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Operating Specifications
3.2. Basic Specifications
Basic ABL/ABLH9000 series positioning stage specifications are shown in Table 3-2. Motor specifications
are shown in Table 3-4.
Table 3-2:
ABL/ABLH9000 Series Specifications
Basic Model
Total Travel
Drive System
Feedback
Resolution
Maximum Travel Speed
Maximum Linear Acceleration (no load)
(2)
Maximum Load
(3)
Accuracy
(3)
Repeatability
Straightness and Flat-
(5)
ness
Pitch/Roll/Yaw
Stage Mass
Moving Mass
Orthogonality
(6)
Operating Pressure
(7)
Air Consumption
(8)
Material
Finish
(1) Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system res-
olution.
(2) Maximum load based on bearing capability; maximum application load may be limited by acceleration requirements.
(3) Requires Aerotech controllers and HALAR Calibration option.
(4) Requires environmental compensation.
(5) Requires HALSF option
(6) To protect air bearing against under-pressure, an in-line pressure switch tied to controller E-stop input is recommended.
(7) Air supply must be clean, dry to 0° F dewpoint and filtered to 0.25 µm or better; recommend nitrogen at 99.9% purity.
(8) Optional construction materials include ceramic, invar, stainless, and titanium.
(9) Specifications are for single-axis systems, measured 50 mm above the tabletop. Performance of multi-axis systems is payload
and workpoint dependent. Consult factory for multi-axis or non-standard applications.
12
ABL/ABLH9000 Series Stage User's Manual
(1)
LN
LZR
LN
Maximum Deviation
Bridge
Gantry
Chapter 3
ABL90300-300
300 mm x 300 mm
Linear Brushless Servomotor
(Bridge Axis: BLM-142-A, Gantry Axis: BLM-142-A)
Noncontact Linear Encoder (LN) or Laser Inter-
ferometer (LZR)
1 nm - 1.0 µm
500 mm/s
1 g - 10 m/s
30.0 kg
±0.5 µm
Standard ±10 ppm; Com-
(4)
pensated ±1.5 ppm
±0.1 µm
±0.50 µm
2 arc sec
320 kg
9.5 kg
44.0 kg
2 arc sec
551.6 kPa + 0, -34 kPa
45 SLPM
Aluminum
Hard Coating (62 Rockwell Hardness Teflon® Impreg-
nated)
ABL90500-500
500 mm x 500 mm
2
±0.75 µm
Contact Aerotech for fur-
ther details
±1.5 µm
3.5 arc sec
690 kg
57.0 kg
3 arc sec
www.aerotech.com
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