Technical Data; Technical Data Of Components; Power Supply; Weight / Dimensions - Inficon Modul1000 Operating Manual

9

Technical Data

9.1

Technical data of components

9.1.1

Power supply

9.1.2

Weight / dimensions

9.1.3

Characteristics

Mains voltage and frequencies
Power consumption
Protective system - basic device
Protective system - control panel
Dimensions (L x W x H)
Weight
Noise level dB(A)
Noise level dB(A)
Noise level dB (A) 0.5 m distance
Audio alarm dB(A)
Contamination level (to IEC 60664-1)
Overvoltage category (to IEC 60664-1)
Mains connection line
Max. inlet pressure (Modul1000)
Max. inlet pressure (Modul1000b)
Minimum detectable Helium leak rates
in vacuum mode (ULTRA)
Minimum detection limit in sniff mode
Maximum allowed gas flow in the sniffer line
Maximum Helium leak rate which can be displayed
Measurement range
Maximum pumping speed (helium) at inlet
ULTRA mode
Time constant of leak rate signal (63% of the final value) < 1 s
Detectable masses
Run-up time (after starting)
Mass spectrometer
Ion source (2-cathodes)
Inlet Port
Valves
100 V...240 V, 50/60 Hz
< 400 VA
IP20
IP40
535 x 350 x 339 mm
30 kg
< 70
< 56
< 56
90
2
II
3 m
0.4 mbar
3.0 mbar
-12
< 5×10 mbar l/s
-8
< 5×10 mbar l/s
25 sccm
0.1
mbar l/s
12 decades
2.5 l/s
2, 3 and 4
3 min.
180° magn. Sector range
Iridium/Yttrium oxide
DN25 KF
solenoid
9-1
Technical Data