Area Classification In The Surroundings Of The Chamber: Extraction Lead To The Pump, Location Of The Pump; Figure 9: Area Classification In The Surroundings Of The Chamber During Operation (Example) - Binder VDL Series Operating Manual

3.5.3 Area classification in the surroundings of the chamber: extraction lead to the
pump, location of the pump
front
Pump
(example)

Figure 9: Area classification in the surroundings of the chamber during operation (example)

Occurrence of an explosive atmosphere:
occasionally: interior of VDL, line to the vacuum pump, pump
on a rare and temporary basis: surroundings of VDL and pump, interior of the pump module
VDL (E3.1) 06/2020
VDL
Pump module
with pump
(example)
rear
VDL
(rear)
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