Za8F Flow Setting Unit, Zr40H Automatic Calibration Unit - YOKOGAWA EXAxtZR Instruction Manual

6.3 ZA8F Flow Setting Unit, ZR40H Automatic Calibra-
tion Unit
6-4
Flow meter for
reference gas
Figure 6.4 ZA8F Flow Setting Unit
Flowmeter for
Calibration gas
Flowmeter for
Reference gas
Reference gas flow
setting valve
Calibration gas flow
setting valve
Figure 6.5 ZR40H Automatic Calibration Unit
Reference gas flow
setting valve
Flow meter for
calibration gas
Made in Japan
REF.OUT CAL.OUT
Span gas flow
setting valve
Zero gas flow
setting valve
Terminal Box
SPAN IN ZERO IN
F6302.EPS
F6.4E.EPS
IM 11M12A01-02E