port, making them suitable for NW10 fittings. Vent port adaptor Item Number Vent Port adaptor NW10 -1/8 inch BSP male B580-66-011 © Edwards Limited 2013. All rights reserved. Page 65 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 74: Prx Purge Restrictor
TIC Turbo Controller (200 W) D397-12-000 TIC Turbo and Instrument Controller (100 W) D397-21-000 TIC Turbo and Instrument Controller (200 W) D397-22-000 Page 66 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 75: Tic Pc Program
8. Purge port blank (supplied) 17. BX bakeout band 9. Purge port adaptor 18. Inlet screen (supplied fitted) EXT75iDX and EXT255iDX only © Edwards Limited 2013. All rights reserved. Page 67 Edwards and the Edwards logo are trademarks of Edwards Limited.

This manual is also suitable for:

Ext75dx Ext255dx Ext255idx B722-41-000 B722-42-000 B722-43-000 ... Show all

Edwards EXT75iDX Instruction Manual

Quick Links

Need help?

Questions and answers

Subscribe to Our Youtube Channel

Related Manuals for Edwards EXT75iDX

Summary of Contents for Edwards EXT75iDX

This manual is also suitable for:

Table of Contents