Table Of Contents - MICRO-EPSILON interferoMETER Operating Instructions Manual

1. Safety ........................................................................................................................................ 9
1.1 Symbols Used ................................................................................................................................................. 9
1.2 Warnings .......................................................................................................................................................... 9
1.3 Notes on CE Marking ...................................................................................................................................... 9
1.4 Intended Use ................................................................................................................................................. 10
1.5 Proper Environment ....................................................................................................................................... 10
2. Laser Class ............................................................................................................................. 11
3. Functional Principle, Technical Data ..................................................................................... 12
3.1 Short Description ........................................................................................................................................... 12
3.2 Measuring Principle ....................................................................................................................................... 12
3.3 Term Definitions ............................................................................................................................................. 13
3.4 Operating Modes ........................................................................................................................................... 13
3.5 Sensors .......................................................................................................................................................... 13
3.6 Technical Data IMS5400 ................................................................................................................................ 14
3.7 Technical Data IMS5400-TH .......................................................................................................................... 15
3.8 Technical Data IMS5600 ................................................................................................................................ 16
4. Delivery .................................................................................................................................. 17
4.1 Unpacking/Included in Delivery .................................................................................................................... 17
4.2 Storage .......................................................................................................................................................... 17
5. Installation .............................................................................................................................. 18
5.1 IMC5x00 Controller ........................................................................................................................................ 18
5.2 Controller Operating Elements ...................................................................................................................... 19
5.3 LEDs Controller .............................................................................................................................................. 20
5.4 Electrical Connections Controller .................................................................................................................. 21
5.4.1 Connection Possibilities ............................................................................................................... 21
5.4.2 Handling of Pluggable Screw Terminals ...................................................................................... 21
5.4.3 Grounding, Shielding ................................................................................................................... 21
5.4.4 Supply Voltage (Power) ................................................................................................................ 22
5.4.5 RS422 ........................................................................................................................................... 22
5.4.6 Ethernet, EtherCAT ....................................................................................................................... 22
5.4.7 Analog Output .............................................................................................................................. 23
5.4.8 Switching Outputs (Digital I/O) ..................................................................................................... 24
5.4.9 Synchronization (Inputs/Outputs) ................................................................................................ 25
5.4.10 Triggering ...................................................................................................................................... 26
5.4.11 Encoder Inputs ............................................................................................................................. 27
5.5 Sensor Cable ................................................................................................................................................. 27
5.6 Sensors .......................................................................................................................................................... 29
5.6.1 Sensor Dimensions ...................................................................................................................... 29
5.6.2 Start of Measuring Range............................................................................................................. 30
5.6.3 Mounting, Mounting Adapter ....................................................................................................... 31
6. Operation ................................................................................................................................ 32
6.1 Initial Operation .............................................................................................................................................. 32
6.2 Control via Ethernet ....................................................................................................................................... 32
6.2.1 Requirements ............................................................................................................................... 32
6.2.2 Access via Web Interface ............................................................................................................. 33
6.3 Select a Sensor .............................................................................................................................................. 34
6.4 Button Multifunction ....................................................................................................................................... 34
6.5 Positioning the Target, Distance Measurement ............................................................................................. 35
6.6 Positioning the Target, Thickness Measurement .......................................................................................... 36
6.7 Measurement Configuration, Signal Quality ................................................................................................. 36
6.8 FFT Signal ...................................................................................................................................................... 40
6.9 Distance and Thickness Measurement with Web Page Display ................................................................... 42
6.10 Load / Save Settings ...................................................................................................................................... 44
7. Advanced Settings ................................................................................................................. 45
7.1 Inputs ............................................................................................................................................................. 45
7.1.1 Synchronization ............................................................................................................................ 45
7.1.2 Encoder ........................................................................................................................................ 45
7.1.3 Key Function ................................................................................................................................. 45
7.1.4 Input Level .................................................................................................................................... 45
7.1.5 Termination ................................................................................................................................... 45
7.2 Data Recording .............................................................................................................................................. 46
7.2.1 Measuring Rate ............................................................................................................................ 46
7.2.2 Masking the Evaluation Range..................................................................................................... 47
7.2.3 Exposure Mode ............................................................................................................................ 47
7.2.4 Detection Threshold ..................................................................................................................... 48
7.2.5 Measpeak Sorting ........................................................................................................................ 49
7.2.6 Number of Peaks .......................................................................................................................... 51
7.2.7 Material Selection ......................................................................................................................... 54
7.2.8 Triggering ...................................................................................................................................... 56
7.2.8.1
7.2.8.2
7.2.8.3
7.2.8.4
IMS5x00
Contents
General ...................................................................................................................... 56
Triggering Data Recording ....................................................................................... 57
Triggering Data Output ............................................................................................. 57
Trigger Time Difference ............................................................................................. 57