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VS PD03 Scroll Pump
and Components
Replacement
Part Number 699910017
Rev. A
February 2009
NOTICE: This document contains references to Varian.
Please note that Varian, Inc. is now part of Agilent
Technologies. For more information, go to
www.agilent.com/chem.
vacuum technologies
FIELD INSTALLATION
INSTRUCTIONS
Please note that Varian, Inc. is now part of Agilent
Technologies. For more information, go to
NOTICE: This document contains references to Varian.
www.agilent.com/chem.
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Related Manuals for Agilent Technologies VS PD03
Summary of Contents for Agilent Technologies VS PD03
- Page 1 NOTICE: This document contains references to Varian. Please note that Varian, Inc. is now part of Agilent Technologies. For more information, go to www.agilent.com/chem. vacuum technologies VS PD03 Scroll Pump FIELD INSTALLATION INSTRUCTIONS and Components Replacement Part Number 699910017 Rev.
- Page 2 Varian Field Instruction Sheet VS PD03 Scroll Pump and Components Replacement Preface Documentation Standards This manual uses the following documentation standards: NOTE Notes contain important information. CAUTION Cautions appear before instructions, which if not followed, could cause damage to the equipment or data loss.
- Page 3 CAUTION Wear non-powdered, ESD-safe Nitride or equivalent gloves to prevent skin oils from getting on spectrometer internal components. Page 2 of 17 VS PD03 Scroll Pump and Components Replacement Document No. Revision 699910017...
- Page 4 The spectrometer operates at a very high vacuum produced by the high vacuum turbomolecular pump. Service of the spectrometer requires that this vacuum be vented to the atmosphere. Page 3 of 17 VS PD03 Scroll Pump and Components Replacement Document No. Revision 699910017...
- Page 5 3. Using an extended length M5 Allen wrench, remove the four screws holding the rear plastic cover (Figure 1: Rear and Front Cover Screws) and detach the rear plastic cover from the unit. Figure 1: Rear and Front Cover Screws Page 4 of 17 VS PD03 Scroll Pump and Components Replacement Document No. Revision 699910017...
- Page 6 5. Tilt the unit and unscrew the four connections underneath that hold the pump (Figure 3: Scroll Pump Mounting Con- nections). Place the unit flat again and remove the whole pump assembly. Figure 3: Scroll Pump Mounting Connections Page 5 of 17 VS PD03 Scroll Pump and Components Replacement Document No. Revision 699910017...
- Page 7 7. Disconnect the diaphragm, fan and motor power connectors. 8. Remove the fan assembly bracket and lay it aside (Figure 5: Fan Assembly Mounts). Figure 5: Fan Assembly Mounts Page 6 of 17 VS PD03 Scroll Pump and Components Replacement Document No. Revision 699910017...
- Page 8 22.Refer to the operator's manual if the system fails to reach the System Ready mode. Varian recommends a full calibration of the unit prior to leak test operations. Page 7 of 17 VS PD03 Scroll Pump and Components Replacement Document No. Revision...
- Page 9 3. Using an extended length M5 Allen wrench, remove the four screws holding the rear plastic cover (Figure 7: Rear and Front Cover Screws) and detach the rear plastic cover from the unit. Figure 7: Rear and Front Cover Screws Page 8 of 17 VS PD03 Scroll Pump and Components Replacement Document No. Revision 699910017...
- Page 10 11. Watch the home screen to verify the Spectube Pressure Wait message progresses to Stabilization Wait and System Ready within ten minutes. Refer to the operator's manual if the system fails to reach the System Ready mode. Page 9 of 17 VS PD03 Scroll Pump and Components Replacement Document No. Revision 699910017...
- Page 11 3. Using an extended length M5 Allen wrench, remove the four screws holding the rear plastic cover (Figure 9: Rear and Front Cover Screws) and detach the rear plastic cover from the unit. Figure 9: Rear and Front Cover Screws Page 10 of 17 VS PD03 Scroll Pump and Components Replacement Document No. Revision 699910017...
- Page 12 Refer to the operator's manual if the system fails to reach the System Ready mode. 11. Varian recommends a full calibration of the unit prior to leak test operations. Page 11 of 17 VS PD03 Scroll Pump and Components Replacement Document No. Revision...
- Page 13 3. Using an extended length M5 Allen wrench, remove the four screws holding the rear plastic cover (Figure 11: Rear and Front Cover Screws) and detach the rear plastic cover from the unit. Figure 11: Rear and Front Cover Screws Page 12 of 17 VS PD03 Scroll Pump and Components Replacement Document No. Revision 699910017...
- Page 14 Figure 13: Ground Connection 6. Disconnect the two M4 screws mounting the plate to the scroll pump assembly (blue arrow in Figure 13: Ground Connection). Page 13 of 17 VS PD03 Scroll Pump and Components Replacement Document No. Revision 699910017...
- Page 15 Refer to the operator's manual if the system fails to reach the System Ready mode. 15.Varian recommends a full calibration of the unit prior to leak test operations. Page 14 of 17 VS PD03 Scroll Pump and Components Replacement Document No. Revision...
- Page 16 Front Cover Screws) and detach the rear plastic cover from the unit. Fgure 15: Rear and Front Cover Screws NOTE Always change the valve plates, diaphragm and sealing rings at the same time. Page 15 of 17 VS PD03 Scroll Pump and Components Replacement Document No. Revision 699910017...
- Page 17 Placing the diaphragm support, diaphragm spacer(s), and disc spring, in that order, on the thread part of the new diaphragm. The concave side of the disc spring must be towards the diaphragm. Page 16 of 17 VS PD03 Scroll Pump and Components Replacement Document No. Revision...
- Page 18 11. Watch the home screen to verify the Spectube Pressure Wait message progresses to Stabilization Wait and System Ready within ten minutes. Refer to the operator's manual if the system fails to reach the System Ready mode. Page 17 of 17 VS PD03 Scroll Pump and Components Replacement Document No. Revision 699910017...
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Page 20: Sales And Service Offices
Sales and Service Offices Canada Italy United States Central coordination through: Varian, Inc. Varian, Inc Varian, Inc. via F.lli Varian 54 121 Hartwell Avenue 121 Hartwell Avenue 10040 Leini, (Torino) Lexington, MA 02421 Lexington, MA 02421 Italy Tel.: +39 011 997 9111 Tel.: +1 781 861 7200 Tel.: +1 781 861 7200 Toll-Free: 00 800 234 234 00...