Table 1-4: Pro165Sl/Sle Series Specifications (-300 To -600) - Aerotech PRO165SLE Hardware Manual

PRO165SL/SLE
Table 1-4: PRO165SL/SLE Series Specifications (-300 to -600)
Travel
(1)
Accuracy
Resolution
(Minimum
Incremental Motion)
Bidirectional
(1)
Repeatability
Horizontal Straightness
Vertical Straightness
Pitch
Roll
Yaw
Ball Screw Lead
Maximum Speed
Maximum Acceleration
(5)
Load Capacity
Moving Mass
(with tabletop)
Stage Mass
(no motor)
Material
Mean Time Before Failure (MTBF)
1. Certified with -PL1 and -PL2 option.
2. Achieved with Aerotech rotary motor with amplified sine encoder.
3. Achieved with Aerotech rotary motor with 2500 counts/rev digital encoder.
4. Requires the selection of an applicable amplifier with sufficient voltage and current.
5. Axis orientation for on-axis loading is listed.
6. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system
depend upon the payload and workpoint. Consult the Aerotech factory for multi-axis or non-standard applications.
7. Specifications listed are non-foldback kit options. Contact the factory for specifications when a foldback kit (-FBx) is used.
20
Standard
SL
Calibrated
Standard
SLE
Calibrated
SL
SLE
SL
SLE
(1)
(1)
(4)
(4)
Horizontal
Vertical (Axial)
Side
SL
SLE
SL
SLE
-300 -400
300 mm 400 mm
±10 µm ±12 µm
±2.5 µm ±3 µm
±10 µm ±12 µm
±1.5 µm ±1.5 µm
0.1 µm
0.05 µm (-E1/-E3 encoder), 0.2 µm (-E2 encoder), 1.0 µm (-E4
±0.5 µm ±0.5 µm
±6 µm ±8 µm
±6 µm ±8 µm
58 µrad 70 µrad
(12 arc·sec) (14.4 arc·sec)
58 µrad 70 µrad
(12 arc·sec) (14.4 arc·sec)
58 µrad 70 µrad
(12 arc·sec) (14.4 arc·sec)
5 mm/rev
300 mm/s
Function of motor, amplifier, payload, and maximum axial load
8.1 kg 9.1 kg
8.9 kg 9.9 kg
Anodized Aluminum
20,000 Hours
Hardware Manual
-500
500 mm 600 mm
±14 µm ±16 µm
±3.5 µm ±4 µm
±14 µm ±15.5 µm
±2 µm ±2 µm
(2) (3)
, 1.0 µm
encoder)
±1 µm
±0.75 µm ±0.75 µm
±9 µm ±10 µm
±9 µm ±10 µm
80 µrad 90 µrad
(16.5 arc·sec) (18.6 arc·sec)
80 µrad 90 µrad
(16.5 arc·sec) (18.6 arc·sec)
80 µrad 90 µrad
(16.5 arc·sec) (18.6 arc·sec)
45 kg
25 kg
45 kg
2.3 kg
2.4 kg
10.1 kg 11.1 kg
11.0 kg 12.0 kg
www.aerotech.com
-600