Thickness Measurement; Requirements; Sensor Selection; Material Selection - MICRO-EPSILON interferoMETER Operating Instructions Manual

Thickness Measurement

8. Thickness Measurement
8.1

Requirements

In order to measure the thickness of a transparent target from one side, the controller evaluates two signals reflected by
the surface. The controller uses both signals to calculate the distances from the targets and thus the thickness can be
derived.
Align the sensor vertically to the target object. Ensure that the target is located near the working distance.
i
The light beam must meet the target surface at a right angle to avoid inaccurate measurements.
Fig. 71 Single-sided thickness measurement for a transparent object
Minimum target thickness
Maximum target thickness
8.2

Sensor Selection

Thickness measurement is only possible with IMP-THxx model series sensors.
Change to the Settings > Sensor menu.
8.3

Material Selection

Specifying the material is essential for calculating a correct thickness value.
Switch to the Settings > Data recording > Material selection menu.
Select the target material in the field Layer 1.
IMS5x00
Working distance
Operating range
50 µm / group index
2,1 mm / group index
Thickness
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