Leak Detector Vacuum System Diagram - Agilent Technologies VS Series Operation Manual

Table 3-1 Leak Detector Valve State Table - Single Mechanical Pump System
Leak Detector Foreline
Operating State Valve
Vent
Rough
Gross Leak Test
Contra-Flow Test
Midstage Test
Hold
Sniff
Read Std Leak
Test Port
V2
* V8
**
* Normally open valve, powered closed during all operations. ** Model PD03, MD15,
BD15, MD30+ during the roughing sequence.
3-12
VS Series Helium Mass Spectrometer Leak Detectors
V2/V3
V1 Contra-Flo
w Valve
Test Mode
O C
C O
C O
O O
O C
O C
O O
O C
O: Open
V7
Test Port thermocouple
V6
V5
V4
V3
V1
Figure 3-7 Leak Detector Vacuum System Diagram
V4/V5
Midstage
Valve V6
Fine Test Calibrated
Mode Leak
C C
C C
C C
C C
O C
C C
C C
C O
Calibrated Leak
V7 V8*
Vent Ballast
Valve Valve
O C
C C
C C
C C
C C
C C
C C
C C
C: Closed
Spectrometer
V1 Foreline
V2 Contraflow1
V3 Contraflow2
V4 Midstage1
V5 Midstage2
V6 Cal Leak
V7 Vent
*V8 Exhaust
V8*
Exhaust
Valve
O
C
N/A
O
O
O
O
O