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Related Manuals for Aerotech PRO165SL Series
Summary of Contents for Aerotech PRO165SL Series
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Page 1: Pro165Sl/Sle Hardware Manual
PRO165SL/SLE Hardware Manual Revision: 1.09.00... - Page 2 This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and may be trademarks of their respective companies.
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Page 3: Table Of Contents
3.4. Limits, Marker, and Machine Direction 3.5. Motor and Feedback Phasing Chapter 4: Maintenance 4.1. Service and Inspection Schedule 4.2. Cleaning and Lubrication 4.3. Belt Adjustment 4.4. Troubleshooting Appendix A: Warranty and Field Service Appendix B: Revision History Index www.aerotech.com... -
Page 4: List Of Figures
Figure 4-1: Hardcover Removal Procedure (Step 2) Figure 4-2: Hardcover Removal Procedure (Step 3) Figure 4-3: Hardcover Removal Procedure (Step 4) Figure 4-4: Foldback Motor Cover Removal Figure 4-5: Foldback Motor Part Callouts Figure 4-6: Lubricate the Pulley Flanges www.aerotech.com... -
Page 5: List Of Tables
Limit Connector Pinout Table 3-8: Part Numbers for the Limit Connector Table 3-9: Feedback Specifications Table 3-10: PRO165SL/SLE Motor Specifications (BMS100) Table 3-11: PRO165SL/SLEMotor Specifications (BM130) Table 3-12: Rotary Encoder Specifications for PRO165SL Stages Table 3-13: Linear Encoder Specifications for PRO165SLE Stages www.aerotech.com... -
Page 6: Safety Procedures And Warnings
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any time. All drawings and illustrations are for reference only and were complete and accurate as of this manual’s release. -
Page 7: Eu Declaration Of Incorporation
PRO165SL/SLE Hardware Manual Table of Contents EU Declaration of Incorporation Manufacturer: Aerotech, Inc. 101 Zeta Drive Pittsburgh, PA 15238-2811 herewith declares that the product: PRO165SL/SLE Stage is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC as amended;... - Page 8 Table of Contents PRO165SL/SLE Hardware Manual This page intentionally left blank. www.aerotech.com...
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Page 9: Chapter 1: Overview
The specifications in this manual pertain to the second generation of PRO SL/SLE stages. Second generation stages can be distinguished from their first generation counterparts by the second generation's curved hardcover. Contact Aerotech if you need a first generation manual. Table 1-1:... - Page 10 XZ or YZ assembly with L-bracket; 5 arc second orthogonality; alignment to within 5 µm ALIGN-PA5Z orthogonality for short travel stages HDZ165 Right angle L-bracket for 50 mm, 100 mm, and 150 mm travels only NOTE: HDZ bracket requires a tabletop when mounting to a PRO series stage Chapter 1 www.aerotech.com...
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Page 11: Environmental Specifications
Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level Altitude Contact Aerotech if your specific application involves use above 2,000 m or below sea level. Use the system in a low vibration environment. Excessive floor or acoustical vibration Vibration can affect system performance. -
Page 12: Basic Specifications
Resolution is dependent on ball-screw pitch, encoder resolution, and controller interpolation. N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any time. All drawings and illustrations are for reference only and were complete and accurate as of this manual’s release. -
Page 13: Table 1-4: Pro165Sl/Sle Series Specifications (-300 To -600)
1. Certified with -PL1 / -PL2 option. 2. Achieved with Aerotech rotary motor with amplified sine encoder. 3. Achieved with Aerotech rotary motor with 2500 counts/rev digital encoder. 4. Requires the selection of an appropriate amplifier with sufficient voltage and current. -
Page 14: Vacuum Operation
6. Baking vacuum components between 100 and 125 °C for 24 to 48 hours significantly reduces outgassing at initial pump-down to vacuum pressure and evaporates water vapor that impregnates porous surfaces on the aluminum and Teflon cables. Aerotech recommends that customers bake out vacuum systems when first installing them in the vacuum chamber. -
Page 15: Chapter 2: Installation
Allowing it to stabilize to room temperature will ensure that all of the alignments, preloads, and tolerances are the same as they were when tested at Aerotech. Use compressed nitrogen or clean, dry, oil- less air to remove any dust or debris that has collected during shipping. -
Page 16: Figure 2-1: Lifting Features
The lifting hardware must be removed before the stage can be operated. Figure 2-1: Lifting Features N O T E : After removing the shipping brackets, retain them for future use. Do not transport or ship the PRO165SL/SLE without the shipping brackets attached. Chapter 2 www.aerotech.com... -
Page 17: Dimensions
PRO165SL/SLE Hardware Manual Mechanical Specifications and Installation 2.2. Dimensions Figure 2-2: PRO165SL Dimensions www.aerotech.com Chapter 2... -
Page 18: Figure 2-3: Pro165Sle Dimensions
Mechanical Specifications and Installation PRO165SL/SLE Hardware Manual Figure 2-3: PRO165SLE Dimensions Chapter 2 www.aerotech.com... -
Page 19: Figure 2-4: Pro165Sl/Sle Accessory Tabletop Dimensions (-Tt3/-Tt6 Option)
PRO165SL/SLE Hardware Manual Mechanical Specifications and Installation Figure 2-4: PRO165SL/SLE Accessory Tabletop Dimensions (-TT3/-TT6 Option) www.aerotech.com Chapter 2... -
Page 20: Figure 2-5: Pro165Sl/Sle Z-Axis Bracket Dimensions
Mechanical Specifications and Installation PRO165SL/SLE Hardware Manual Figure 2-5: PRO165SL/SLE Z-Axis Bracket Dimensions Chapter 2 www.aerotech.com... -
Page 21: Securing The Stage To The Mounting Surface
PRO165SL/SLE. Shimming should be avoided if possible. If shimming is required, it should be minimized to retain maximum rigidity of the system. Table 2-1: Stage Mounting Surface Flatness Requirement Stage Travel Flatness Requirement All Travels 7.5 µm www.aerotech.com Chapter 2... -
Page 22: Figure 2-6: Mounting Hole Locations
Table 2-2: Stage to Mounting Surface Hardware Typical Screw Mounting Hardware Torque M6 x 22 mm (or 1/4" x 7/8") SHCS with flat washers 7 N·m [5 ft·lb] Figure 2-6: Mounting Hole Locations Chapter 2 www.aerotech.com... -
Page 23: Attaching The Payload To The Stage
N O T E : If your PRO165SL/SLE was purchased with Aerotech controls, it might have been tuned with a representative payload based on the information provided at the time of order. If the PRO165SL/SLE is started up without a payload, the servo gains provided by Aerotech with the shipment may not be appropriate and servo instability can occur. -
Page 24: Figure 2-7: Cantilevered Load Capability
Mechanical Specifications and Installation PRO165SL/SLE Hardware Manual Figure 2-7: Cantilevered Load Capability Figure 2-8: Stage Orientations Chapter 2 www.aerotech.com... -
Page 25: Figure 2-9: Load Torque Equation
For PRO165SL/SLE series stages, the ball screw efficiency is rated at 90% (0.90). The maximum axial load carrying capacity of PRO165SL/SLE stages is 25 kg (55 lb). Figure 2-10: Torque Required to Turn Ball Screw in Vertical Orientation www.aerotech.com Chapter 2... - Page 26 Mechanical Specifications and Installation PRO165SL/SLE Hardware Manual This page intentionally left blank. Chapter 2 www.aerotech.com...
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Page 27: Chapter 3: Electrical Installation
Electrical installation requirements will vary depending on product options. Installation instructions in this section are for PRO165SL/SLE stages equipped with standard Aerotech motors intended for use with an Aerotech motion control system. Contact Aerotech for further information regarding products that are otherwise configured. -
Page 28: Motor And Feedback Connectors
N O T E : Refer to the other documentation accompanying your Aerotech equipment. Call your Aerotech representative if there are any questions on system configuration. N O T E : If using standard Aerotech motors and cables, motor and encoder connection adjustments are not required. -
Page 29: Table 3-1: Motor Connector Pinout
Motor Phase C Reserved Reserved Reserved Reserved Reserved Frame ground (motor protective ground) Table 3-2: Part Numbers for the Motor Connector Mating Connector Aerotech P/N Third Party P/N Backshell ECK00656 Amphenol #17E-1726-2 Sockets [QTY. 4] ECK00659 ITT Cannon #DM53744-6 Connector ECK00657 ITT Cannon #DBM9W4SA197 www.aerotech.com... -
Page 30: Table 3-3: Feedback Connector Pinout
Reserved Reserved Reserved Brake + 1. BMS motors only (otherwise Reserved) 2. With Brake option only Table 3-4: Part Numbers for the Feedback Connector Mating Connector Aerotech P/N Third Party P/N Backshell ECK00656 Amphenol #17E-1726-2 Connector ECK00300 FCI DB25S064TLF Chapter 3... -
Page 31: Table 3-5: Linear Encoder Connector Pinout (-Sle Only)
Common ground Common ground Common ground Reserved Reserved Reserved Reserved Reserved Reserved Reserved Reserved Table 3-6: Part Numbers for the Encoder Connector Mating Connector Aerotech P/N Third Party P/N Backshell ECK00656 Amphenol #17E-1726-2 Connector ECK00300 FCI DB25S064TLF www.aerotech.com Chapter 3... -
Page 32: Table 3-7: Limit Connector Pinout
Signal indicating stage maximum travel produced by negative/CCW stage direction Reserved Common ground Reserved Reserved Table 3-8: Part Numbers for the Limit Connector Mating Connector Aerotech P/N Third Party P/N 9-Pin D-Connector ECK00340 FCI DE09S064TLF Backshell ECK01021 Amphenol 17E-1724-2 Chapter 3... -
Page 33: Motor And Feedback Wiring
PRO165SL/SLE Hardware Manual Electrical Specifications and Installation 3.2. Motor and Feedback Wiring Shielded cables are required for the motor and feedback connections. Figure 3-1: Motor and Feedback Wiring (-SL Option) www.aerotech.com Chapter 3... -
Page 34: Figure 3-2: Motor And Feedback Wiring (-Sle Option)
Electrical Specifications and Installation PRO165SL/SLE Hardware Manual Figure 3-2: Motor and Feedback Wiring (-SLE Option) Chapter 3 www.aerotech.com... -
Page 35: Motor And Feedback Specifications
Note: If the PRO165SL/SLE is driven beyond the electrical limit, it will encounter a mechanical stop. Impacting the mechanical stop could cause damage to the stage even at low speeds. Brake Specifications Supply Voltage 24 VDC Supply Current (typical) 250 mA (Current required to release the brake and allow motion.) www.aerotech.com Chapter 3... -
Page 36: Table 3-10: Pro165Sl/Sle Motor Specifications (Bms100)
5. All performance and electrical specifications ±10% 6. Maximum winding temperature is 100 °C (thermistor trips at 100 °C) 7. Ambient operating temperature range 0 °C - 25 °C; consult Aerotech for performance in elevated ambient temperatures 8. All Aerotech amplifiers are rated A ;... -
Page 37: Table 3-11: Pro165Sl/Slemotor Specifications (Bm130)
5. Torque constant and motor constant specified at stall 6. Maximum winding temperature is 130 °C 7. Ambient operating temperature range 0 °C - 25 °C; consult Aerotech for performance in elevated ambient temperatures 8. All Aerotech amplifiers are rated A ;... -
Page 38: Table 3-12: Rotary Encoder Specifications For Pro165Sl Stages
Digital Resolution 20 µm -E1 with x4000 Interpolation 20 µm 5 nm -E1 with x16000 Interpolation 20 µm 1.25 nm 20 µm 100 nm 1 nm 20 µm 0.5 µm 1. Quadrature decoding included in interpolated resolution calculations Chapter 3 www.aerotech.com... -
Page 39: Limits, Marker, And Machine Direction
Electrical Specifications and Installation 3.4. Limits, Marker, and Machine Direction Aerotech stages are configured to have positive and negative "machine" directions. The machine direction defines the phasing of the feedback and motor signals and is dictated by the stage wiring (refer to Section 3.5. -
Page 40: Motor And Feedback Phasing
Electrical Specifications and Installation PRO165SL/SLE Hardware Manual 3.5. Motor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point. Figure 3-4: Hall Phasing Chapter 3 www.aerotech.com... -
Page 41: Figure 3-5: Analog Encoder Phasing Reference Diagram
PRO165SL/SLE Hardware Manual Electrical Specifications and Installation Figure 3-5: Analog Encoder Phasing Reference Diagram Figure 3-6: Encoder Phasing Reference Diagram (Standard) www.aerotech.com Chapter 3... - Page 42 Electrical Specifications and Installation PRO165SL/SLE Hardware Manual This page intentionally left blank. Chapter 3 www.aerotech.com...
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Page 43: Chapter 4: Maintenance
Re-tighten loose connectors. Replace or repair damaged cables. Clean the PRO165SL/SLE and any components and cables as needed. Repair any damage before operating the PRO165SL/SLE. Inspect and perform an operational check on all safeguards and protective devices. www.aerotech.com Chapter 4... -
Page 44: Cleaning And Lubrication
Cleaning If a solvent is necessary for cleaning the stage, Aerotech recommends using isopropyl alcohol. Harsher solvents, such as acetone, may damage the plastic and rubber seals on the ball screw and bearing trucks. - Page 45 11. Repeat steps 3 through 9 for any areas covered by the original table position. 12. Refasten the hardcover. 13. Restore power to the stage; drive the stage table back to its original position to redistribute lubricants. www.aerotech.com Chapter 4...
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Page 46: Figure 4-1: Hardcover Removal Procedure (Step 2)
Maintenance PRO165SL/SLE Hardware Manual Figure 4-1: Hardcover Removal Procedure (Step 2) Figure 4-2: Hardcover Removal Procedure (Step 3) Chapter 4 www.aerotech.com... -
Page 47: Figure 4-3: Hardcover Removal Procedure (Step 4)
PRO165SL/SLE Hardware Manual Maintenance Figure 4-3: Hardcover Removal Procedure (Step 4) www.aerotech.com Chapter 4... -
Page 48: Belt Adjustment
11. Check the pulley flanges for lubrication. 12. Add small amounts of Parker Super O-Lube lubricant around the circumference of both pulley flanges (Figure 4-6). 13. Replace the foldback cover and mounting screws. 14. Restore power to the stage and resume normal use. Chapter 4 www.aerotech.com... -
Page 49: Figure 4-4: Foldback Motor Cover Removal
PRO165SL/SLE Hardware Manual Maintenance Figure 4-4: Foldback Motor Cover Removal www.aerotech.com Chapter 4... -
Page 50: Figure 4-5: Foldback Motor Part Callouts
N O T E : If the stage has been calibrated (-PL2 option), note the orientation of the two pulleys with regard to each other or recalibration might be required. Figure 4-5: Foldback Motor Part Callouts Figure 4-6: Lubricate the Pulley Flanges Chapter 4 www.aerotech.com... -
Page 51: Troubleshooting
Chapter 3 and Controller Stage moves uncon- documentation). trollably Motor Connections (refer to Chapter 3 and the Controller documentation). Stage oscillates or Gains misadjusted (refer to the Controller documentation). squeals Encoder signals (refer to the Controller documentation). www.aerotech.com Chapter 4... - Page 52 Maintenance PRO165SL/SLE Hardware Manual This page intentionally left blank. Chapter 4 www.aerotech.com...
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Page 53: Appendix A: Warranty And Field Service
Aerotech makes no warranty that its products are fit for the use or purpose to which they may be put by the buyer, whether or not such use or purpose has been disclosed to Aerotech in specifications or drawings previously or subsequently provided, or whether or not Aerotech’s... - Page 54 Aerotech's approval. On-site Warranty Repair If an Aerotech product cannot be made functional by telephone assistance or by sending and having the customer install replacement parts, and cannot be returned to the Aerotech service center for repair, and if Aerotech determines the problem could be warranty-related, then the following policy applies:...
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Page 55: Appendix B: Revision History
Tabletop option dimensions updated: Section 2.2. Basic specifications updated: Section 1.3. Added ThermoComp™ information 1.07.00 1.06.00 1.05.00 1.04.00 Revision changes have been archived. If you need a copy of this revision, contact Aerotech Global Technical Support. 1.03.00 1.02.00 1.01.00 1.00.00 www.aerotech.com Appendix B... - Page 56 Revision History PRO165SL/SLE Hardware Manual This page intentionally left blank. Appendix B www.aerotech.com...
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Page 57: Index
Cleaning multiaxis combinations cleaning solvent NEMA23 36-37 Dimensions part number Electrical Installation Possible Cause EN 60204-1 PRO165 EN ISO 12100 Motor Specifications (BM130) Encoder Specifications Motor Specifications (BMS100) eyebolts Protection Rating www.aerotech.com Index... - Page 58 Solution Specifications stabilizing stage stage distortion stabilizing standoffs Support Symptom Technical Support Temperature Effects thermal expansion coefficient Thermistor Specifications torque Troubleshooting Unpacking and Handling the Stage vacuum vacuum guidelines Vacuum Operation Vibration Warranty and Field Service Index www.aerotech.com...