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PLANAR HD Series
Aerotech PLANAR HD Series Linear Stage Manuals
Manuals and User Guides for Aerotech PLANAR HD Series Linear Stage. We have
1
Aerotech PLANAR HD Series Linear Stage manual available for free PDF download: User Manual
Aerotech PLANAR HD Series User Manual (44 pages)
Air bearing positioning stages
Brand:
Aerotech
| Category:
Controller
| Size: 1 MB
Table of Contents
Table of Contents
3
List of Figures
5
List of Tables
7
Chapter 1: Overview
9
Standard Features
10
Optional Features
11
Table 1-1: Model Numbering System
11
Dimensions
12
Safety Procedures and Warnings
13
EC Declaration of Incorporation
15
Chapter 2: Installation
17
Perparing the Mounting Frame or Mechanics
18
Unpacking and Handling the Stage
18
Air/Vacuum Requirements
20
Water Cooling Requirements
21
Attaching the Payload to the Stage
22
Electrical Installation
23
Optical Limit Swtiches
23
Chapter 3: Operating Specifications
25
Environmental Specifications
25
Accuracy and Temperature Effects
25
Table 3-1: Environmental Specifications
25
Basic Specifications
26
Table 3-2: Planar HD Series Specifications
26
Table 3-3: Motor Specifications
27
Limit Switches
28
Limit Switch Operation
28
Limit Switch Wiring
29
Standard Motor Wiring
30
Vacuum Operation
32
Table 3-4: Limit/Motor Wiring Pin Descriptions
32
Chapter 4: Maintenance
33
Service and Inspection Schedule
33
Cleaning and Lubrication
33
Recommended Cleaning Solvents
33
Table 4-1: Recommended Cleaning Solvents
33
Cleaning Process
34
Appendix A: Warranty and Field Service
37
Appendix B: Technical Changes
39
Table B-1: Current Changes (1.01.00)
39
Table B-2: Archived Changes
40
Index
41
Reader's Comments
43
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