Term Definitions; Operating Modes; Sensors - MICRO-EPSILON interferoMETER Operating Instructions Manual

Functional Principle, Technical Data
3.3

Term Definitions

SMR Start of measuring range. Minimum distance between sensor surface and target
MMR Mid of measuring range (=start of measuring range + 0.5*measuring range)
EMR End of measuring range (=start of measuring range + measuring range)
Maximum distance between sensor face and target
MR Measuring range
Sensor
Fig. 2 Distance sensor IMP-DS, measuring range and output signal at the controller
Thickness sensor
Fig. 3 Thickness sensor IMP-TH with working distance and operating range
3.4

Operating Modes

The interferoMETER measuring system provides highly accurate measurements of
- distances against visually dense materials with light-diffusing or reflective surfaces
- thicknesses for transparent layer materials.
By selecting the sensor, the distance or thickness measurement operating mode is selected. Accordingly, the result of
the measurement is a distance or thickness value.
Distance measurements
Measuring range 2.1 mm
Fig. 4 Measuring ranges for distance and thickness measurements
The possible resolution here is in the nanometer range.
To get started quickly, it is recommended to use saved configurations (presets) for various target surfaces and applica-
tions, see Chap. 6.7.
1) Measuring range with n=1.5; for air gap measurement between two glass plates (n~1) the measuring range is
0.05 ... 2.1 mm. The measurement object must be within the working distance.
3.5

Sensors

The controller can be operated with up to 20 different sensors.
The required calibration tables are stored within the controller.
IMS5x00
100 %
50
0
SMR MMR
Target
SMR Measuring range (MR)
Operating range
Working distance
Thickness measurements
35 µm ... 1.4 mm
1
Displacement
EMR
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