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MICRO-EPSILON interferoMETER Operating Instructions Manual

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IMS5400-DS19
IMS5400-DS19/MP
IMS5400-TH45
IMS5400-TH45/MP
IMS5400-TH70
IMS5400-TH70/MP
Operating Instructions
interferoMETER
IMS5600-DS19
IMS5600-DS19/MP

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Summary of Contents for MICRO-EPSILON interferoMETER

  • Page 1 Operating Instructions interferoMETER IMS5400-DS19 IMS5400-DS19/MP IMS5600-DS19 IMS5400-TH45 IMS5400-TH45/MP IMS5600-DS19/MP IMS5400-TH70 IMS5400-TH70/MP...
  • Page 2 MESSTECHNIK GmbH & Co. KG Koenigbacher Str. 15 94496 Ortenburg / Germany Tel. +49 (0) 8542 / 168-0 Fax +49 (0) 8542 / 168-90 e-mail info@micro-epsilon.com www.micro-epsilon.com EtherCAT® is registered trademark and patented technology, licensed by Beckhoff Automation GmbH, Germany.

  • Page 3: Table Of Contents

    Contents Safety ............................9 Symbols Used ..............................9 Warnings ................................9 Notes on CE Marking ............................9 Intended Use ..............................10 Proper Environment ............................10 Laser Class ..........................11 Functional Principle, Technical Data ..................12 Short Description ............................12 Measuring Principle ............................12 Term Definitions .............................
  • Page 4 Signal Processing, Calculation ........................58 7.3.1 Data Source, Parameter, Programs ..................... 58 7.3.2 Definitions ............................. 59 7.3.3 Measurement Averaging ......................60 7.3.3.1 Moving average ......................60 7.3.3.2 Recursive average ....................61 7.3.3.3 Median ........................62 Postprocessing .............................. 63 7.4.1 Zeroing, Mastering ........................63 7.4.2 Statistics ............................
  • Page 5 A 3.3.4 Triggering ............................88 A 3.3.4.1 Select Trigger Source ....................88 A 3.3.4.2 Output of Triggered Values, With/Without Averaging ..........88 A 3.3.4.3 Trigger Type ......................88 A 3.3.4.4 Active Level Trigger Input ..................88 A 3.3.4.5 Software Trigger Pulse ....................88 A 3.3.4.6 Number of Output Measurement Values ..............
  • Page 6 A 3.3.15 Key Functions ..........................105 A 3.3.15.1 Multifunction Button ....................105 A 3.3.15.2 Signal Selection for Mastering with Multifunction Button ........105 A 3.3.15.3 Key Lock........................105 A 3.4 Measured Value Format..........................106 A 3.4.1 Structure ............................. 106 A 3.4.2 Exposure Time ..........................
  • Page 7 A 4.4.2.37 Object 2C00h: Measured Value Calculation ............131 A 4.4.2.38 Object 2E00: User Signals ..................132 A 4.5 Mappable objects – process data ....................... 133 A 4.6 Error codes for SDO services ........................134 A 4.7 Oversampling............................... 135 A 4.8 Calculation ..............................
  • Page 8 IMS5x00...

  • Page 9: Safety

    Protect the cable against damage. > Failure of the measuring device Notes on CE Marking The following apply to the interferoMETER IMS5x00: - EU Directive 2014/30/EU, - EU Directive 2011/65/EU Products which carry the CE mark satisfy the requirements of the EU directives cited and the relevant applicable harmo- nized European standards (EN).

  • Page 10: Intended Use

    Safety Intended Use - The interferoMETER measuring system is designed for use in industrial environments and domestic areas. It is used ƒ measuring displacement, distance, profile, thickness and surface inspection ƒ monitoring quality and checking dimensions - The measuring system must only be operated within the limits specified in the technical data, see Chap. 3.6.

  • Page 11: Laser Class

    Laser Class Laser Class The following apply to the interferoMETER IMS5x00-xx measuring systems: The measuring system works with a - pilot laser of a wavelength of 635 nm (visible red) offering max. power of <0.01 mW and a - measuring laser of a wavelength of 840 nm with a max. power of <0.2 mW.

  • Page 12: Functional Principle, Technical Data

    Functional Principle, Technical Data Functional Principle, Technical Data Short Description The interferoMETER measuring system includes: - IMP-DSxx or IMP-THxx sensor - IMC5x00 controller The sensor is completely passive as it contains no heat sources or moving parts. This prevents any heat-related expansion, and ensures high precision of the measuring system.

  • Page 13: Term Definitions

    Thickness sensor Fig. 3 Thickness sensor IMP-TH with working distance and operating range Operating Modes The interferoMETER measuring system provides highly accurate measurements of - distances against visually dense materials with light-diffusing or reflective surfaces - thicknesses for transparent layer materials.

  • Page 14: Technical Data Ims5400

    Functional Principle, Technical Data Technical Data IMS5400 Model IMS5400-DS19 IMS5400-DS19/MP distance 2.1 mm Measuring range thickness 0.010 … 1.3 mm with BK7 Start of measuring range approx. 19 mm < 1 nm Resolution Measuring rate continuously adjustable from 100 Hz to 6 kHz <...

  • Page 15: Technical Data Ims5400-Th

    Functional Principle, Technical Data Technical Data IMS5400-TH Model IMS5400-TH45 IMS5400-TH45/MP IMS5400-TH70 IMS5400-TH70/MP Working distance 45 mm ±3.5 mm 45 mm ±3.5 mm 70 mm ±2.1 mm 70 mm ±2.1 mm Measuring range (thickness) 0.035 … 1.4 mm < 1 nm Resolution Measuring rate continuously adjustable from 100 Hz to 6 kHz...

  • Page 16: Technical Data Ims5600

    Functional Principle, Technical Data Technical Data IMS5600 Model IMS5600-DS19 IMS5600-DS19/MP distance 2.1 mm Measuring range thickness 0.010 … 1.3 mm Start of measuring range approx. 19 mm < 30 pm Resolution Measuring rate continuously adjustable from 100 Hz to 6 kHz <...

  • Page 17: Delivery

    Delivery Delivery Unpacking/Included in Delivery 1 Controller IMC5x00 or IMC5x00MP 1 Sensor with sensor cable IMP-DSxx | IMP-THxx 1 Accessory IMS5x00 (terminal blocks, Ethernet cables, mounting adapters, etc.) 1 Acceptance report 1 Quick manual Carefully remove the components of the measuring system from the packaging and ensure that the goods are for- warded in such a way that no damage can occur.

  • Page 18: Installation

    Installation Installation IMC5x00 Controller Place the IMC5x00 controller on a level surface or install it, e.g., in a control cabinet using a mounting rail (top-hat rail TS35) according to DIN EN 60715 (DIN rail). When mounting the controller onto a DIN rail, an electrical connection (potential equalization) is established between the controller housing and the mounting rail.

  • Page 19: Controller Operating Elements

    Installation Controller Operating Elements Fig. 7 Front view of IMC5x00 controller 1 Multifunction button (light source) Ethernet/EtherCAT 2 LED Status Digital I/O 3 LEDs intensity, range, pilot laser, SLED RS422 connection 4 Sensor connection channel 1 (optical fiber) Encoder connection 5 Power supply connection, LED Power On 10 Analog output (U / I) 1) Resetting to factory settings: press the Multifunction button for more than 10 sec.

  • Page 20: Leds Controller

    Installation LEDs Controller Power on Green Operating voltage available No error Status If EtherCAT is active, meaning of the LED is conform with the EtherCAT guidelines. Intensity Signal in saturation Yellow Signal too low Green Signal ok SLED SLED off Yellow SLED warms up Green...

  • Page 21: Electrical Connections Controller

    Installation Electrical Connections Controller 5.4.1 Connection Possibilities Source Cable Interface Analog Out 2-Port Switch / EtherCAT Junction Patch cable 2x RJ45 Patch cable 2x RJ45 Ethernet Patch cable 2x RJ45 SC2471-x/RS422/OE IF2030/PNET IF2030/ENETIP PS 2020 SC2471-3/IF2008ETH IF2008/ETH Ethernet SC2471-x/IF2008 IF2008/PCIE IF2004/USB SC2471-x/IF2008 SC2471-x/RS422/OE...

  • Page 22: Supply Voltage (Power)

    Voltage supply only for measuring devices, not to be used for drives or similar sources of impulse interference at the same time. MICRO-EPSILON recommends using an optional available power supply unit PS2020 for the controller. After the supply voltage has been switched on, the Power LED lights up.

  • Page 23: Analog Output

    Installation 5.4.7 Analog Output The analog output can be used via the 3-pin screw terminal and is electrically connected to the supply voltage. For the output, you can select current or voltage, see Chap. 7.5.4. Voltage: Pin U/I out and Pin GND, R i approx.

  • Page 24: Switching Outputs (Digital I/O)

    Installation 5.4.8 Switching Outputs (Digital I/O) The two switching outputs Error 1/2 on the 11-pin pluggable screw terminal are electrically connected to the supply voltage. The switching behavior (NPN, PNP , Push-Pull) is programmable, I 100 mA. The maximum auxiliary voltage for a switching output with NPN switching behavior is 30 V. Controller Error 1/2 Error 1/2...

  • Page 25: Synchronization (Inputs/Outputs)

    Installation 5.4.9 Synchronization (Inputs/Outputs) For the pin assignment of the 11-pin pluggable screw terminal, see Fig. 16. - +Sync/Trig and -Sync/Trig pins: symmetrical synchronization output/input or trigger input, function and (I/O) direction are programmable. - The terminating resistor R (120 Ohm) can be switched on and off, see Chap.

  • Page 26: Triggering

    Installation 5.4.10 Triggering The pluggable 11-pin screw terminal with Digital I/O has two trigger inputs. Sync/Trig input TrigIn input The Sync/Trig port can be used as symmetrical The TrigIn switching input is equipped with an internal trigger input. pull-up resistor of 15 kOhm. An open input is identified as High.

  • Page 27: Encoder Inputs

    Installation 5.4.11 Encoder Inputs Two encoders can be connected simultaneously to the 15-pin HD- Sub socket and supplied via 5 V. Each encoder provides the signals A, B and N (zero impulse, refer- ence, index) The maximum pulse frequency is 1MHz. RS422 level (symmetrical) for A, B, N Encoder supply 5 V: each 5 V, max.
  • Page 28 Installation Never bend the cable more tightly than the permissible bending radius. Fixed: R = 30 mm or more Flexible: R = 40 mm or more Do not kink the optical fiber. Please do not grind the optical fiber over sharp corners. Do not crush the optical fiber, do not fasten Do not pull the optical fiber.

  • Page 29: Sensors

    Installation Sensors 5.6.1 Sensor Dimensions ø20 ø10 (.79) (.39) ø10 (.39) Fig. 22 IMP-DS19 distance sensor Fig. 23 IMP-TH45 thickness sensor Measurement direction Dimension in mm (Inch) Fig. 24 IMP-TH70 thickness sensor IMS5x00 Page 29...

  • Page 30: Start Of Measuring Range

    Installation 5.6.2 Start of Measuring Range A base distance (SMR) or working distance must be maintained for each sensor. Measurement Distance sensor object Operating range Working distance Thickness sensor Distance measurement: start of measuring range (SMR), the smallest distance between sensor face and measuring object.

  • Page 31: Mounting, Mounting Adapter

    Installation 5.6.3 Mounting, Mounting Adapter The IMP series sensors use an optical measuring principle that allows for measurements in the nm range. Ensure careful handling during installation and operation. Mount the sensors with an outer clamp. This type of sensor installation ensures the highest level of reliability because the sensor’s cylindrical cover is clamped over a relatively large area.

  • Page 32: Operation

    IT depart- tion (connection with limited ment. This program is available online at connectivity). https://www.micro-epsilon.de/down- Your DHCP server assigns an IP address to load/software/sensorTOOL.exe. Start the program your controller. You can request this IP ad- sensorTOOL.exe.

  • Page 33: Access Via Web Interface

    Operation 6.2.2 Access via Web Interface Interactive web pages you can use to configure the controller are now displayed in the web browser. The controller is active and supplies measurement values. Fig. 28 First interactive web site after calling IP address The horizontal navigation includes the functions below: The search function permits time-saving access to functions and parameters.

  • Page 34: Select A Sensor

    Operation Select a Sensor Controller and sensor(s) are matched at the factory. Go to the Settings > Sensor menu. Select a sensor from the list. The calibration data of up to 20 different sensors can be stored in the controller. Calibration is done at factory only. Button Multifunction The Multifunction button of the controller has multiple functions.

  • Page 35: Positioning The Target, Distance Measurement

    Operation Positioning the Target, Distance Measurement The interferometric measuring principle provides measurement values in front of and behind the actual measuring range. The red-light pilot laser supports you in aligning the sensor to the target during commissioning. Turn on or off the pilot laser in the menu Settings >...

  • Page 36: Positioning The Target, Thickness Measurement

    Operation Positioning the Target, Thickness Measurement The red-light pilot laser supports you in aligning the sensor to the target during commissioning. Turn on or off the pilot laser in the menu Settings > System settings. Position the target (measurement object) as much as possible in the mid of the operating range. The peak positions remains stable in the FFT signal, even though the measurement target moves.
  • Page 37 Operation Presets IMS5x-DS IMS5x-DS/MP Distance measurement, e.g. for ceramic material, non-transparent plastics. No averaging. • • Distance measurement, e.g., for metal, polished surfaces. Median over 3 values. • • Distance measurement, e.g., for PCBs, hybrid materials. Median over 5 values. •...
  • Page 38 Operation Presets IMS5x-TH IMS5x-TH/MP Thickness measurement e.g. for glass, BK7 material. Median over 3 values. • • Thickness measurement e.g. for transparent plastics, PMMA material. No averaging. • • Gap monitoring between glass and mask 01Peak 01 Three peaks are evaluated, layer 1 = BK7, layer 2 = air, 01Peak 02 layer 3 = air calibration...
  • Page 39 Operation Then, you can apply your own settings. When saving a changed preset, the web interface displays a dialog which en- ables the user to define a setup name. This prevents presets from being overwritten by accident. Using the Signal quality function, you can influence the measuring rate and the respective averaging. Averaging with the Median function is specified by the preset.

  • Page 40: Fft Signal

    Operation FFT Signal Go to the Measurement chart menu. Show FFT signal display with FFT. The signal in the chart window shows the distance between sensor and target or the target thickness. Left 0 % (small distance), and right 100 % (large distance). The corresponding measured value is marked by a vertical line (peak marking).
  • Page 41 Operation X axis scaling: The diagram displayed above is zoomable with both sliders on the right and on the left side in the lower total signal. It can also be moved with the mouse in the center of the zoom window (arrow cross). Fig.

  • Page 42: Distance And Thickness Measurement With Web

    Operation Distance and Thickness Measurement with Web Page Display Align the sensor vertically to the target object. Then, move the sensor (or the target) closer, until you more or less reach the start of measuring range for your sen- sor. Once the object is within the sensor’s measuring range, the Range LED (green or yellow) on the front of the controller will light up.
  • Page 43 Operation Mouseover feature. When moving the mouse over the graph, curve points are highlighted with a circle symbol while the corresponding values are displayed in the text boxes above the graph. X axis scaling: The total signal is zoomable with the slider on the left side during running measurement. The time range can be defined in the input field below the time axis.

  • Page 44: Load / Save Settings

    Operation 6.10 Load / Save Settings In this menu you can save current device settings to the controller and recall stored settings. You can permanently store eight different parameter sets in the controller. Unsaved settings are lost when the device is switched off. Save your settings in setups. Fig.

  • Page 45: Advanced Settings

    Advanced Settings Advanced Settings Inputs 7.1.1 Synchronization In case several sensors should measure the same target synchronously, you can synchronize the controllers with each other. The sync output of the first controller IMC5x00-Master is connected to the sync inputs of further controllers, see Chap.

  • Page 46: Data Recording

    Advanced Settings Data Recording 7.2.1 Measuring Rate The measuring rate can be selected in the Settings > Data recording > Measuring rate menu. Select the required measuring rate. The measuring rate can be adjusted in a range from 0.1 kHz to 6 kHz in increments of 100 Hz. Procedure: Position the target (measurement object) as much as possible in the mid of the measuring range.

  • Page 47: Masking The Evaluation Range

    7.2.2 Masking the Evaluation Range With the interferoMETER, the user can set an individual evaluation range. The evaluation range can be selected in the Settings > Data recording > Evaluation range menu. Masking limits the range that the FFT uses for distance or thickness measurement.

  • Page 48: Detection Threshold

    Advanced Settings 7.2.4 Detection Threshold The detection threshold (in digits relative to the magnitude signal) defines the minimum signal quality for including an FFT signal peak in the analysis. The controller evaluates the highest peak. Therefore, the FFT graph must be taken into consideration when defining the threshold.

  • Page 49: Measpeak Sorting

    Advanced Settings 7.2.5 Measpeak Sorting The selection of peak/peaks dictates which region in the signal is used for the distance or thickness measurement. Switch to material selection by going to Settings > Data recording. Switch to the chart type FFT. Choose between First peak and Highest peak.
  • Page 50 Advanced Settings Controller IMC5400/MP , IMC5600/MP Thickness Distance Each peak represents a thickness value. The peaks are Each detected peak represents a distance value. The counted starting at the start of the measuring range (for peaks are counted starting at the start of the measuring the thinnest layer) toward the end of the measuring range range (short distance between sensor and target) in the (for the thickest layer).

  • Page 51: Number Of Peaks

    Chap. 7.2.5. The standard systems IMS5400-DSxx, IMS5400-THxx and IMS5600-DSxx evaluate one layer. If no distances need to be determined for a measurement, Micro-Epsilon recommends using an IMS5400MP-THxx. Example of one layer through glass and gap; measurement peak sorting: first Thickness...
  • Page 52 Advanced Settings Example of laminated glass from three layers, measurement peak sorting: First Thickness Distance IMP-TH IMP-DS Peak 1 Peak 4 Peak D Peak 5 Peak E Peak F Peak 6 Peak 2 Peak 1 Peak A Peak 3 Peak 2 Peak 3 Peak B Peak C...
  • Page 53 Advanced Settings Example of two layers of the same thickness; measurement peak sorting: First Thickness Distance IMP-TH IMP-DS Peak 1 Layer 1 Layer 1 Peak 1 Peak A Peak 2 Peak B Peak 2 Peak A Peak 1 Layer 2 Layer 2 Peak 3 Range [%]...

  • Page 54: Material Selection

    Advanced Settings 7.2.7 Material Selection The refractive index needs to be corrected in the controller for an exact distance or thickness measurement. Only air may be present between the sensor face and the measuring object (Material Infront); other media such as water or alcohol are not permissible.
  • Page 55 Advanced Settings Thickness Controller IMC5400MP , IMC5600MP Distance Change to Material selection , menu Settings > Data record- ing. Assign the materials to the individ- ual layers according to the target used. The IMS5400-THxx and IMS5400-THxx/ MP thickness systems output the coating Peak 1 thickness(es) directly.

  • Page 56: Triggering

    Triggering 7.2.8.1 General Measured value input or output by the interferoMETER can be controlled using an external electrical trigger signal or commands. Both analog and digital outputs are affected by this. - Triggering does not affect the specified measuring rate.

  • Page 57: Triggering Data Recording

    Advanced Settings Lower limit Upper limit Readings encoder Start value Step size Trigger points Fig. 50 Definition of terms for encoder triggering Within the step size there are no readings. Keep this, if measurement averaging is used. 7.2.8.2 Triggering Data Recording The current array signal is only processed and measured values are calculated from it after a valid trigger event.

  • Page 58: Signal Processing, Calculation

    Advanced Settings Signal Processing, Calculation 7.3.1 Data Source, Parameter, Programs One calculation operation can be performed in each calculation block. To do so, you must adjust the calculation pro- gram, the data sources and the program parameters. IMS5x-DS IMS5x-DS/MP IMS5x-TH IMS5x-TH/MP Median •...

  • Page 59: Definitions

    Advanced Settings 7.3.2 Definitions A maximum of 10 calculation blocks are possible. The calculation 01PEAK01 blocks are processed sequentially. Block 1 Block 2 01PEAK01 Block 2 Block 1 Feedback couplings (algebraic loops) over one or several blocks are not possible. Only the distance values or the calculated result Block 2 from the previous calculation block can be used as data source.

  • Page 60: Measurement Averaging

    Advanced Settings 7.3.3 Measurement Averaging Measured value averaging is performed after measurement values have been calculated, and before they are output via the interfaces or their further processing. Measured value averaging - improves the resolution, - allows masking individual interference points or - "smoothes"...

  • Page 61: Recursive Average

    Advanced Settings 7.3.3.2 Recursive average Formula: measured value averaging value, N = 1 ... 32768 + (N-1) x rec (n-1) (n) = measured value index average value or output value The weighted value of each new measured value MV(n) is added to the sum of the previous average values M (n-1).

  • Page 62: Median

    Advanced Settings 7.3.3.3 Median The median of the selected number of measurements is calculated. When the controller calculates the median, incoming measured values are also sorted again after each measurement. Afterwards, the mean value is output as the median. 3, 5, 7 or 9 readings are taken into account. This means that individual interference pulses can be suppressed. However, the smoothing of the measured value curves is not very strong.

  • Page 63: Postprocessing

    Advanced Settings Postprocessing 7.4.1 Zeroing, Mastering Use zeroing and setting masters to define a target value within the measuring range. This shifts the output range. This feature can be useful, for example, when several sensors carry out measurements simultaneously in thickness and planarity measurements.

  • Page 64: Statistics

    Advanced Settings 7.4.2 Statistics The controller derives the following statistical values from the measurement result: - Minimum, - Peak-to-Peak and - Maximum Statistical values are calculated from measured values within the evaluation range. The evaluation range is reset for each new measured value. The statistical values are displayed in the web interface, measurement chart section, or are output via the interfaces.

  • Page 65: Data Reduction, Output Data Rate

    Advanced Settings 7.4.3 Data Reduction, Output Data Rate Data reduction Value Instructs the controller, which data are excluded from the output, and thus the amount of transmitted data is reduced. Reduction applies for RS422 / Analog / The interfaces, which are provided for the Ethernet sub-sampling, are to be selected with the checkbox.

  • Page 66: Outputs

    Advanced Settings Outputs 7.5.1 General A parallel data output via multiple channels is possible. 7.5.2 RS422 RS422 Baud rate 9,6 / 115,2 / 230,4 / 460,8 / 691,2 / 921,6 / 2000 / 3000 / 4000 kBps Signals 01ABS / 01SHUTTER / 01ENCODER1 / 01ENCODER2 / 01PEAK01 / ... / 01PEAK14 01AMOUNT / MEASRATE / TIMESTAMP / COUNTER / STATE / LAYER01 / GAP The RS422 interface has a maximum baud rate of 4000 kBaud.

  • Page 67: Analog Output

    Advanced Settings 7.5.4 Analog Output Only one type of measurement can be transmitted at any given time. The analog output has a resolution of 16 bit. Output signal 01PEAK01 / ... / 01PEAK14 / It is possible to have only one output value output at the analog LAYER01 / GAP output.

  • Page 68: Calculation Of The Measurement Value At The Current Output

    Advanced Settings 7.5.4.1 Calculation of the Measurement Value at the Current Output Current output (without mastering, without teaching) Variables Value range Formula [3,8; <4] SMR reserve Current in mA [4; 20] Measuring range - 4) [>20; 20,2] EMR reserve * MR Measuring range in mm {2,1} Distance in mm...

  • Page 69: Characteristics Distance Value And Analog Output

    Advanced Settings 7.5.4.3 Characteristics Distance Value and Analog Output The zero setting function set the analog output on half of the output range: current output 12 mA; voltage output 2.5 V or 5 V. The mastering function (master value ≠ zero) sets the analog output to the scaled value of the master value. The examples below show the current output and the distance value behavior of an IMP-DS19 with 2.1 mm measuring range.

  • Page 70: Digital Outputs, Limit Value Monitoring

    Advanced Settings 7.5.5 Digital Outputs, Limit Value Monitoring Digital output 1 „Error 1“ 01PEAK01 Digital output 2 „Error 2“ Compare to Lower / upper / both Limit value minimum in mm Value Limit value maximum in mm Value Switching level with error PNP / NPN / Push-Pull / Push-Pull negated Both switching outputs are activated if the target is located outside the measuring range.

  • Page 71: Ethernet Settings

    Advanced Settings 7.5.7 Ethernet Settings Ethernet IP settings of the device Static IP address / Values for IP address / gateway / subnet mask. Only for static IP address DHCP Ethernet measured value transfer settings Server TCP Value for the port Client TCP Client UDP When using a static IP address it is necessary to enter the values for the IP address, Gateway and Subnet mask;...

  • Page 72: System Settings

    Advanced Settings System settings 7.6.1 Unit Website Specifies the unit for display on the web page and for all input parameters related to units. You can select between mm and inches. Data output via Ethernet/analog output is not affected by this setting. The web interface supports the unit 10^1 pm when displaying measuring results.

  • Page 73: Import, Export

    Advanced Settings 7.6.5 Import, Export A parameter set includes the current measurement and device settings (setups) and the initial setup during booting of the controller. The Import & Export menu enables easy exchange of parameter sets with a PC/notebook. Exchange of parameter sets with PC/notebook, possibilities Storing parameter set on PC Loading parameter set from PC Menu Import &...

  • Page 74: Access Authorization

    All passwords are case-sensitive. Numbers are allowed. Special charac- ters are not permitted. User level when User / Defines the user level that is enabled when the sensor starts the next time. MICRO-EPSILON recommends selecting Professional level here. restarting Professional Value Grey shaded fields require a selection.

  • Page 75: Reset Controller

    Advanced Settings 7.6.7 Reset Controller This menu section enables to reset the individual settings to factory settings. This menu requires the Expert user level. Resets the preset to Mat and all parameters (except for interface settings) to Measurement settings factory setting. Device settings Reset the Ethernet interface to factory settings.

  • Page 76: Thickness Measurement

    Thickness Measurement Thickness Measurement Requirements In order to measure the thickness of a transparent target from one side, the controller evaluates two signals reflected by the surface. The controller uses both signals to calculate the distances from the targets and thus the thickness can be derived.

  • Page 77: Fft Signal

    Thickness Measurement FFT Signal If a target surface is outside the measuring range, the controller provides no measuring value. This might also happen, if one signal is below the detection threshold. When measuring the thickness of a transparent material, two boundary areas are active.

  • Page 78: Disclaimer

    MICRO-EPSILON or to your distributor / retailer. MICRO-EPSILON undertakes no liability whatsoever for damage, loss or costs caused by or related in any way to the product, in particular consequential damage, e.g., due to...

  • Page 79: Appendix

    I/O signals can be captured synchronously IF2030/PNET Interface module for PROFINET connection of Micro-Epsilon sensors to RS422/RS485 in- terface, suitable for SC2471-x/RS422/OE cable, 1-channel system with top-hat rail housing, incl. GSDML file for software integration into the PLC, certified according to PNIO V2.33...

  • Page 80: A 2 Factory Settings

    Appendix | Factory Settings IF2030/ENETIP Interface module for Ethernet/IP connection of Micro-Epsilon sensors to RS422/RS485 in- terface, suitable for SC2471-x/RS422/OE cable, 1-channel system with top-hat rail housing, incl. EDS file for software integration into the PLC, certified according to Ethernet/IP CT16...

  • Page 81: A 3 Ascii Communication With Controller

    Appendix | ASCII Communication with Controller ASCII Communication with Controller A 3.1 General The ASCII commands can be sent to the controller via the RS422 interface or Ethernet (Port 23). All commands, inputs and error messages are in English. A command always consists of the command name and zero or more parameters, which are separated by spaces and are completed with LF.
  • Page 82 Appendix | ASCII Communication with Controller Triggering Chap. A 3.3.4.1 TRIGGERSOURCE Select Trigger Source Chap. A 3.3.4.2 TRIGGERAT Effect of the Trigger Input Chap. A 3.3.4.3 TRIGGERMODE Trigger Type Chap. A 3.3.4.4 TRIGGERLEVEL Active Level Trigger Input Chap. A 3.3.4.5 TRIGGERSW Create a software trigger pulse Chap.
  • Page 83 Appendix | ASCII Communication with Controller Measurement Value Processing Chap. A 3.3.10.1 META_STATISTICSIGNAL List of Possible Signal for the Statistics to be Selected Chap. A 3.3.10.2 STATISTICSIGNAL Selection of a Signal for the Statistics Chap. A 3.3.10.3 META_STATISTIC List of Possible Signals for the Statistics Chap.

  • Page 84: A 3.3 General Commands

    Appendix | ASCII Communication with Controller A 3.3 General Commands A 3.3.1 General A 3.3.1.1 Help HELP [HELP | <Command>] Help is displayed for a command. If no command is specified, general help information is displayed. A 3.3.1.2 Controller Information GETINFO Controller data are queried.

  • Page 85: A 3.3.1.5 Synchronization

    Appendix | ASCII Communication with Controller A 3.3.1.5 Synchronization SYNC [NONE | MASTER | SLAVE_SYNTRIG | SLAVE_TRIGIN] Setting the type of synchronization: - NONE: No synchronization - MASTER: With this setting, the controller is the master, i.e., it outputs synchronization impulses at the Sync/Trig output - SLAVE_SYNTRIG: With this setting, the controller is the slave and waits for synchronization impulses, e.g., from anoth- er controller or similar impulse source, at the Sync/Trig input.

  • Page 86: A 3.3.2 User Level

    Appendix | ASCII Communication with Controller A 3.3.2 User Level A 3.3.2.1 Changing the User Level LOGIN <Password> Enter the password to switch to Professional level. The following user levels exist: - USER: Read-only access to all elements + use of the web diagrams - PROFESSIONAL: Read/write access to all elements A 3.3.2.2 Changing to User Level...

  • Page 87: Sensor

    Appendix | ASCII Communication with Controller A 3.3.3 Sensor A 3.3.3.1 Info about Calibration Tables SENSORTABLE ->SENSORTABLE Channel, Position, Sensor name, Measurement range, Serial number IMP-DS19 2.100 mm, 12345678 IMP-TH45 2.100 mm, 12345678 -> All available (learned) sensors are displayed. A 3.3.3.2 Sensor Number SENSORHEAD [<number>]...

  • Page 88: A 3.3.4 Triggering

    Appendix | ASCII Communication with Controller A 3.3.4 Triggering A 3.3.4.1 Select Trigger Source TRIGGERSOURCE [NONE | SYNCTRIG | TRIGIN | SOFTWARE | ENCODER1 | ENCODER2 | ENCODER3] The trigger source triggers the triggering process. - NONE: No trigger source - SYNCTRIG: Use Sync/Trig input - TRIGIN: Use TrigIn input - SOFTWARE: Triggering is caused by the TRIGGERSW command.

  • Page 89: A 3.3.4.8 Maximum Encoder Triggering

    Appendix | ASCII Communication with Controller A 3.3.4.8 Maximum Encoder Triggering TRIGGERENCMAX [<maximum_value>] Set maximum encoder value for triggering. The value can be set between 0 and 2 A 3.3.4.9 Minimum Encoder Triggering TRIGGERENCMIN [<minimum_value>] Set minimum encoder value for triggering. The value can be set between 0 and 2 A 3.3.4.10 Step Size Encoder Triggering TRIGGERENCSTEPSIZE [<value_of_step_size>]...

  • Page 90: A 3.3.5 Encoder

    Appendix | ASCII Communication with Controller A 3.3.5 Encoder A 3.3.5.1 Encoder Interpolation Depth ENCINTERPOL1 [1 | 2 | 4] ENCINTERPOL2 [1 | 2 | 4] ENCINTERPOL3 [1 | 2 | 4] Set the interpolation depth of each encoder input. A 3.3.5.2 Effect of the Reference Track ENCREF1 [NONE | ONE | EVER]...

  • Page 91: A 3.3.6 Interfaces

    Appendix | ASCII Communication with Controller A 3.3.6 Interfaces A 3.3.6.1 Ethernet IP Settings IPCONFIG DHCP | (STATIC [<IPAddress> [<Netmask> [<Gateway>]]]) Set Ethernet interface. - DHCP: IP address and gateway are automatically requested by DHCP . System looks for a LinkLocal address after approx..

  • Page 92: A 3.3.7 Parameter Management, Load / Save Settings

    Appendix | ASCII Communication with Controller A 3.3.7 Parameter Management, Load / Save Settings A 3.3.7.1 Safe / Load Connection Settings BASICSETTINGS READ | STORE - READ: Reads the connection settings from the controller flash. - STORE: Saves the current connection settings from the controller RAM into the controller flash. A 3.3.7.2 Show Changed Parameters CHANGESETTINGS...

  • Page 93: A 3.3.7.6 Editing, Storing, Displaying, Deleting Measurement Settings

    Appendix | ASCII Communication with Controller A 3.3.7.6 Editing, Storing, Displaying, Deleting Measurement Settings MEASSETTINGS <Subcommand> [<Name>] Settings for measurement task transferring application-depending measurement settings between controller RAM and controller Flash. Either the presets specified by the manufacturer or the user-specific settings are used. Each preset can be used as user-specific setting.

  • Page 94: Measurement

    Appendix | ASCII Communication with Controller A 3.3.8 Measurement A 3.3.8.1 Measuring Rate MEASRATE [<Messrate>] Specifies the measuring rate in kHz, range 0.100 … 6.000. A maximum of three decimal places may be specified, e. g. 0.100 for 0.1 kHz. A 3.3.8.2 Masking the Evaluation Ranges ROI [<Start>...

  • Page 95: Material Data Base

    Appendix | ASCII Communication with Controller A 3.3.9 Material Data Base A 3.3.9.1 Material Table MATERIALTABLE Output of material table that is stored in the controller. -> MATERIALTABLE Material, n_group, Description „Vacuum“, 1.000000, „Perfect vacuum“ „Water“, 1.363000, „liquid water (H20) at 25C“ „Acrylic“, 14.97500, „acrylic resin, adhesive, lacquer“...

  • Page 96: A 3.3.9.7 Defining A Medium In Front Of The Target

    Appendix | ASCII Communication with Controller A 3.3.9.7 Defining a Medium in Front of the Target MATERIAL_INFRONT [<Name>] Defines or lists the medium between the sensor and the first layer of the target. - Name: Name of the material or medium used, see material table. A 3.3.9.8 Delete a Material MATERIALDELETE <Name>...

  • Page 97: A 3.3.10.5 Statistics Eample

    Appendix | ASCII Communication with Controller A 3.3.10.5 Statistics Eample The commands are executed with the Telnet program, no statistical values have been defined. ->o 169.254.168.150 . _ _ _ _ _ _ _ _ _ . _ _ _ \ | \ _ _ _ | \ _ / | / \ _ _ _ ) / ‚...

  • Page 98: A 3.3.10.6 List Of Signals Which Can Be Parameterized

    Appendix | ASCII Communication with Controller A 3.3.10.6 List of Signals which can be Parameterized META_MASTERSIGNAL Lists all possible signals which can be used for mastering. A 3.3.10.7 Master Signal Parameterization MASTERSIGNAL [<signal>] MASTERSIGNAL [<signal> <master_value>] MASTERSIGNAL [<signal> NONE] Defines and configures the signal to be mastered. The NONE parameter resets the signal.
  • Page 99 Appendix | ASCII Communication with Controller ->META_MASTER // Lists all variables which are assigned with a master value META_MASTER NONE ->MASTERSIGNAL 01PEAK01 0.422 // Setting Variable 01PEAK01 to 422 µm ->META_MASTER // Lists all variables which are assigned with a master value; the variables 01PEAK01 is now assigned with a master value META_MASTER 01PEAK01 ->MASTER ALL...

  • Page 100: A 3.3.10.11 Channel Computation

    Appendix | ASCII Communication with Controller A 3.3.10.11 Channel Computation COMP [<channel> [<id>]] COMP CH01 <id> MEDIAN <signal1> <median data count> COMP CH01 <id> MOVING <signal1> <moving data count> COMP CH01 <id> RECURSIVE <signal1> <recursive data count> COMP CH01 <id> CALC <factor1> <signal1> <factor2> <signal2> <offset> <name> COMP CH01 <id>...

  • Page 101: A 3.3.11 Data Output

    Appendix | ASCII Communication with Controller A 3.3.11 Data Output A 3.3.11.1 Selection of Digital Output OUTPUT [NONE | ([RS422] [ETHERNET][ANALOG][ERROROUT])] - NONE: No measurement value output - RS422: Output of measurement values via RS422 - ETHERNET: Output of measurement values via Ethernet - ANALOG: Output of measurement values via analog output - ERROROUT: Error or status information about the switching outputs Command starts the measurement value output.

  • Page 102: A 3.3.12 Select Measurement Values To Be Output

    Appendix | ASCII Communication with Controller A 3.3.12 Select Measurement Values to be Output A 3.3.12.1 General Setting the values to be output via the Ethernet interface. The maximum output rate via the Ethernet interface depends on the number of output values. A 3.3.12.2 Data Selection of Ethernet OUT_ETH [<signal1>] [<signal2>] …...

  • Page 103: A 3.3.13 Switching Outputs

    Appendix | ASCII Communication with Controller A 3.3.13 Switching Outputs A 3.3.13.1 Error Switching Outputs ERROROUT1 [01ER1 | 01ER2 | 01ER12 | ERRORLIMIT] ERROROUT2 [01ER1 | 01ER2 | 01ER12 | ERRORLIMIT] Setting the error switching outputs. Additional activation using the OUTPUT command is required, see Chap.

  • Page 104: A 3.3.14 Analog Output

    Appendix | ASCII Communication with Controller A 3.3.14 Analog Output A 3.3.14.1 Data Selection ANALOGOUT [<Signal>] Selection of the signal which should be output via the analog output. As parameter, the signal is indicated. A list of possi- ble signals can be seen with META_ANALOGOUT. Additional activation using the OUTPUT command is required see Chap.

  • Page 105: A 3.3.15 Key Functions

    Appendix | ASCII Communication with Controller A 3.3.15 Key Functions A 3.3.15.1 Multifunction Button KEYFUNC1 [NONE|MASTERSET|MASTERRESET|PILOTLASER|SLED] Configuring the button for the interval pressed 1 (0 ... 2 s) - NONE: No function - MASTERSET: The MASTER SET command is triggered (see command Master) for signals that have been defined by KEYMASTERSIGNALSELECT.

  • Page 106: A 3.4 Measured Value Format

    Appendix | ASCII Communication with Controller A 3.4 Measured Value Format A 3.4.1 Structure The structure of measurement frames, see Chap. A 3.5.1.2, depends on the selected measurement values. See below for a summary of commands which enable you to query the available measurement values via Ethernet. Chap.

  • Page 107: A 3.4.6 Measurement Data (Displacements And Signal Quality)

    Appendix | ASCII Communication with Controller A 3.4.6 Measurement Data (displacements and signal quality) An signal quality (if selected) and a measurement value are transmitted for each selected displacement. For the Ethernet transmission 32 bit for each are used. The structure of the intensity data word is shown in the following table.

  • Page 108: A 3.5 Measurement Data Format

    Appendix | ASCII Communication with Controller A 3.5 Measurement Data Format A 3.5.1 Measurement Data transmission to a Server via Ethernet A 3.5.1.1 General During the measurement data transmission to a measurement value server the sensor transmits each measurement value to the measurement value server or to the connected client after successful connection (TCP or UDP). Therefore no explicit requirement is necessary.

  • Page 109: A 3.5.1.2 Measurement Frame

    Appendix | ASCII Communication with Controller A 3.5.1.2 Measurement Frame A data packet typically contains one or more measurement data frames. A measurement data frame comprises one or more signals. The content of a measurement data frame can be set using the out_eth command.

  • Page 110: A 3.6 Warning And Error Messages

    Appendix | ASCII Communication with Controller A 3.6 Warning and Error Messages E200 I/O operation failed E202 Access denied E204 Received unsupported character E205 Unexpected quotation mark E210 Unknown command E212 Command not available in current context E214 Entered command is too long to be processed E230 Unknown parameter E231 Empty parameters are not allowed E232 Wrong parameter count...
  • Page 111 Appendix | ASCII Communication with Controller E364 Setting is invalid E500 Material table is empty E502 Material table is full E504 Material name not found E600 ROI begin must be less than ROI end E602 Master value is out of range E603 One or more values were out of range E610 Encoder: minimum is greater than maximum E611 Encoder‘s start value must be less than the maximum value...

  • Page 112: A 4 Ethercat Documentation

    Appendix | EtherCAT Documentation EtherCAT Documentation A 4.1 General EtherCAT® is, from the Ethernet viewpoint, a single, large Ethernet station that transmits and receives Ethernet tele- grams. Such an EtherCAT system consists of an EtherCAT master and up to 65,535 EtherCAT slaves. Master and slaves communicate via standard Ethernet wiring.

  • Page 113: A 4.3 Introduction

    Appendix | EtherCAT Documentation A 4.3 Introduction A 4.3.1 Structure of EtherCAT® Frames Data are transferred in Ethernet frames with a special Ether type (0x88A4). Such an EtherCAT® frame consists of one or several EtherCAT® telegrams, each of which is addressed to individual slaves/storage areas. The telegrams are either transmitted directly in the data area of the Ethernet frame or in the data area of the UDP datagram.

  • Page 114: A 4.3.3 Addressing And Fmmus

    EtherCAT State Machine The EtherCAT® state machine is part of each EtherCAT® slave. Directly after switching on the interferoMETER, the state machine is in the “initialization” state. In this state, the master has access to the DLL information register of the slave hardware.

  • Page 115: A 4.3.6 Canopen Over Ethercat

    To transmit data from the slave to the master, Tx PDOs are used (inputs). Rx PDOs are used to transfer data from the master to the slave (outputs); this concept is not used in the interferoMETER. The PDO mapping defines which applica- tion objects (measurement data) are transmitted into a PDO.

  • Page 116: Coe Object Directory

    Appendix | EtherCAT Documentation A 4.4 CoE Object Directory The CoE object directory (CANopen over EtherCAT) contains all configuration data of the controller. The objects in the CoE object directory can be called with the SDO services. Each object is addressed based on a 16-bit index. A 4.4.1 Communication-Specific Standard Objects A 4.4.1.1...

  • Page 117: A 4.4.1.7 Txpdo Mapping

    Appendix | EtherCAT Documentation A 4.4.1.7 TxPDO Mapping 1A00 01Peak1 TxPDOMap 01Peak1 0x6000 1AB0 Shutter TxPDOMap CH01SHUTTER 0x6030 1AC0 Encoder1 und Encoder2 TxPDOMap ENCODER1 ENCODER2 0x6050 0x6051 1AD0 Encoder3 TxPDOMap Encoder3 0x6052 1AE0 Counter TxPDOMap COUNTER 0x7000 1AE8 States TxPDOMap TIMESTAMP 0x7001 1AF0...

  • Page 118: A 4.4.1.8 Object 1C00H: Type Of Synchronization Manager

    Appendix | EtherCAT Documentation In object 0x1C13 is selected which PDOs are transferred. The PDO mapping objects are selected. The selection process takes place before switching from PreOP to SafeOP mode. Example 1: Startup procedure to output distance 1 from channel 1 (01PEAK01): - Distance 1 is expressed in 0x6000.

  • Page 119: A 4.4.1.11 Object 1C33H: Synchronization Manager Input Parameters

    Appendix | EtherCAT Documentation A 4.4.1.11 Object 1C33h: Synchronization Manager Input Parameters 1C33 RECORD SM input parameter Sub-indices Number of entries Unsigned8 Synchronization type Unsigned16 Cycle time Unsigned32 Supported synchronization types 0x4005 Unsigned16 Minimum cycle time 1000000 Unsigned32 Calc and copy time Unsigned32 Get cycle time Unsigned16...

  • Page 120: Manufacturer-Specific Objects

    Appendix | EtherCAT Documentation A 4.4.2 Manufacturer-Specific Objects A 4.4.2.1 Overview Index (h) Name Description 2001 User level Login, logout, change password 2005 Controller information Controller info (continued) 2020 Basicsettings Load, save, factory settings 2021 Preset Signal quality 2022 Meas. settings Measurement settings 203F Sensor error...

  • Page 121: A 4.4.2.2 Object 2001H: User Level

    Appendix | EtherCAT Documentation A 4.4.2.2 Object 2001h: User Level 2001 RECORD User level Sub-indices Number of entries Unsigned8 Actual user Unsigned8 Login Visible string wo Logout FALSE BOOL Default user Unsigned8 Password old Visible string wo Password new Visible string wo Password repeat Visible string wo For more information, please refer to the Login section, see Chap.

  • Page 122: A 4.4.2.5 Objekt 2021H: Preset

    Appendix | EtherCAT Documentation A 4.4.2.5 Objekt 2021h: Preset 2021 RECORD Preset Sub-indices Number of entries Unsigned8 Mode Unsigned8 List Visual string Named read Visual string Mode: 0 – STATIC 1 – BALANCED 2 – DYNAMIC For more information, please refer to the Measurement Settings section, see Chap.

  • Page 123: A 4.4.2.8 Object 2101H: Reset

    Appendix | EtherCAT Documentation A 4.4.2.8 Object 2101h: Reset 2101 Reset FALSE BOOL Restarts the controller. A 4.4.2.9 Object 2105h: Factory Settings 2105 Factory reset BOOL Reset to factory defaults. Corresponds to the SETDEFAULT ALL command. A 4.4.2.10 Object 2107h: Reset Counter 2107 RECORD Counter reset Sub-indices...

  • Page 124: A 4.4.2.16 Object 2152H: Sensor Selection

    Appendix | EtherCAT Documentation A 4.4.2.16 Object 2152h: Sensor Selection 2152 RECORD Select sensor Sub-indices Number of entries Unsigned8 Number of sensor Unsigned8 For more information, please refer to the Selecting a Sensor section, see Chap. A 3.3.3 and Sensor Number section, see Chap.

  • Page 125: A 4.4.2.21 Object 21C0H: Ethernet

    Appendix | EtherCAT Documentation A 4.4.2.21 Object 21C0h: Ethernet Objekt 21C0h: Ethernet 21C0 RECORD Ethernet Sub-indices Number of entries Unsigned8 IP address xxx.xxx.xxx.xxx Visible String rw Subnet mask xxx.xxx.xxx.xxx Visible String rw Gateway xxx.xxx.xxx.xxx Visible String rw DHCP FALSE BOOL For more information, please refer to the Ethernet IP Settings section, see Chap.

  • Page 126: A 4.4.2.23 Object 21F3H: Switching Output 1

    Appendix | EtherCAT Documentation A 4.4.2.23 Object 21F3h: Switching Output 1 21F3 RECORD Analog output Sub-indices Number of entries Unsigned8 Output level Unsigned8 Error out Unsigned8 Limit signal Visible String rw Available signals Visible String ro Lower limit value FLOAT32 Upper limit value FLOAT32 Compare to...

  • Page 127: A 4.4.2.26 Object 24A2H: Multifunction Button

    Appendix | EtherCAT Documentation A 4.4.2.26 Object 24A2h: Multifunction Button 24A2 RECORD Keyfunc Sub-indices Number of entries Unsigned8 Function 1 Unsigned8 Function 2 Unsigned8 Function 1 and 2: 0 - Key has no function 2 - Mastering 3 - Turns the ligth source on/off Sub-index 2 in the KEYFUNC commando corresponds to the „signal“.

  • Page 128: A 4.4.2.28 Object 25A1: Encoder3

    Appendix | EtherCAT Documentation A 4.4.2.28 Object 25A1: Encoder3 Sub-indices Number of entries Unsigned8 Encoder3 enable Bool Encoder3 interpolation Unsigned8 Encoder3 initial value Unsigned32 Encoder3 maximal value x Unsigned32 Encoder3 set value False Bool A 4.4.2.29 Object 2711h: Masking the Evaluation Range 2711 RECORD Range of interest Sub-indices...

  • Page 129: A 4.4.2.32 Object 2803H: Existing Materials

    Appendix | EtherCAT Documentation A 4.4.2.32 Object 2803h: Existing Materials 2803 RECORD Material table Sub-indices Number of entries Unsigned8 Material name list „xx“ „xx“ ... Visible String ro Provides a list of all available materials: Air calibration / Air / BK7 / D263T / Ethanol / Fused Silica / LaSF9 / Mirror / N-SF6 / PC / PMMA / PS / Vacuum.

  • Page 130: A 4.4.2.36 Object 2A10H: Statistics

    Appendix | EtherCAT Documentation A 4.4.2.36 Object 2A10h: Statistics 2A10 RECORD Statistic 1 Sub-indices Number of entries Unsigned8 Enable BOOL Signal Visible String rw Available signals Visible String ro Infinite BOOL Depth Unsigned32 Reset BOOL The objects 2A10h to 2A19h generate 10 statistics signals. Sub-index 3 corresponds to the META_STATISTICSIGNAL command.

  • Page 131: A 4.4.2.37 Object 2C00H: Measured Value Calculation

    Appendix | EtherCAT Documentation A 4.4.2.37 Object 2C00h: Measured Value Calculation 2C00 RECORD Comp y Sub-indices Number of entries Unsigned8 Type Unsigned16 Name1 Visible String rw Signal1 Visible String rw Signal2 Visible String rw Available signals Visible String ro Factor1 FLOAT32 Factor2 FLOAT32...

  • Page 132: A 4.4.2.38 Object 2E00: User Signals

    Appendix | EtherCAT Documentation - THICKNESS: Thickness calculation (difference) from two peaks; formula: THICKNESS = <signal1> - <signal2> The result of the calculation is written to a new variable <name>. 4, 5 Signal1 Signal to be used for the thicknesses calculation; signal1 > signal2 Signal2 Name Name of calculation block;...

  • Page 133: A 4.5 Mappable Objects - Process Data

    Appendix | EtherCAT Documentation A 4.5 Mappable objects – process data Displays all individually available process data. The objects 0x600x, 0x680x, 0x700x and 0x7C0x are structured as follows: [INDEX] [NAME] Sub-index 0 Uint8 READ 1 (fix) Sub-index 1 [DATA TYPE] READ Objects 0x6000: Process data.

  • Page 134: Error Codes For Sdo Services

    Appendix | EtherCAT Documentation A 4.6 Error codes for SDO services If an SDO requirement is evaluated as negative, a corresponding error code is added to the “Abort SDO Transfer Proto- col”. Hexadecimal Meaning error code 0503 0000 Toggle bit did not change 0504 0000 SDO protocol timeout expired 0504 0001...

  • Page 135: A 4.7 Oversampling

    PLC works with a cycle time of 1 ms. This means that every 1 ms, an EtherCAT frame is sent to the interferoMETER to pick up process data. If the measuring frequency is set to 4 kHz, you need to specify an oversampling of 4.

  • Page 136: A 4.8 Calculation

    Appendix | EtherCAT Documentation A 4.8 Calculation Setting a filter or a function, see Chap. A 4.4.2.38. A 4.9 Operational Modes A 4.9.1 Free Run There is no synchronization. The PDOs are updated in line with the internal measuring rate. The measuring rate is set using object 0x2251h.

  • Page 137: Status Leds In Ethercat Operation

    Appendix | EtherCAT Documentation A 4.11 STATUS LEDs in EtherCAT Operation STATUS-LED Green state: Green off INIT state Green flashing 2.5 Hz PRE-OP state Green single flash, 200 ms ON / 1000 ms OFF SAFE-OP state Green on OP state Red faults (displayed while green LED pauses): Status LED Red off...

  • Page 138: A 4.12 Ethercat Configuration With The Beckhoff Twincat© Manager

    Confirm with OK. Select a network card which will be searched for EtherCAT® slaves. Confirm with OK. The „Scan for box- es“ window appears (Ether- CAT®-Slaves). Confirm with Yes. The interferoMETER is now included in a list. IMS 5x00 Page 138...
  • Page 139 Appendix | EtherCAT Documentation Acknowledge the Activate Free Run with Yes. The current status on the online side should at least indicate PREOP, SAFEOP or OP. In the event that ERR PREOP appears in Current State the cause is reported in the message window. This is the case if the PDO mapping settings in the controller are different from the settings in the ESI file (IMC5x00.xml).
  • Page 140 Appendix | EtherCAT Documentation You can now view the scope of available process data and the assignment of sync managers. From the TwinCAT menu select the Restart TwinCAT (Config Mode)tab. Configuration is now complete. In the SAFEOP and OP states, the selected measurements are transmitted as process data. IMS 5x00 Page 140...

  • Page 141: A 5 Data Format Rs422

    Appendix | Data Format RS422 Data Format RS422 A 5.1 Bit Structure Description Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0 Data value (measurement value) minimum 2, maximum 5 bytes Footer - Data value ƒ...

  • Page 142: A 5.3 Examples

    Appendix | Data Format RS422 change bit is set in all footers. The overflow bit (O) indicates that one or several measurement frame were not transmitted between the current and pre- vious measuring frame. The bit is transmitted only once for each identified loss and is then reset. If a measurement frame consists of several data packets, the overflow bit is set in all footers.
  • Page 143 Appendix | Data Format RS422 ASCII reply: ECHO OFF\r\n-> Video signal 1: Description Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0 D00 ... D06 Pixel 1 (14 bits) D07 ... D13 D00 ... D06 Pixel n (14 bits) D07 ...

  • Page 144: A 6 Telnet

    Appendix | Telnet Telnet A 6.1 General The Telnet service allows you to communicate with the IMS5x00 from your PC. To communicate with Telnet, you will need - an existing Ethernet connection between IMS5x00 and your PC, - the ASCII commands see Chap.
  • Page 146 MICRO-EPSILON MESSTECHNIK GmbH & Co. KG Koenigbacher Str. 15 · 94496 Ortenburg/Germany Phone +49 8542 168 0 · Fax +49 8542 168 90 X9751389-B012052MSC info@micro-epsilon.com · www.micro-epsilon.com Your local contact: www.micro-epsilon.com/contact/worldwide/ MICRO-EPSILON MESSTECHNIK...

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