Related Manuals for Aerotech PLANAR HD Series
Summary of Contents for Aerotech PLANAR HD Series
- Page 1 Planar HD Series Stage User’s Manual P/N: EDS144 (Revision 1.01.00) Dedicated to the Science of Motion Aerotech, Inc. 101 Zeta Drive, Pittsburgh, PA, 15238 Phone: 412-963-7470 Fax: 412-963-7459 www.aerotech.com...
- Page 2 Email: service@aerotechkk.com.jp China: Phone: +852-3793-3488 Email: saleschina@aerotech.com Revision History Revision 1.01.00 November 10, 2010 Revision 1.00.00 July 6, 2009 Product names mentioned herein are used for identification purposes only and may be trademarks of their respective companies. © Aerotech, Inc. 2010...
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Page 3: Table Of Contents
Planar HD Series Stage User's Manual Table of Contents Table of Contents Table of Contents List of Figures List of Tables Chapter 1: Overview 1.1. Standard Features 1.1.1. Optional Features 1.2. Dimensions 1.3. Safety Procedures and Warnings 1.4. EC Declaration of Incorporation Chapter 2: Installation 2.1. - Page 4 Table of Contents Planar HD Series Stage User's Manual www.aerotech.com...
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Page 5: List Of Figures
Planar HD Series Stage User's Manual List Of Figures List of Figures Figure 1-1: Typical Planar HD Series Positioning Stage Figure 1-2: Planar HD Series Stage Components Figure 1-3: Planar HD Outline Dimensions and Axes Information Figure 2-1: Planar HD With Lifting Inserts and Shipping Clamps Shown... - Page 6 List of Figures Planar HD Series Stage User's Manual www.aerotech.com...
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Page 7: List Of Tables
Planar HD Series Stage User's Manual List of Tables List of Tables Table 1-1: Model Numbering System Table 3-1: Environmental Specifications Table 3-2: Planar HD Series Specifications Table 3-3: Motor Specifications Table 3-4: Limit/Motor Wiring Pin Descriptions Table 4-1: Recommended Cleaning Solvents Table B-1: Current Changes (1.01.00) - Page 8 List of Tables Planar HD Series Stage User's Manual viii www.aerotech.com...
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Page 9: Chapter 1: Overview
Typical Planar HD Series Positioning Stage N O T E : Aerotech continually improves its product offerings, and listed options may be superseded at any time. Refer to the most recent edition of the Aerotech Motion Control Product Guide for the most current product information at www.aerotech.com. -
Page 10: Standard Features
Planar HD Series Stage User's Manual 1.1. Standard Features The Planar HD series stages all incorporate completely non-contact air bearing surfaces, linear motors, and feedback devices to provide a maintenance free stage. There is no mechanical contact to wear or require lubrication, making these stages ideal for clean room and medical applications. -
Page 11: Optional Features
On the Planar HD many unique features are possible as a custom design, such as a wide range of cable man- agement possibilities, encoder options for the highest resolution or temperature stability, or vacuum braking options. The standard options for the Planar HD are shown in Table 1-1. Contact the Aerotech factory for more details. -
Page 12: Dimensions
Overview Planar HD Series Stage User's Manual 1.2. Dimensions Figure 1-3: Planar HD Outline Dimensions and Axes Information Chapter 1 www.aerotech.com... -
Page 13: Safety Procedures And Warnings
Planar HD Series Stage User's Manual Overview 1.3. Safety Procedures and Warnings The following statements apply throughout this manual. Failure to observe these precautions could result in serious injury to those performing the procedures and damage to the equipment. This manual and any additional instructions included with the stage should be retained for the lifetime of the stage. - Page 14 Overview Planar HD Series Stage User's Manual Do not expose the stage to environments or conditions outside the specified range of oper- ating environments. Operation in conditions other than those specified can cause damage to the equipment. The stage must be mounted securely. Improper mounting can result in injury and damage to the equipment.
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Page 15: Ec Declaration Of Incorporation
Planar HD Series Stage User's Manual Overview 1.4. EC Declaration of Incorporation Manufactorer: Aerotech, Inc. 101 Zeta Drive Pittsburgh, PA 15238 herewith declares that the product: Aerotech, Inc. Planar HD Stage is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC as amended;... - Page 16 Overview Planar HD Series Stage User's Manual Chapter 1 www.aerotech.com...
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Page 17: Chapter 2: Installation
Planar HD Series Stage User's Manual Installation Chapter 2: Installation This chapter describes the installation procedure of the Planar HD stage, including handling the stage prop- erly, the proper base for stage mounting, attaching the payload, and making the electrical and pneumatic con- nections. -
Page 18: Perparing The Mounting Frame Or Mechanics
The sub-frame will frequently incorporate an isolation system. Assemble any sub-frame and isolation prior to unpacking the Planar HD. The design and support type and locations of the mounting frame or mechanics should be designed by or in collaboration with Aerotech to ensure optimal stage performance. 2.2. Unpacking and Handling the Stage Carefully remove the stage from the protective shipping container. - Page 19 Planar HD Series Stage User's Manual Installation Figure 2-1: Planar HD With Lifting Inserts and Shipping Clamps Shown www.aerotech.com Chapter 2...
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Page 20: Air/Vacuum Requirements
Installation Planar HD Series Stage User's Manual 2.3. Air/Vacuum Requirements The quality of the air supplied to the air bearing is important for the operation of the system. If compressed air is used, it must be filtered to 0.25 microns, dry to 0°F dew point, and oil free. If nitrogen is used, it must be 99.99% pure and filtered to 0.25 microns. -
Page 21: Water Cooling Requirements
Planar HD Series Stage User's Manual Installation 2.4. Water Cooling Requirements There are three water cooling circuits in the Planar HD that require a source of distilled, temperature con- trolled water. A chiller will be sized based on the specific duty cycle of the Planar HD for intended process. -
Page 22: Attaching The Payload To The Stage
Installation Planar HD Series Stage User's Manual 2.5. Attaching the Payload to the Stage Strong rare-earth magnets are present in the linear motor magnet tracks. Loose metal objects (tools, hardware, etc.) can cause personal injury and damage to the equipment. -
Page 23: Electrical Installation
Electrical installation requirements will vary depending on stage options. Installation instructions in this sec- tion are for stages equipped with standard Aerotech motors intended for use with an Aerotech motion control system. Contact Aerotech for further information regarding stages that are otherwise configured. - Page 24 Installation Planar HD Series Stage User's Manual Chapter 2 www.aerotech.com...
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Page 25: Chapter 3: Operating Specifications
Planar HD Series Stage User's Manual Operating Specifications Chapter 3: Operating Specifications This chapter contains general technical information about Planar HD series stages. Included are basic prod- uct specifications and general information on limit switches and motor wiring. 3.1. Environmental Specifications The environmental specifications for the Planar HD are listed in the following table. -
Page 26: Basic Specifications
(6) To protect air bearing against under-pressure, an in-line pressure switch tied to motion controller E-stop input is recommended. (7) Air supply must be clean, dry to 0°F dew-point and filtered to 0.25 μm or better; Aerotech recommends nitrogen at 99.9% purity. -
Page 27: Table 3-3: Motor Specifications
(1) Performance is dependant upon heat sink configuration, system cooling conditions, and ambient temperature. (2) Values shown @ 100°C rise above a 25°C ambient temperature, with motor mounted to the specified aluminum heat sink. (3) Peak force assumes correct rms current; consult Aerotech. (4) Force constant and motor constant specified at stall. -
Page 28: Limit Switches
Planar HD Series Stage User's Manual 3.4. Limit Switches Planar HD series stages are provided with a series of optical limit switch assemblies for each axis. The limit switches signal when the stage has reached its maximum useable travel distance in both directions. -
Page 29: Limit Switch Wiring
Planar HD Series Stage User's Manual Operating Specifications 3.4.2. Limit Switch Wiring Limit switches are open-collector, TTL–compatible, electro–optical devices powered by 5 Volts that change output states when the stage approaches its maximum travel distance and breaks the light beam. Since they are open-collector devices, they may be interfaced to 24 Volt logic inputs. -
Page 30: Standard Motor Wiring
For reference, connector pin outputs and general wiring information is given in the following figures. Pin out- puts are defined in Table 3-4. N O T E : Refer to the other documentation accompanying your Aerotech equipment. Call your Aerotech rep- resentative if there are any questions on system configuration. - Page 31 Planar HD Series Stage User's Manual Operating Specifications Figure 3-4: Motor Wiring Connector for all Planar HD Stages www.aerotech.com Chapter 3...
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Page 32: Vacuum Operation
Operating Specifications Planar HD Series Stage User's Manual Table 3-4: Limit/Motor Wiring Pin Descriptions Pin Output Description CW Limit Signal indicating stage maximum travel produced by CW motor rotation (Normally Active Low). Cosine. Incremental encoder output; either TTL line driven or amplified sine wave type sig- nal. -
Page 33: Chapter 4: Maintenance
Maintenance Chapter 4: Maintenance The Planar HD series stages are designed to be maintenance free positioning systems. Due to the non-con- tact air bearing design, there are no friction surfaces or dynamic seals to wear or require lubrication. However, it is important to clean the bearing surfaces and encoder strips to maintain the accuracy of the stage. This chapter will detail the cleaning process and specify recommended cleaning solvents. -
Page 34: Cleaning Process
Maintenance Planar HD Series Stage User's Manual 4.2.2. Cleaning Process The cleaning process is outlined in the steps that follow. It is recommended that all air bearing surfaces and encoder scales be cleaned often to prevent damage to the stage or decreased performance. The entire stage should be blown with clean, dry, compressed air often to prevent dust form building up in the linear motors, encoders, and air bearing surfaces. - Page 35 Planar HD Series Stage User's Manual Maintenance To minimize the possibility of bodily injury, confirm that all electrical power is disconnected prior to making any mechanical adjustments. www.aerotech.com Chapter 4...
- Page 36 Maintenance Planar HD Series Stage User's Manual Chapter 4 www.aerotech.com...
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Page 37: Appendix A: Warranty And Field Service
Aerotech makes no warranty that its products are fit for the use or purpose to which they may be put by the buyer, where or not such use or purpose... - Page 38 Aerotech will provide an on-site field service representative in a reasonable amount of time, provided that the customer issues a valid purchase order to Aerotech cov- ering all transportation and subsistence costs. For warranty field repairs, the cus- tomer will not be charged for the cost of labor and material.
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Page 39: Appendix B: Technical Changes
Planar HD Series Stage User's Manual Technical Changes Appendix B: Technical Changes Table B-1: Current Changes (1.01.00) Section(s) Affected General Information Section 1.4. Added section Section 3.1. Added section Chapter 2: Installation, Section 2.2. , Sec- Added safety information and warnings tion 2.6. -
Page 40: Table B-2: Archived Changes
Technical Changes Planar HD Series Stage User's Manual Table B-2: Archived Changes Revision Section(s) Affected General Information 1.00.00 New manual Appendix B www.aerotech.com... -
Page 41: Index
Index Planar HD Series Stage User's Manual Index safety procedures Specifications Air Requirements Standard Features Attaching the Payload Standard Motor Wiring cables Unpacking and Handling the Stage Cleaning 25-26 Cleaning Solvents Vacuum Requirements Declaration of Incorporation Warnings Water Cooling Electrical Installation... - Page 42 Planar HD Series Stage User's Manual Index Index www.aerotech.com...
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Page 43: Reader's Comments
Reader's Comments Planar HD Series Stage Manual P/N: EDS144, November 10, 2010 Revision 1.01.00 Please answer the questions below and add any suggestions for improving this doc- ument. Is the manual: Adequate to the subject Well organized Clearly presented Well illustrated How do you use this document in your job? Does it meet your needs? What improvements, if any, would you like to see? Please be specific or cite examples.