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Agilent Technologies VS Series Operation Manual

Helium mass spectrometer leak detectors
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Vacuum Products Division
VS Series Helium
OPERATION MANUAL
Mass Spectrometer
Leak Detectors
MODELS: PR02, MR15, MD15, MD30+, BR15,
BD15, BD30+ AND PD03
Manual No. 699909942
Revision L
April 2015

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  • Page 1 Vacuum Products Division VS Series Helium OPERATION MANUAL Mass Spectrometer Leak Detectors MODELS: PR02, MR15, MD15, MD30+, BR15, BD15, BD30+ AND PD03 Manual No. 699909942 Revision L April 2015...
  • Page 2 VS Series Helium Mass Spectrometer Leak Detector Contra-Flow is a trademark or registered trademark of Agilent, Inc. Alconox is a registered trademark of Alconox, Inc. Apiezon is a registered trademark of M&I Materials Ltd. Copyright 2015 Agilent, Inc...
  • Page 3 VS Series Helium Mass Spectrometer Leak Detectors Warranty Products manufactured by Seller are warranted against defects in materials and workmanship for twelve (12) months from date of shipment thereof to Customer, and Seller’s liability under valid war- ranty claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of the purchase price of the Product.
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  • Page 5: Table Of Contents

    Hazard and Safety Information ....................xii Agilent Services .........................xxi Contacting Agilent ........................xxi Section 1. Introduction to the VS Series Leak Detector ..............1-1 1.1 The VS Series Leak Detector ..................... 1-1 1.2 Unpacking the Leak Detector....................1-6 1.2.2 Removing the Leak Detector from the Skid ..............1-7 1.3 Installation..........................
  • Page 6 VS Series Helium Mass Spectrometer Leak Detectors 4.2 Dry Nitrogen Vent ........................ 4-5 4.3 Spare Parts List ........................4-6 4.4 Leak Detector Accessory Item List ..................4-8 Appendix A. Communications Protocol ..................A-1 A.2 Communicating with RS-232 ....................A-2 A.2.1 Windows HyperTerminal Set-Up Instructions ............A-2 A.2.2 Printing with HyperTerminal ..................A-4...
  • Page 7 VS Series Helium Mass Spectrometer Leak Detectors List of Figures Figure Title Page Portable Leak Detector with Internal DS42 Wet Rotary Vane Pump, Model VS PR02, and Portable Leak Detector with Internal IDP-3 (PD03) Dimensions ........1-4 Mobile Leak Detector with External DS302 Wet Rotary Vane Pump on a Cart, Model VS MR15, Dimensions* ......................
  • Page 8 VS Series Helium Mass Spectrometer Leak Detectors Manual Valve Control ....................... 3-10 Manual Valve Control - PD03, MD15, BR15, MD30+, BD30+ .......... 3-11 Leak Detector Vacuum System Diagram................3-12 Output Control ........................3-13 Leak Detector Linear Output Voltage ................3-14 3-10 Leak Detector Logarithmic Output Voltage ...............
  • Page 9 VS Series Helium Mass Spectrometer Leak Detectors List of Tables Table Title Page VS Series Leak Detector Configurations and Part Numbers ..........1-2 Installation Requirements ....................1-9 Screens – General Description ..................1-22 VS Series Features......................1-28 Screen Basic Functional Items ..................2-5 On-Screen Icons ........................
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  • Page 11: Preface

    VS Series Helium Mass Spectrometer Leak Detectors Preface Documentation Standards This manual uses the following documentation standards: Notes contain important information. NOTE Cautions appear before instructions, which if not followed, CAUTION could cause damage to the equipment or data loss.

  • Page 12: Hazard And Safety Information

    VS Series Helium Mass Spectrometer Leak Detectors Hazard and Safety Information The common international symbols used in this manual and on the equipment are defined below. ° OFF Supply (Power) Earth (Ground) Terminal ON Supply (Power) Caution, Hot Surface AC – Alternating Current...
  • Page 13 VS Series Helium Mass Spectrometer Leak Detectors Solvents The mechanical components of leak detectors are typically WARNING cleaned with alcohol, methanol, or other solvents. When heated, sprayed, or exposed to high-temperature equipment, these solvents become flammable and explosive, causing serious injury or death. Do not use these solvents near a high-temperature source.
  • Page 14 VS Series Helium Mass Spectrometer Leak Detectors O-ring Care When removing, checking or replacing O-rings, keep in mind the following: Agilent recommends replacing all O-rings during routine NOTE maintenance or during any maintenance procedure requiring that O-rings be removed. Due to the effective cleaning nature of VacuSolv solvent and NOTE its residue-free properties, Agilent’...
  • Page 15 VS Series Helium Mass Spectrometer Leak Detectors Metal Seal Care Metal Seals must be replaced during routine maintenance or CAUTION during any maintenance procedure required. All fasteners must be installed and torqued per assembly procedure specifications. Remove Metal Seals carefully with your fingers. Do not use metal tools for this task, this prevents scratching of any sealing surfaces.
  • Page 16 The Wireless Remote Control is built around an Aerocomm, model AC4424-100, RF transceiver module operating in 2.4 GHz ISM band. The same type of the RF module is built in a VS Series Leak Detector Wireless Base Station PCB and Wireless Remote unit (see VS Series Leak Detector Wireless Remote Operational Manual (6999099945A)).
  • Page 17 Maintain a separation distance of 20 cm or more between the oper- ator and the RF antenna of the VS Series leak detector with a wire- less base station. Use only approved type of antennas for:...
  • Page 18 VS Series Helium Mass Spectrometer Leak Detectors Use surge protection to improve the immunity of the leak CAUTION detector against unidirectional transients caused by the following phenomena: Switching phenomena in the power network ❑ (e.g., switching of capacitor banks, inductive loads, electrical motors, etc.)
  • Page 19 VS Series Helium Mass Spectrometer Leak Detectors This equipment is designed to meet current EEC regulations: WARNING LVD (Low Voltage Directive, 73/23/EEC:1993) and EMC (Electromagnetic Compatibility Directive, 89/336/EEC:1993) for Material Group III, Pollution Degree 2 environment for Industrial, Scientific, Measuring and Process Control Electrical Equipment and R&TTE (Radio and Telecommunications...
  • Page 20 VS Series Helium Mass Spectrometer Leak Detectors Spectrometer Store the Ion Source/Preamplifier sub-assembly in a cool, dry WARNING area in a tightly sealed, ESD protected container. Wear lint-free gloves when handling the spectrometer. Wash hands thoroughly after handling the spectrometer filaments and especially before smoking or eating.

  • Page 21: Agilent Services

    VS Series Helium Mass Spectrometer Leak Detectors To avoid injury, wait until the turbo pump is completely WARNING stopped before disconnecting it from the vacuum system. To vent the turbo, use the system vent function described in Section 3.1.8.1 “Turbo Vent” on page 3-20.
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  • Page 23: Section 1. Introduction To The Vs Series Leak Detector

    Leak Detector 1.1 The VS Series Leak Detector The VS Series is a wide-range Helium Mass Spectrometer Leak Detector, which is comprised of a turbo molecular high vacuum pump, internal mechanical rough pump (model VS PR02), internal scroll pump (model PD03), external mechanical rough pump...

  • Page 24: Vs Series Leak Detector Configurations And Part Numbers

    USB HUB with two downstream type A connectors and one upstream type B ❑ connector. USB features are SW disabled in this release. NOTE Table 1-1 VS Series Leak Detector Configurations and Part Numbers Vacuum Pump System Model Agilent Mains...
  • Page 25 Model Agilent Mains Wheel Number Voltage Internal External Configuration Cart G8602 - 100/115 VAC 64004 VS BD15 IDP-15 Bench Mount G8602 - 230 VAC 64005 Outline drawings for each configuration are shown in Section 1.1.1 “VS Series Leak Detector Configurations”.

  • Page 26: Portable Leak Detector With Internal Idp-3 (Pd03) Dimensions

    VS Series Helium Mass Spectrometer Leak Detectors 1.1.1 VS Series Leak Detector Configurations This section contains outline drawings of the leak detector configurations. Dimensions are given in inches, in brackets, and in mm, below the brackets. Figure 1-1 shows the outline drawing and physical dimensions of the portable leak detector with Internal DS42 Wet Rotary Vane Pump, Model VS PR02 and the PD03, which utilizes a Agilent IDP-3 dry pump.

  • Page 27: Mobile Leak Detector With External Ts620 Dry Scroll Pump On A Cart, Model Vs Md30 Dimensions*

    VS Series Helium Mass Spectrometer Leak Detectors Figure 1-3 shows the outline drawing and physical dimensions of a Mobile Leak Detector with External TS620 Dry Scroll Pump on a Cart, Model VS MD30+. Figure 1-3 Mobile Leak Detector with External TS620 Dry Scroll Pump on a Cart, Model VS MD30+, Dimensions* * Cart front panel not shown for clarity.

  • Page 28: Unpacking The Leak Detector

    1.2 Unpacking the Leak Detector The following items are included in the shipment: VS Series Helium Mass Spectrometer Leak Detectors Operations Manual ❑ VS Series leak detector configured and completely assembled as ordered ❑ All necessary power cords, as ordered ❑...

  • Page 29: Removing The Leak Detector From The Skid

    VS Series Helium Mass Spectrometer Leak Detectors 1.2.2 Removing the Leak Detector from the Skid There are three methods for removing the leak detector from the skid, depending on the leak detector model ordered. All methods require two people. The third method involves removing the Skid-Mates (the blue donut-shaped mounts at the front of the skid) from the skid.
  • Page 30 VS Series Helium Mass Spectrometer Leak Detectors Method 3 1. Using a lever, carefully raise the front edge of the skid between 1" and 2". 2. While a helper holds the leak detector against the back brace, unscrew and remove the front two Skid-Mates by turning them in a counterclockwise direction.

  • Page 31: Installation

    VS Series Helium Mass Spectrometer Leak Detectors 1.3 Installation Installation requirements are described in Table 1-2. Table 1-2 Installation Requirements Item Requirement Close to its power source. Leak Detector Location ❑ Four inch clearance for proper ventilation. ❑ Sufficient room for the operator to safely maneuver to ❑...
  • Page 32 VS Series Helium Mass Spectrometer Leak Detectors 1.3.1 Filling the Oil Before Use Read the Preface for all operational warnings and cautions. CAUTION EQUIPMENT DAMAGE: PR02, MR15 and BR15 leak detectors CAUTION are shipped without oil in the vacuum pump.

  • Page 33: Location Of Rear Cover Screws

    VS Series Helium Mass Spectrometer Leak Detectors To install oil in the pump: 1. Unplug the power cord. 2. Use the hex wrench provided to remove the rear cover by removing the four screws (Figure 1-5). Figure 1-5 Location of Rear Cover Screws 3.

  • Page 34: Removing The Shipping Bolts: Md/Bd30+ And Md/Bd15

    VS Series Helium Mass Spectrometer Leak Detectors 1.3.2 Removing the Shipping Bolts: MD/BD30+ and MD/BD15 The MD/BD30+ and MD/BD15 units come with a shipping bolt (MD/BD30+) and shipping locks (MD/BD15). These shipping bolts and shipping locks must be disengaged CAUTION before use to avoid damaging the units.

  • Page 35: Triscroll Shipping Bolt

    VS Series Helium Mass Spectrometer Leak Detectors 2. Remove the one shipping bolt as in Figure 1-7 using an M5 wrench. Figure 1-7 TriScroll Shipping Bolt 3. Reinstall the cover. 1.3.2.2 MD/BD15 This unit comes with the IDP-15 pump. This unit has four shipping locks to disengage before use.

  • Page 36: Triscroll Shipping Bolt

    VS Series Helium Mass Spectrometer Leak Detectors 2. Disengage the four shipping locks and enable vibration isolation by inserting a 4 mm Allen wrench into each of the four shipping lock holes and turning the screws clockwise until significant resistance occurs. The pump body is now floating on its isolation mounts as in Figure 1-9.

  • Page 37: Bench System Installations

    VS Series Helium Mass Spectrometer Leak Detectors 1.3.3 Bench System Installations Figure 1-10 and Figure 1-13 represent the process for installation of the bench system version of the VS Series Leak Detector. Figure 1-10 is a drawing of a Bench Mount Leak Detector with External DS302 Wet Rotary Vane Pump, Model VS BR15 with individual components shown.

  • Page 38: Recommended Additional Services

    VS Series Helium Mass Spectrometer Leak Detectors Figure 1-12 is a drawing of a Bench Mount Leak Detector with External IDP-15 Dry Scroll Pump, Model VS BD150 with individual components shown.* Cut the ¾” black tubing into two equal parts as shown.

  • Page 39: Storage

    VS Series Helium Mass Spectrometer Leak Detectors 1.3.3 Storage If the VS Series leak detector is not used immediately, it can be stored as received without special precautions. A dry, relatively dust-free area is preferred. The required environmental conditions for storage are: 0% to 95% relative humidity, non-condensing ❑...

  • Page 40: Front Panel Display And Controls

    VS Series Helium Mass Spectrometer Leak Detectors 1.4 Front Panel Display and Controls The front panel (Figure 1-13) consists of two hard buttons: TEST and VENT and an LCD display to access the software control screens. All operator control and monitoring of results are achieved via the resident software accessed using the Home screen.
  • Page 41 VS Series Helium Mass Spectrometer Leak Detectors LCD Display Represents: Leak Rate - in a Bar Graph format with a numeric range ❑ indicator Leak Rate, System Status and Parameters - in alphanumeric ❑ format Series of with the soft key buttons for operator screens ❑...
  • Page 42 VS Series Helium Mass Spectrometer Leak Detectors HOLD With the leak detector in Test/Fine Test mode, press TEST again and the leak detector goes into HOLD mode, isolating the leak detector from the unit under test. The green LED in the Test button won’t illuminate and the Home Screen displays Hold.

  • Page 43: Screen Flow

    VS Series Helium Mass Spectrometer Leak Detectors The leak detector operator interface functions through a series of screens, which are navigated as in Figure 1-14. MAIN SCREEN CONTROL PANEL ZERO GROSS TEST MENUS CALIBRATION LEAK RATE SET-UP SET-UP RANGING REJECT/AUDIO...

  • Page 44: Display Panel Controls

    VS Series Helium Mass Spectrometer Leak Detectors 1.5 Display Panel Controls Table 1-3 Screens – General Description Screen Purpose Home Accesses the Control Panel and Menu screens. Activates the Zero function. The LED illuminates while zeroing occurs. Accesses the Gross Leak Test screen, when Gross Test is initiated.
  • Page 45 VS Series Helium Mass Spectrometer Leak Detectors Table 1-3 Screens – General Description (Continued) Screen Purpose Set-Up Accesses the following screens: Advanced Parameters: ❑ Activates Autozero and Split Flow functions. ❑ Activates the Gross Leak function (Section 3.1.1 “Advanced Parame- ❑...

  • Page 46: Rear Panel

    VS Series Helium Mass Spectrometer Leak Detectors 1.6 Rear Panel The rear panel of the leak detector with an external mechanical pump (Model VS MR15, MD15 or MD30+) and a wireless remote control option is shown in Figure 1-15. ➀...

  • Page 47: Optional I/O Pcb Rear Panel

    VS Series Helium Mass Spectrometer Leak Detectors ➃ Fore Pump Power An IEC/EN60320/C19 standard, three-prong grounded outlet Connection connector. ➄ Analog Output Banana type output connector for an Isolated Leak Rate Analog reading. The Red connector is a signal positive terminal; black is the signal negative terminal.
  • Page 48 VS Series Helium Mass Spectrometer Leak Detectors ➃ I/O Connector A 25-pin female D-sub connector to interface with an external PLC via a parallel cable. Inputs: Four level inputs: optically isolated, (+5 to+24) VDC. ❑ Four momentary inputs: optically isolated, (+5 to+24) VDC, ❑...

  • Page 49: Rear Panel (With Discrete I/O Pcb)

    VS Series Helium Mass Spectrometer Leak Detectors The rear panel of the leak detector (Model VS PR02 and PD03) is shown in Figure 1-17. The optional Wireless remote control and I/O PCB is not installed. ➃ ➁ ➀ ➅ ➄...

  • Page 50: Features

    For pin identifications, see Table A-6 on page A-14. ➈ Nitrogen Vent Port Nitrogen vent port (On newer models). 1.7 Features The features for the VS Series leak detector are provided in Table 1-4. Table 1-4 VS Series Features Feature Description Calibration Fully automated tuning and calibration using the internal or external calibrated leak.
  • Page 51 VS Series Helium Mass Spectrometer Leak Detectors Table 1-4 VS Series Features (Continued) Feature Description Pressure Indication Test port and spectrometer pressure with alphanumeric indication on the LCD display. Spectrometer Sensitivity optimized design, header mounted ion source with dual thoria-coated iridium filament, a high sensitivity, wide dynamic range preamplifier, and vacuum gauge.
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  • Page 53: Section 2. Operating The Leak Detector

    VS Series Helium Mass Spectrometer Leak Detectors Section 2. Operating the Leak Detector 2.1 Initial Startup, High Pressure Test Setup, and Shutdown 2.1.1 Startup To start the leak detector: 1. Plug the leak detector power cord into an appropriate mains supply receptacle.

  • Page 54: Helium Background Timer

    VS Series Helium Mass Spectrometer Leak Detectors External leak: ❑ a. Press VENT to vent the leak detector and then install a calibrated leak into the system test port. b. Open the Calibration Set-Up screen and press External Leak (located under Calibrate With).

  • Page 55: High Pressure Test Set-Up Procedure

    VS Series Helium Mass Spectrometer Leak Detectors When calibration is complete, the leak detector reverts to NOTE Fine Test mode. 2.1.2 High Pressure Test Set-Up Procedure The High Pressure Test mode locks the system into contraflow, offering maximum protection to the spectrometer. This is useful in sniffing applications or when evacuating parts that can contaminate the system.

  • Page 56: Shutdown

    VS Series Helium Mass Spectrometer Leak Detectors 2.1.3 Shutdown The system can be in any mode when shut down. When the system is shut down, all valves in the system close. If the system is not in Vent mode, the test port remains under vacuum and may be difficult to open.

  • Page 57: Screens

    VS Series Helium Mass Spectrometer Leak Detectors 2.2 Screens The leak detector display is used for the initial set-up and configuration of the leak detector. Once the leak detector is set up and configured for a specific application, basic operation is controlled primarily using the TEST and VENT buttons on the leak detector and the Home screen Zero button (Section 2.2.2 “Home Screen”...

  • Page 58: On-Screen Icons

    VS Series Helium Mass Spectrometer Leak Detectors Table 2-2 explains the icons that appear on various screens and their meaning. Table 2-2 On-Screen Icons Icon Meaning Indicates a feature is locked and cannot be activated due to a higher level selection in the VS setup.

  • Page 59: Home Screen

    VS Series Helium Mass Spectrometer Leak Detectors 2.2.2 Home Screen The Home screen displays a summary of the following status and configuration settings: Digital Leak Rate Display Test Port Pressure Gross Test button (not ❑ ❑ ❑ shown) Leak Detector Status Condition Indication ❑...
  • Page 60 VS Series Helium Mass Spectrometer Leak Detectors Leak Detector Status Appears below the test port pressure reading and indicates the cur- rent leak detector operating state. The normal operating states are detailed in Table 2-3 on page 2-9. Leak Detector...

  • Page 61: Gross Test Screen

    VS Series Helium Mass Spectrometer Leak Detectors Gross Test Displays Gross Test screen (Figure 2-3). T. P. PRESSURE: 1.4E-02 TORR Gross Test mode GROSS TEST indication. CONTROL GROSS Accesses the MENUS Accesses the PANEL TEST Control Panel Menus screen Figure 2-3 Gross Test Screen...

  • Page 62: Leak Detector Condition States

    VS Series Helium Mass Spectrometer Leak Detectors Table 2-4 Leak Detector Condition States Display Description Backing Indicates that the leak detector is momentarily backing the foreline of the high vacuum pump during an extended rough period. Backing occurs if the roughing time is greater than 60 minutes or if the turbo pump is not ready.
  • Page 63 VS Series Helium Mass Spectrometer Leak Detectors Table 2-4 Leak Detector Condition States (Continued) Display Description Stabilization Wait Indicates that the system is waiting for the electronics to stabilize before completing the startup routine; up to two and a half minutes.

  • Page 64: Control Panel Screen

    VS Series Helium Mass Spectrometer Leak Detectors 2.2.3 Control Panel Screen Press Control Panel on the Home screen. The Control Panel screen appears ❑ (Figure 2-4). Toggles these CONTROL PANEL options on/off. Press to STD LEAK ZERO ENABLE open the Graphical ✔...
  • Page 65 VS Series Helium Mass Spectrometer Leak Detectors Audio Volume Adjusts the volume up and down by pressing on the +/- buttons: When the leak rate bar graph display is set to Linear mode: ❑ The audio signal increases from a low to high frequency ❑...

  • Page 66: Minute Warm-Up Dialog

    VS Series Helium Mass Spectrometer Leak Detectors Figure 2-5 appears within the first twenty minutes of operation NOTE if calibrate is selected. This message advises you that a twenty minute warm up is strongly recommended after a cold start up.

  • Page 67: Graphical Display

    VS Series Helium Mass Spectrometer Leak Detectors 2.2.3.1 Graphical Display Screen The graphical display screen (Figure 2-6) represents the leak rate over time. The graphing line appears in blue and changes to red when a reject set point is triggered.

  • Page 68: Menus Screen

    VS Series Helium Mass Spectrometer Leak Detectors Pressing Zero while introducing helium tracer gas to the test NOTE object, or while the helium background is varying significantly, could result in the suppression of a real leak. Only use the Zero button after the helium tracer gas source has been removed.

  • Page 69: Calibration Set-Up

    VS Series Helium Mass Spectrometer Leak Detectors 2.2.4.1 Calibration Set-Up Press Calibration Leak Set-Up on the Menus screen. ❑ The Calibration Set-Up screen appears (Figure 2-8). Use this screen to: View the value and expiration date of the Internal Calibrated Leak ❑...

  • Page 70: Helium Background Timer

    VS Series Helium Mass Spectrometer Leak Detectors Internal Leak Value The temperature-compensated internal leak value and expiration date appear to the right of the Internal Leak Value text. The actual Internal Leak Value and Expiration Date can be modified using the Internal Calibration Leak screen (Section 3.1.8.3.1 “Cal Leak Expi-...

  • Page 71: Reject And Audio Setpoints

    VS Series Helium Mass Spectrometer Leak Detectors 2.2.4.2 Reject and Audio Set Points Reject and Audio Set Points make the acceptance and rejection of parts more obvious. By creating a set point, you let the system indicate if the part meets specification or not. For example, you select LEAK RATE #1, set the value to 1.0E-8, set the reject activation to...
  • Page 72 VS Series Helium Mass Spectrometer Leak Detectors Reject Set Points Active reject set points cause Reject to appear on the Home screen along with the number of the reject set point that has been acti- vated, which blinks to highlight the reject. The status of the reject set points are also available through the RS-232 line (see Appendix A “Communications Protocol”).
  • Page 73 VS Series Helium Mass Spectrometer Leak Detectors The data entry pad appears. 3. Enter the set point and press OK. 4. Press the < or > soft key to select whether the reject setpoint activates above or below the programmed value.
  • Page 74 VS Series Helium Mass Spectrometer Leak Detectors 2.2.4.3 Auto Sequencer The auto sequencer is used to automatically perform testing on a part, to maximize testing throughput and to reduce the chances of accidentally accepting a bad part. The auto sequencer is used in conjunction with the reject and audio set point settings, which provide the criteria for pass or fail conditions.

  • Page 75: Auto Sequencer

    VS Series Helium Mass Spectrometer Leak Detectors Press the desired value to access its keypad AUTO SEQUENCER Toggles these options on/off. ROUGH TIME (SECS) ✔ ✕ TEST TIME (SECS) ROUGH TIMER 0 SECONDS DONE DONE Figure 2-11 Auto Sequencer Rough Time...
  • Page 76 VS Series Helium Mass Spectrometer Leak Detectors Test Time Determines the amount of time that the leak detector remains in test before it compares the measured leak rate with the selected reject set point. Allow sufficient time for the leak rate reading to stabilize before the system makes a pass/fail decision.

  • Page 77: Leak Rate Ranging

    VS Series Helium Mass Spectrometer Leak Detectors 2.2.4.4 Leak Rate Ranging Press Leak Rate Ranging on the Menus screen. ❑ The Leak Rate Ranging screen appears (Figure 2-12). Use it to setup and enable the Range Stop and Manual Range functions and to enable the High Pressure Test mode.

  • Page 78: Range Stop/Sensitivity Requirements

    VS Series Helium Mass Spectrometer Leak Detectors Range Stop Configures the leak detector so that it only auto-ranges down to the pre-selected decade entered in the Range Stop variable field. For example, if range stop was enabled and the range stop setting...
  • Page 79 VS Series Helium Mass Spectrometer Leak Detectors To configure the leak rate ranging: 1. Press the Range Stop blue check button. 2. Press the associated Range Stop Value button. The data entry pad appears. 3. Enter the value and press OK to save the value.

  • Page 80: Transfer Points

    VS Series Helium Mass Spectrometer Leak Detectors 2.2.4.5 Transfer Points Press Transfer Points on the Menus screen. ❑ The Transfer Points screen appears (Figure 2-13). Use it to set the pressure at which the system goes into Test. The transfer pressure settings can be adjusted to lower values for specific applications.

  • Page 81: Transfer Points With Stabilization Wait Timer

    VS Series Helium Mass Spectrometer Leak Detectors 2.2.4.5.1 Transfer Points with Stabilization Wait Timer Figure 2-14 shows the Transfer Points screen. This feature is available November 2010. NOTE Figure 2-14 Transfer Points with Stabilization Wait Timer Stabilization Wait This appears on the Home screen after a successful startup. This timer is necessary for the spectrometer stabilization and degassing.

  • Page 82: System Information

    VS Series Helium Mass Spectrometer Leak Detectors 2.2.4.6 System Information Press System Information on the Menus screen. ❑ The System Information screen appears (Figure 2-15). Details of the current leak detector setup and operating conditions are displayed. The left column displays filament status, reject set point status, turbo status, auto sequencer status, and audio set point status.
  • Page 83 VS Series Helium Mass Spectrometer Leak Detectors Table 2-6 System Information Screen Conditions (Continued) Condition Display Description Ion Source Filament Filament 1 Off Filament 1 is selected and not lit. See Section 3.1.2 “Manual Tuning” Filament 1 On Filament 1 is selected and lit.

  • Page 84: Control Panel Access

    VS Series Helium Mass Spectrometer Leak Detectors 2.2.4.7 Control Panel Access Press Control Panel Access on the Menus screen. ❑ The Control Panel Access screen appears (Figure 2-16). Use it to enable the Vent and Panel lockouts. CONTROL PANEL ACCESS...

  • Page 85: Section 3. Set-Up

    VS Series Helium Mass Spectrometer Leak Detectors Section 3. Set-Up 3.1 Set-Up Menu The Set-Up menu screen contains buttons for functions that deal with machine performance, tuning, and maintenance issues. All sub-screens below this level have a Home button that returns the program directly to the Home screen (Figure 1-14 on page 1-21).

  • Page 86: Set-Up Screen - Second

    VS Series Helium Mass Spectrometer Leak Detectors GAUGE FORE MAINTENANCE PUMP CALIBRATION SYSTEM EXHAUST PASSWORD DEFAULTS PUMP Figure 3-2 Set-Up Screen - Second See the following sections for these screens (all accessed from the Set-Up screen): Section 3.1.1 “Advanced Parameters” on page 3-3 ❑...

  • Page 87: Section 3.1.1 "Advanced Parameters

    VS Series Helium Mass Spectrometer Leak Detectors 3.1.1 Advanced Parameters Press Advanced Parameters on the Set-Up screen and the Advanced Parameters ❑ screen appears (Figure 3-3). Use this screen to configure the Auto-Zero < 0, Split Flow Factor, and spectrometer Gain.
  • Page 88 VS Series Helium Mass Spectrometer Leak Detectors Auto-Zero < 0 Inactive When Auto-Zero < 0 is inactive, the leak detector does not automatically adjust the zero reference point when the helium background level drops below the previously set zero reference point.
  • Page 89 VS Series Helium Mass Spectrometer Leak Detectors 3.1.1.1 Split Flow Operation Ground rules and assumptions: The software limits split flow to no more than 1000 times (3 decades). If the split ❑ flow is turned ON and the leak rate entered is more than 1000 times higher than the system leak rate, the system will not allow the split flow to turn ON and <>...
  • Page 90 VS Series Helium Mass Spectrometer Leak Detectors 8. Check to see if the leak rate signal is somewhat unstable and drifts lower than the calibrated value. If so, lower the test port pressure with the power probe or utilize a larger external calibrated leak.

  • Page 91: Manual Tuning

    VS Series Helium Mass Spectrometer Leak Detectors 3.1.2 Manual Tuning Press Manual Tuning on the Set-Up screen and the Manual Spectrometer Tuning ❑ screen appears (Figure 3-4). Use this screen to manually adjust the parameters of the ion source in the spectrometer for a maximum helium signal.
  • Page 92 VS Series Helium Mass Spectrometer Leak Detectors Filament Switches between Filament 1 and 2. The filament selection can be performed manually, but occurs automatically if the current operat- ing filament burns out. A calibration routine is recommended every time the operating filament is changed.
  • Page 93 VS Series Helium Mass Spectrometer Leak Detectors To manually tune the leak detector: 1. Place the system in TEST mode. 2. Navigate to the Control Panel and turn the STD LEAK ON. 3. Navigate to the Calibration Set-Up screen and write down the INTERNAL CALIBRATED LEAK value.

  • Page 94: Manual Valve Control

    VS Series Helium Mass Spectrometer Leak Detectors 3.1.3 Manual Valve Control Press Valve Control on the Set-Up screen and the Manual Valve Control screen ❑ appears (Figure 3-5). Use this screen to manually control the valves in the leak detector vacuum system for troubleshooting purposes.

  • Page 95: Manual Valve Control - Pd03, Md15, Br15, Md30+, Bd30+

    VS Series Helium Mass Spectrometer Leak Detectors Figure 3-6 shows this screen for the dry scroll pump models; only the calibrated leak and bearing temperature are accessible. Figure 3-6 Manual Valve Control - PD03, MD15, BR15, MD30+, BD30+ 3-11...

  • Page 96: Leak Detector Vacuum System Diagram

    VS Series Helium Mass Spectrometer Leak Detectors Table 3-1 Leak Detector Valve State Table - Single Mechanical Pump System V4/V5 V2/V3 Midstage Contra-Flo Valve Leak Detector Foreline w Valve Fine Test Calibrated Vent Ballast Exhaust Operating State Valve Test Mode...

  • Page 97: Output Control

    VS Series Helium Mass Spectrometer Leak Detectors 3.1.4 Output Control Press Output Control and the Output Control screen appears (Figure 3-8). ❑ Use this screen to select the desired leak rate output, and Bar Graph display mode. OUTPUT CONTROL ANALOG OUTPUT...

  • Page 98: Leak Detector Linear Output Voltage

    VS Series Helium Mass Spectrometer Leak Detectors Output Voltage = Leak Rate Mantissa Leak Rate Mantissa = Output Voltage *Standard and High Sensitivity Versions Output Voltage (Volts) Figure 3-9 Leak Detector Linear Output Voltage Log Only ❑ The log bar graph leak rate appears across the top of all screens.

  • Page 99: Units

    VS Series Helium Mass Spectrometer Leak Detectors 3.1.5 Units Press Units on the Set-Up screen and the Units screen appears (Figure 3-11). ❑ Use this screen to configure the Leak Rate and Pressure Units used on the leak rate bar graph.

  • Page 100: Languages

    VS Series Helium Mass Spectrometer Leak Detectors 3.1.6 Languages Press Language Set-Up on the Set-Up screen and the Languages screen appears ❑ (Figure 3-12). Use this screen to select a language. LANGUAGES ENGLISH DEUTCH Press to select the FRANÇAIS ESPAÑOL language in use.

  • Page 101: Gauge Calibration

    VS Series Helium Mass Spectrometer Leak Detectors 3.1.7 Gauge Calibration Press Gauge Calibration on the Set-Up screen and the Gauge Calibration screen ❑ appears (Figure 3-13). Use this screen to perform a calibration on the test port thermocouple gauge. Calibrate the thermocouple gauge for the most accurate operation. To calibrate the gauge: 1.
  • Page 102 VS Series Helium Mass Spectrometer Leak Detectors 3.1.7.2 Vacuum (Low Pressure) Calibration To perform Vacuum Calibration: 1. Verify that the leak detector is in the System Ready condition and that a test port cap is in place. 2. If the system is not already in Vent mode, press VENT.

  • Page 103: Maintenance

    VS Series Helium Mass Spectrometer Leak Detectors 3.1.8 Maintenance Press Maintenance on the Set-Up screen and the Maintenance screen appears ❑ (Figure 3-14). Use this screen to configure: The PASSWORD and to turn that feature ON or OFF (Software revisions 3.10 ❑...

  • Page 104: Vent Turbo Dialog

    VS Series Helium Mass Spectrometer Leak Detectors 3.1.8.1 Turbo Vent Selecting the Turbo Vent button prepares the unit for transportation by venting the system and prompting the operator to power down the unit (Figure 3-15). Pressing the Turbo Vent button: Figure 3-15 Vent Turbo Dialog 1.

  • Page 105: Section 3.1.8.2 "Date & Time Set-Up

    VS Series Helium Mass Spectrometer Leak Detectors 3.1.8.2 Date & Time Set-Up Press the button next to Date & Time. ❑ The Current Date & Time Set-Up screen appears (Figure 3-16). CURRENT DATE & TIME SET-UP 2005 YEAR MONTH MONDAY...

  • Page 106: Internal Calibrated Leak

    VS Series Helium Mass Spectrometer Leak Detectors 3.1.8.3 Internal Calibrated Leak Press Internal Calibrated Leak. ❑ The Internal Calibrated Leak screen appears (Figure 3-17). INTERNAL CALIBRATION LEAK Accesses the Internal Leak Value 1.4E-07 INTERNAL LEAK VALUE keypad. Sets the temp.

  • Page 107: Section 3.1.8.3.1 "Cal Leak Expiration Set-Up

    VS Series Helium Mass Spectrometer Leak Detectors 3.1.8.3.1 Cal Leak Expiration Set-Up Press the button next to the Cal Leak Expiration text on the Internal Calibrated Leak ❑ screen. The Cal Leak Expiration Set-Up screen appears (Figure 3-18). The Cal Leak Expiration is usually one year from leak installation. When the calibrated leak expires, a message appears on the Home screen.

  • Page 108: Password

    VS Series Helium Mass Spectrometer Leak Detectors 3.1.9 Password This starts with software revision 3.11. Password On/Off ❑ Password Level Selection ❑ Change Password ❑ Figure 3-19 Password Screen There are 3 password levels: Level I Requires a password entry to gain access to SET-UP screens when password protection is enabled.

  • Page 109: Fore Pump Set-Up And Exhaust Pump

    VS Series Helium Mass Spectrometer Leak Detectors 3.1.10 Fore Pump Set-Up and Exhaust Pump Press Fore Pump on the Maintenance screen. ❑ The Fore Pump Set-Up screen appears (Figure 3-20). Use this screen to select fore pump speed and type.

  • Page 110: Date Serviced

    VS Series Helium Mass Spectrometer Leak Detectors 3.1.10.1 Date Serviced Press the date on the Fore Pump screen and the Date Serviced screen appears ❑ (Figure 3-22). Press to open the keypad. DATE SERVICED Press to open the 2005 YEAR Press to increment keypad.

  • Page 111: Wireless

    VS Series Helium Mass Spectrometer Leak Detectors 3.1.11 Wireless When the wireless option is installed into the leak detector, a wireless icon button appears on the second Setup screen (Menu/Setup/ Press the Wireless icon on the Setup screen and the wireless screen ❑...
  • Page 112 VS Series Helium Mass Spectrometer Leak Detectors Channel Click the button and a keypad appears to configure the channel (1-19) that the VS unit uses to communicate with the wireless remote. Up to 10 wireless remotes and leak detectors can be communicating in a common area at a time.

  • Page 113: System Defaults

    VS Series Helium Mass Spectrometer Leak Detectors 3.1.12 System Defaults Use this screen to restore system defaults. Figure 3-24 System Defaults Screen Restore System Defaults: This feature allows for resetting the system back to the original factory configurations: Resets Reject Setpoints ❑...
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  • Page 115: Section 4. Maintenance

    WARNING maintenance procedure that requires physically disconnecting any part of the system. The VS Series leak detector has a battery backed clock which uses a primary (non-rechargeable) lithium coin battery from Panasonic, P/N BR2477A/HB (3.0V, 1Ah) that is permanently soldered onto a Motherboard PCB. Never replace this battery with a rechargeable type.
  • Page 116 VS Series Helium Mass Spectrometer Leak Detectors Cleanliness is vital when servicing the leak detector or any vacuum equipment. There are some techniques more important in leak detector servicing than in general vacuum work: Do not use silicone oil or silicone grease.

  • Page 117: Scheduled Maintenance

    VS Series Helium Mass Spectrometer Leak Detectors For simplicity, the maintenance functions in this section are grouped by recommended frequency, as shown in Table 4-1, based on assumed daily use. Table 4-1 Scheduled Maintenance Description Daily 12 Months 24 Months...

  • Page 118: Fuses And Circuit Breakers

    VS Series Helium Mass Spectrometer Leak Detectors Always perform a Full Internal Calibration after any NOTE spectrometer maintenance: Spectrometer header replacement ❑ Filament replacement ❑ Ion source assembly replacement or cleaning ❑ Table 4-3 lists the fuses and circuit breakers.

  • Page 119: Daily Maintenance

    VS Series Helium Mass Spectrometer Leak Detectors 4.1 Daily Maintenance 4.1.1 Sensitivity Check To perform a sensitivity check: 1. Turn on the Std Leak in the Control Panel screen. 2. Compare the value on the Home screen to the value of the known calibrated leak on the Internal Calibrated Leak screen.

  • Page 120: Spare Parts List

    VS Series Helium Mass Spectrometer Leak Detectors 4.3 Spare Parts List Table 4-4 Leak Detector Spare Parts Assembly Part Number Motherboard PCB R2101501 CPU PCB R2361303 Ion Source PCB R2120502 Valve Driver PCB R2104502 Exchange Turbo Pump Controller PCB EX9699518M001...

  • Page 121: Primary Pumps Replacement Parts

    VS Series Helium Mass Spectrometer Leak Detectors Table 4-5 Primary Pumps Replacement Parts Primary Pumps VS Model Number Part Number DS302, Exchange MR15, BR15 EX9699325 DS302 Minor Maintenance Kit MR15, BR15 9499370 TriScroll 620, Exchange Module MD30+, BD30+ EXPTS0620SC TriScroll 620, Exchange Pump...

  • Page 122: Leak Detector Accessory Item List

    VS Series Helium Mass Spectrometer Leak Detectors 4.4 Leak Detector Accessory Item List Table 4-6 Leak Detector Accessory Item List Assembly Part Number Flapper Box, NW25 Flange VSFLDFBNW25 Flapper Box, Cable (I/O option required) VSFLDFBCBL Power Probe, 10’ (NW25 Flange) K9565306 Power Probe, 25’...

  • Page 123: Appendix A. Communications Protocol

    VS Series Helium Mass Spectrometer Leak Detectors Appendix A. Communications Protocol This appendix defines the technical specifications for the RS-232 protocol used with the leak detector and describes the customer-configured inputs/outputs. A.1 Protocol (RS-232) RS-232 ports operate at 9600 baud, 8 bits, no parity, and one stop bit.

  • Page 124: Communicating With

    VS Series Helium Mass Spectrometer Leak Detectors A.2 Communicating with RS-232 The RS-232 Protocol is intended for diagnostic purposes and initial set-up inquires. The RS-232 connection is located on the rear D-sub 9-pin connector. The leak detector RS-232 port is not an interrupt-driven port. It is configured as DTE (Data Terminal Equipment), therefore the leak detector's RS-232 Protocol cannot be sent as strings.
  • Page 125 VS Series Helium Mass Spectrometer Leak Detectors 7. Configure the following settings: Bits per second (baud rate) – 9600 ❑ Data bits: – 8 ❑ Parity: – None ❑ Stop bits: – 1 ❑ Flow Control: – None ❑ 8. Click OK.

  • Page 126: Printing With Hyperterminal

    VS Series Helium Mass Spectrometer Leak Detectors A.2.2 Printing with HyperTerminal The easiest way to print information captured in HyperTerminal is to choose Print from the File menu; however, this method only prints information currently displayed on the screen. Screen information can also be highlighted, copied and pasted into Microsoft Word or Excel.
  • Page 127 VS Series Helium Mass Spectrometer Leak Detectors Table A-1 lists inquiries that are used to determine internal operating parameters. All inquiries, except VER, begin with and end with <CR>. Table A-1 Internal Operating Parameters Inquiry Response ?ALL Responds with four lines. Each begins with a <cr><lf>. The first line reports the ion chamber value.
  • Page 128 VS Series Helium Mass Spectrometer Leak Detectors Table A-1 Internal Operating Parameters (Continued) Inquiry Response ?LEAK Reports a six-character number consisting of a two-digit leak rate mantissa with decimal point after the first digit followed by E - then a two digit number, which is the leak rate range exponent (e.g., 1.3E-08).
  • Page 129 VS Series Helium Mass Spectrometer Leak Detectors Table A-1 Internal Operating Parameters (Continued) Inquiry Response ?SETUP Reports seven lines, each begins with a <cr><lf>. The first line reports the turbo pump speed with the RPM value or OFF. The second line reports the selected manual leak rate range, and the ranging method as auto or manual.
  • Page 130 VS Series Helium Mass Spectrometer Leak Detectors The commands listed in Table A-2 are used to set non-volatile operating parameters. The current value of the operating parameter is changed to the new value. If the leak detector is in back panel control, the response is cant.
  • Page 131 VS Series Helium Mass Spectrometer Leak Detectors Table A-2 Non-Volatile Operating Parameters (Continued) Command Parameter INIT-ION Sets the ion voltage of the ion source. Preceded by a three-digit number (volts) in the range 220 to 280. INIT-LANGUAGE Selects the language to be shown on the display. Preceded by 0-6 where (0=English, 1=French, 2=German, 3=Korean, 4=Spanish, 5=Japanese, 6=Chinese).
  • Page 132 VS Series Helium Mass Spectrometer Leak Detectors Table A-2 Non-Volatile Operating Parameters (Continued) Command Parameter INIT-4REJECT Sets the test port pressure value for Reject Set Point #4. Preceded by a two-digit leak rate mantissa with a decimal point after the first digit followed by E-, and then by a two-digit exponent: the test port TC pressure in millitorr.
  • Page 133 VS Series Helium Mass Spectrometer Leak Detectors Table A-2 Non-Volatile Operating Parameters (Continued) Command Parameter UNLOCK-MS Disables the MS lock feature. ?MS-LOCK Queries the status of the MS lock feature; either on or off appears. The commands listed in Table A-3 are used to cause an immediate change in the spectrometer operating parameters.
  • Page 134 VS Series Helium Mass Spectrometer Leak Detectors Table A-4 Leak Detection Actions (Continued) Command Action DISABLE-RANGESTOP Turns the Range Stop function OFF. DISABLE-SEQUENCER Turns the auto sequencer function OFF. DISABLE-SPLIFLOW Turns the split flow function OFF. DISABLE-VOLUME Turns audio OFF.
  • Page 135 VS Series Helium Mass Spectrometer Leak Detectors Table A-4 Leak Detection Actions (Continued) Command Action TUNE Adjusts the ion source voltage to cause a maximum response to helium. VENT Causes the leak detector to isolate and vent the test port to the atmosphere.

  • Page 136: Customer Accessible Inputs And Outputs

    A.3 Customer Accessible Inputs and Outputs A.3.1 Serial Connector Use the SERIAL connector on the Rear Panel to interface the VS Series leak detector to a PC via an isolated RS-232 connection. Table A-5 and Figure A-1 provide details of the connection.
  • Page 137 VS Series Helium Mass Spectrometer Leak Detectors Table A-6 I/O Connector Pin Signals (Continued) Signal Name Signal Description Leak Detector Behavior ZERO_OUT Level Active HIGH when the leak Performs the Zeroing detector is in ZEROING routine. mode. HOLD_OUT O Level...
  • Page 138 VS Series Helium Mass Spectrometer Leak Detectors Table A-6 I/O Connector Pin Signals (Continued) Signal Name Signal Description Leak Detector Behavior REJECT4_ Level Active HIGH when the test Indicates that the value of port pressure is over set the test port pressure point #4.

  • Page 139: A-2 Optically Isolated Output Circuit Sketch

    VS Series Helium Mass Spectrometer Leak Detectors Table A-6 I/O Connector Pin Signals (Continued) Signal Name Signal Description Leak Detector Behavior RDSTDLK_ Level Active HIGH when standard Initiate the INTERNAL leak is ON. STANDARD LEAK reading routine. PARALLEL_ Level Active HIGH when ENABLE...

  • Page 140: A-3 Optically Isolated Input Circuit Sketch

    VS Series Helium Mass Spectrometer Leak Detectors Figure A-3 shows the input circuit sketch. All inputs are optically isolated 3300 Ohm resistive loads in series with the LEDs of the opto-isolators and voltage level from +5 VDC to +24 VDC. The required pulse inputs are 200 ms minimum pulse width.

  • Page 141: Appendix B. Introduction To Leak Detection

    VS Series Helium Mass Spectrometer Leak Detectors Appendix B. Introduction to Leak Detection B.1 Leak Testing—Why is it Needed? Helium is a superior choice of tracer gas used to find leaks for a multitude of reasons. Helium is: Non-toxic ❑...

  • Page 142: B-1 Magnetic Separation Principle

    VS Series Helium Mass Spectrometer Leak Detectors Valves that enable the various stages of the leak detection cycle, from evacuation, to ❑ test, to venting Amplifier and readout instrumentation that monitors spectrometer output signal ❑ Electrical power supplies and controls that sequence valve’s, protective circuits, etc.

  • Page 143: Methods Of Leak Testing

    VS Series Helium Mass Spectrometer Leak Detectors Figure B-2 Selective Ion Pump Detector B.3 Methods of Leak Testing There are many different ways to leak test parts using helium as a tracer gas. In general, the leak detection method is selected based on the actual working conditions of the part being tested.

  • Page 144: Vacuum Testing Method (Outside-In

    VS Series Helium Mass Spectrometer Leak Detectors B.3.1 Vacuum Testing Method (Outside-in) The part to be tested is evacuated with a separate pumping system for large volumes, or with just the leak detector itself. When the appropriate cross over pressure has been...

  • Page 145: Pressure Testing Method (Inside-Out

    VS Series Helium Mass Spectrometer Leak Detectors B.3.2 Pressure Testing Method (Inside-out) In this technique, the part is pressurized with helium or a mixture of helium and air, and tested by one of the following methods. B.3.2.1 Measuring Leaks To determine the total quantity of leakage (but not the number or location of leaks), the part is pressurized with helium (or a mixture of helium and air or nitrogen).

  • Page 146: System Leak Test Methods

    VS Series Helium Mass Spectrometer Leak Detectors B.3.2.2.1 Accumulation Testing Method This method can both locate and quantify leaks. Some type of shroud or hood is placed in such a manner as to envelop a potential leak site. A certain amount of time is given to allow leaking helium to accumulate in the shrouded area, increasing the helium concentration.

  • Page 147: B-8 Vacuum System

    VS Series Helium Mass Spectrometer Leak Detectors Figure B-8 Vacuum System B.3.3.2 Pressurized Systems Many different types of pressurized systems also need to be leak-free. These systems can be charged with helium or some mixture of helium and another gas such as nitrogen. If a diluted helium mixture is used, the helium signal is diminished proportionally.

  • Page 148: Typical Leak Detection Applications

    Downtime in either case must be minimized. A rugged, dependable, fast starting leak detector is essential to maximize up time of production tools. Agilent VS Series portable leak detectors keep industry moving. Examples of some of these applications are:...

  • Page 149: System Integrated Leak Detection

    VS Series Helium Mass Spectrometer Leak Detectors Semiconductor process tools ❑ Laser process equipment ❑ Pressurized systems Power Plants ❑ Underground tanks, cables, and pipes ❑ High purity gas handling systems ❑ Bioreactors and fermenters ❑ Liquid gas manufacturing facilities ❑...
  • Page 150 VS Series Helium Mass Spectrometer Leak Detectors Portable Sniffing Applications Some applications require operators or technicians to look for leaks from a ladder, outdoors, above or below ground, or in a densely constructed industrial facility or power plant. In these cases, a mobile cart-mounted MSLD may not be practical. A truly portable unit such as the PHD-4 is required.

  • Page 151: Appendix C. Specifications

    VS Series Helium Mass Spectrometer Leak Detectors Appendix C. Specifications C.1 Specifications The specifications for the leak detector are provided in Table C-1. Table C-1 Leak Detector Series Specifications Specifications VS Series Helium Mass Spectrometer Versions Pumps Rotary Vane Dry Scroll...
  • Page 152 VS Series Helium Mass Spectrometer Leak Detectors Table C-1 Leak Detector Series Specifications (Continued) Specifications VS Series Helium Mass Spectrometer Versions Storage Ambient Relative humidity: 0% to 95%, non-condensing. Temperature: 20 °C ( 4 °F) to +60 °C (140 °F)
  • Page 153 Please follow these instructions whenever one of our products needs to be returned. 1) Complete the attached Request for Return form and send it to Agilent Technologies (see below), taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials.
  • Page 154 This page intentionally left blank. 4) HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS, RADIOACTIVE MATERIAL, OR MERCURY AT ITS FACILITY. Call Agilent Technologies to discuss alternatives if this requirement presents a problem.
  • Page 155 Shipping Regulations (IATA, DOT, etc.) and carrier requirements. Customers receiving an Advance Exchange product agree to return the defective, rebuildable part to Agilent Technologies within 15 business days. Failure to do so, or returning a non-rebuildable part (crashed), will result in an invoice for the non-returned/non-rebuildable part.
  • Page 156 VS Series Helium Mass Spectrometer Leak Detectors This page intentionally left blank.
  • Page 158 Service & Support North America India Southeast Asia Agilent Technologies Agilent Technologies India Pvt. Ltd. Agilent Technologies Sales Sdn Bhd Vacuum Products Division Vacuum Products Division Vacuum Products Division 121 Hartwell Avenue G01. Prime corporate Park, Unit 201, Level 2 uptown 2,...

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