Table of Contents
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Index
Protection Rating
protective ground connection
Rotary Encoder Specifications
serial number
shimming
Side Seal Belt Replacement
Side Seal Belt Replacement Kit Ordering Guide
Solution
Specifications
BM130 Motor
BMS100 Motor
Brake
Encoder
Hall-Effect Sensors
Limit Switch
Linear Encoder
Rotary Encoder
Thermistor Specifications
stabilizing stage
stage
distortion
stabilizing
standoffs
Storage
Symptom
Table of Contents
Temperature Effects
thermal expansion coefficient
Thermistor Specifications
torque
Troubleshooting
vacuum guidelines
vacuum lubricant (Braycote 602EF)
Vacuum Operation
Vibration
74
R
S
13-14
T
V
PRO165SL/SLE Hardware Manual
17
34
Warnings
Warranty and Field Service
41
28
57
57
68
19
44
43
42
41
41
42
42
41
41
14
28
14
14
13
68
3
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18
41
31
68
21
21
21
17
W
www.aerotech.com
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