Basic Specifications; Table 1-3: Pro165Sl/Sleseries Specifications (-050 To -250) - Aerotech PRO165SLE Hardware Manual

Hardware Manual

1.3. Basic Specifications

Resolution is dependent on screw pitch, encoder resolution, and controller interpolation.
Table 1-3: PRO165SL/SLESeries Specifications (-050 to -250)
Travel
(1)
Accuracy
Resolution
(Minimum
Incremental
Motion)
Bidirectional
(1)
Repeatability
Horizontal Straightness
Vertical Straightness
Pitch
Roll
Yaw
Ball Screw Lead
Maximum Speed
Maximum Acceleration
(5)
Load Capacity
Moving Mass
(with tabletop)
Stage Mass
(no motor)
Material
Mean Time Before Failure (MTBF)
1. Certified with -PL1 and -PL2 option.
2. Achieved with Aerotech rotary motor with amplified sine encoder.
3. Achieved with Aerotech rotary motor with 2500 counts/rev digital encoder.
4. Requires the selection of an applicable amplifier with sufficient voltage and current.
5. Axis orientation for on-axis loading is listed.
6. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system
depend upon the payload and workpoint. Consult the Aerotech factory for multi-axis or non-standard applications.
7. Specifications listed are non-foldback kit options. Contact the factory for specifications when a foldback kit (-FBx) is used.
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Standard
SL
Calibrated
Standard
SLE
Calibrated
SL
SLE
SL
SLE
(1)
(1)
(3.9 arc·sec)
(3.9 arc·sec)
(3.9 arc·sec)
(4)
(4)
Horizontal
Vertical (Axial)
Side
SL
SLE
SL
SLE
-050 -100
50 mm 100 mm
±6 µm ±6 µm
±1 µm ±1.25 µm
±3 µm ±4 µm
±1 µm ±1 µm
0.1 µm
0.05 µm (-E1/-E3 encoder), 0.2 µm (-E2 encoder), 1.0 µm (-E4
±1.5 µm ±2.5 µm
±1.5 µm ±2.5 µm
19 µrad 29 µrad
(6 arc·sec)
19 µrad 29 µrad
(6 arc·sec)
19 µrad 29 µrad
(6 arc·sec)
Function of motor, amplifier, payload, and maximum axial load
5.6 kg 6.1 kg
6.2 kg 6.7 kg
Anodized Aluminum
20,000 Hours
PRO165SL/SLE
-150 -200
150 mm 200 mm
±8 µm ±8 µm
±1.5 µm ±1.75 µm
±6 µm ±8 µm
±1 µm ±1.5 µm
(2) (3)
, 1.0 µm
encoder)
±1 µm
±0.5 µm
±3 µm ±4 µm
±3 µm ±4 µm
29 µrad 39 µrad
(6 arc·sec) (8 arc·sec)
29 µrad 39 µrad
(6 arc·sec) (8 arc·sec)
29 µrad 39 µrad
(6 arc·sec) (8 arc·sec)
5 mm/rev
300 mm/s
45 kg
25 kg
45 kg
2.3 kg
2.4 kg
6.6 kg 7.1 kg
7.3 kg 7.8 kg
-250
250 mm
±9 µm
±2 µm
±9 µm
±1.5 µm
±5 µm
±5 µm
49 µrad
(10.1
arc·sec)
49 µrad
(10.1
arc·sec)
49 µrad
(10.1
arc·sec)
7.6 kg
8.3 kg
19