Inficon Modul1000 Operating Manual
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Inficon Modul1000 Operating Manual

Modular leak detector. from software version v1.75
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O P E R A T I N G
Translation of the original manual
jinb80en1-j (1501)
Modul1000
Modular Leak Detector
M A N U A L
Catalog-No.
550-300A
550-310A
550-330A
from software version V1.75

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Summary of Contents for Inficon Modul1000

  • Page 1 O P E R A T I N G M A N U A L Translation of the original manual jinb80en1-j (1501) Catalog-No. 550-300A 550-310A 550-330A from software version V1.75 Modul1000 Modular Leak Detector...
  • Page 2 Legal notice INFICON GmbH Bonner Straße 498 50968 Cologne Germany © Copyright 2010 INFICON GmbH, Cologne. This document may only be reproduced in any form with the permission of INFICON GmbH, Cologne.

  • Page 3: Table Of Contents

    Content Operating instructions How to use this manual Warning and danger symbols Graphic conventions Definition of Terms Important safety instructions Intended use User requirements Restrictions of use Hazards in the event of intended use Description of equipment The housing Interfaces Operating options 3.3.1 Desktop operation...
  • Page 4 Main menu Info 6-30 6.12.8 Main menu Access Control 6-31 Maintenance tasks Maintenance and service at INFICON General Maintenance Instructions Maintenance schedule Maintenance intervals Description of the maintenance work 7.5.1 Opening of the Device TMH 071 Replace the Lubricant Reservoir...
  • Page 5 Disposal Technical Data Technical data of components 9.1.1 Power supply 9.1.2 Weight / dimensions 9.1.3 Characteristics 9.1.4 Environmental Conditions Control via the PLC inputs and outputs 9.2.1 PLC inputs 9.2.2 PLC Outputs The digital valve outputs Analogue Output 9-10 9.4.1 Configuration of the analogue outputs 9-10 Pin Assignments...
  • Page 6 Content...

  • Page 7: Operating Instructions

    Operating instructions How to use this manual • Read this manual before using Modul1000. • Keep the manual so that you can use it anytime. • Enclose the operating manual if the device is ever passed on to third parties.

  • Page 8: Graphic Conventions

    The range of the pre-amplifier is selected automatically. The Autoranging feature of the Modul1000 covers the entire range or leak rates depending on the selected oper- ating mode. Vacuum mode or Sniff mode Not only the leak rate signal, but also the pressure in the test sample (inlet pressure PE) and the fore-vacuum pressure (PV) are used for control purposes.
  • Page 9 The smallest leak rate the Modul1000 is able to detect. (5x10 mbar l/s). Menu The menu allows the user to program the Modul1000 according to the requirements. The menu has a tree structure. As-delivered condition The default settings of the Modul1000 are as delivered by the factory.
  • Page 10 Operating instructions...

  • Page 11: Important Safety Instructions

    Important safety instructions Intended use The Modul1000 is intended to be used for the leak test under vacuum. With the sniffer version of Modul1000 (Catalogue-No. 550-310), it is also possible to locate leaks in the test sample. The Modul1000 may only be used for leak tests with helium and hydrogen. It may only be used in dry rooms and on dry surfaces.

  • Page 12: Restrictions Of Use

    Danger of fatal injuries due to electric shock. Keep the sniffer tip away from live parts. Danger S TOP Danger of fatal injuries due to electric shock! Connect the Modul1000 properly with the 3-core power cable and then connect the PE-line to earth. Important safety instructions...
  • Page 13 Danger S TOP Danger of fatal injuries due to implosion. Components which are not pressure-resistant, can burst cause through implosion. Only connect containers and parts to the inlet flange of Modul1000 which are suit- able for vacuum. Danger S TOP Danger of fatal injuries due to strong permanent magnets.
  • Page 14 Only operate the Modul1000 in buildings and on dry surfaces. Warning Risk of injury due to sucking inlet flange If the vacuum function of the Modul1000 is activated, body parts which are close to the inlet flange can be sucked in. Keep your body away from the inlet flange.
  • Page 15 If it can be supposed that safe operation is not ensured any more, the device must be switched off and must be secured against accidental switching on. If this happens, contact the INFICON service people. Such a problem could occur, Notice: •...
  • Page 16 Caution The Modul1000 may be damaged by improper transport conditions. Only use this device for detecting helium and hydrogen. Use a filter in the inlet of the Modul1000 to avoid dirt from getting into the vacuum system. Caution The electronic system of the Modul1000 may be damaged by the wrong supply voltage.
  • Page 17 Provide for free openings for air inlet and outlet. Caution The Modul1000 can be damaged when liquid gets into it. If liquid has entered the Modul1000, do not switch it on and contact the INFICON- Service. Caution The Modul1000 may be damaged by being stored in unfavourable conditions (too damp, too hot, too cold, too high above sea level) for months or years.
  • Page 18 Important safety instructions...

  • Page 19: Description Of Equipment

    Description of equipment The Modul1000 is a helium leak detector which has been designed to be installed in leak test work stations or integrated machines. The analysis system with turbo-molecularpump and a complete control unit are inte- grated in a compact housing. Depending on the set operating mode, the Modul1000 can execute overriding control functions in a leak test system.
  • Page 20 Mains fuses Recess handles Connection DN25 KF for Status LED Fore-vacuum pump or sniffer line air filter Electrical interfaces Fig. 3-3 Cut-out in the bottom side of Modul1000 Item Description Connection for the fore-vacuum pump (screwed flange) Description of equipment...

  • Page 21: Interfaces

    (refer to chapter 6.8). This control unit offers access to the menu struc- ture. The control unit can optionally be connected to the Modul1000 via 1 m or 5 m long connecting cables. The control unit is for configuring and controlling the Modul1000 individually and parameters as well as measured values can be read out.

  • Page 22: Desktop Operation

    3.3.1 Desktop operation The control unit can be placed on even desktops and does not slip. Fig. 3-5 Control Unit for Desktop Operation Item Description Item Description LCD display Soft Key no. 5 Soft Key no. 1 Soft Key no. 6 Soft Key no.

  • Page 23: Remote Control Rc1000

    Magnets on the underside of the unit enable it to be attached to horizontal or ver- tical metal surfaces. With the remote control RC1000, the leak test device Modul1000 can also be control- led via a 28 m long cable.

  • Page 24: Scope Of Delivery

    - Extension cable, 8 m, for RC1000C 14022 3.5.1 Sniffer line SL200 The Modul1000, in the version as vacuum or sniffer leak detector needs the sniffer line SL200 to be able to work in sniffer mode. 3.5.2 Test chamber TC1000 The vacuum chamber TC1000 serves for integrated testing of helium-filled parts.

  • Page 25: Set Of Male Connectors For Interfaces

    3.5.3 Set of male connectors for Interfaces The connector kit includes the following plugs: PLC IN / AUDIO, PLC OUT, RECORDER, PRESSURE GAUGE, VALVES, ACCESSORIES Description of equipment...
  • Page 26 Description of equipment...

  • Page 27: Installation

    The maximum permissible ambient temperature of the Modul1000 may not be exceeded during operation! If the leak detector Modul1000 is used for an application that can cause strong vibra- tions or impacts, then we recommend connection via flexible connections and to pref- erably avoid direct connections.

  • Page 28: Electrical Installation

    Place the device in a way that you can always reach the power plug. 4.2.2 Electrical interfaces All electrical interfaces of the Modul1000 are clearly visible arranged in a connecting area on the right side of the device (refer to Fig.
  • Page 29 The connection ACCESSORIES serves for connecting the sniffer line SL200 or the test chamber TC1000. External Pressure gauge If the Modul1000 is used in Commander mode, an additional pressure gauge has to be connected to PRESSURE GAUGE. Connect the pressure gauge as follows with the 8-pin Phoenix-plug "PRESSURE GAUGE".
  • Page 30 0... 10 V. To change the configuration of the input of the pressure gauge, the respective jumper on the interface card in Modul1000 has to be placed onto another position. To do that, open the device. The jumpers are located on the interface board and are accessible after opening the cover.
  • Page 31 Assignment 24V can tied-in via the jumper XT2, maximum current consumption 0.3 A (Pin 2 and 3 connected). As delivered, 24 V are not tied-in, Pin 1 and 2 connected. GND 24 V can be tied-in via jumper XT1 (Pin 2 and 3 connected). On delivery, GND 24 V is not tied-in (Pin 1 and 2 connected).

  • Page 32: Vacuum Connections

    Screw the locking plug with the sealing into the opening of the removed connection flange. Screw in the connecting flange with the sealing. For the sniffer version of the Modul1000, only the pump connections on the Notice: left side or on the bottom side can be used.
  • Page 33 V21. Sniffer line The connection for the sniffer line exists only for the sniffer version of the Modul1000 (catalogue number 550-310). This connection is for the optional sniffer line SL200. The SL200 is connected to the power system via the connector socket ACCESSO- RIES.

  • Page 34: Working Modes

    • Sniff. Vacuum In standard Vacuum mode, the Modul1000 id operated as „Stand Alone“ leak detec- tor. The unit under test or the vacuum chamber are only evacuated via the inlet flange of the leak detector. The pumping speed on the inlet of the leak detector depends on the used fore-vacuum pump and on the conductivity ratios of the device.

  • Page 35: Partial Flow Mode

    V20. The increased pumping speed accelerates the evacuation processes and the signal response time of the Modul1000. Depending on the settings, the partial flow pump can optionally be added via an external partial flow valve only for evacuation or for evacuation during the measure- ment.

  • Page 36: Auto Leak Test

    RS232 interface (refer to Interface Description). Measuring time The measuring time starts as soon as the Modul1000 switches over from the evacu- ation phase to the Measuring mode. The possible time settings range from 1 second to 30 minutes.

  • Page 37: Commander Mode

    Commander mode If the Modul1000 is integrated in a leak detector system, in Commander mode, it can control the whole test in the integrated chamber. All necessary valves for filling the test sample with helium as well as the necessary pressure gauge can directly be connected to the Modul1000.

  • Page 38: Design Of A Leak Detector System

    5.4.1 Design of a leak detector system Design of a leak detector system with Modul1000- - -Commander function is mainly the same as that of the conventional integrated leak test system. The vacuum chamber is evacuated by the Modul1000, optionally also in partial flow mode (Fig.

  • Page 39: Test Sequence Of Events

    Test sequence of events The test sample is in the vacuum chamber which is connected to the inlet of Modul1000. The unit under test is in the vacuum chamber which is connected to the inlet of Modul1000. After the START signal, the Modul1000 starts evacuating the vacuum chamber. If a partial flow pump is connected with Modul1000, the partial flow valve V20 (Fig.
  • Page 40 If the set filling pressure for the test sample p_A_Gross_leak_test is not reached within the time t_E_Ventilation_time, the measuring cycle will be interrupted indicat- ing the error message 97. After that, the vacuum chamber is ventilated by the Modul1000 (and the external flood valve V21 (Fig.

  • Page 41: Sniff Mode Tips

    Sniff mode tips The Modul1000 Sniffer version can be used as vacuum leak detector or as sniffer leak detector. To use it as sniffer leak detector, the optimized sniffer line SL200 has to be connected to „Sniff“ on the right side of the Modul1000. In Measuring mode, the module draws a constant gas flow through the sniffer line.

  • Page 42: Operation

    State of emission • Active filament • A bar graph which shows the run-up progress After the run-up has been completed, the Modul1000 is in „Standby“ mode. Status LED The LEDs show the operating mode of the device: Operating mode: LED, green...

  • Page 43: Control

    The optional remote control (refer to chapter 3.3.3) includes the main functions Start, Stop, Vent, and Zero. Additionally the volume can be controlled. If „LOCK“ is displayed, the control of the Modul1000 via the remote control was disa- bled in the menu item „Control location".

  • Page 44: Control Commands

    By pressing the START button, the Modul1000 starts to evacuate the connected test sample. If the pressure on the inlet of the leak test device reaches < 0.4 mbar, the Modul1000 will automatically switch over to the Measuring mode. This pressure limit can be set in the following menu:...
  • Page 45 Fig. 6-3 Zero function (background suppression) Item Description Item Description Leak rate signal without ZERO Leak 5E-10 mbarl/s with ZERO ZERO is enabled Floating Zero adjustment Suppression of two decades No Zero-adjustment Leak 5E-10 mbarl/s without ZERO Menu Pressing the MENU button displays the selection menu. Display-buttons The functions of the eight buttons on the left or on the right of the display depend on the selected menu.
  • Page 46 Fig. 6-4 Examples for a numeric input of Trigger Level 1 To change the trigger level from 1.0x10 mbarl/s to 3x10 mbarl/s please press 2/3 (button No. 3). A sub-menu is opened, in which the desired value 3 (button 4) can be selected.

  • Page 47: Display

    Standby mode and is ready for measurement. Evacuation Pressing the START button causes the Modul1000 to evacuate the inlet. The evacuation time depends on the volume connected the Modul1000 and the fore- vacuum pump or the partial flow pump. Operation...
  • Page 48 Fig. 6-5 Evacuate Measuring When the pressure on the inlet of the Modul1000 drops below the set lower pressure limit, the device will change over to measuring mode. Fig. 6-6 Measuring Operation...
  • Page 49 Display of measured values In Measuring mode, two ways of displaying the measured values are available. • Numeric display with big sized numbers as bar graph. Fig. 6-7 • Graphic display as function of the measuring time Fig. 6-8 You can switch over between the numeric display and the graphic display using the button No.

  • Page 50: Calibration In Vacuum Mode

    (pres- sure, measuring time) similar or equal to the later measurements. If a control unit is connected to the Modul1000, the LEDs in the buttons START, STOP / VENT and ZERO light up during the calibration.

  • Page 51: Calibration In Sniff Mode

    Then, the Modul1000 automatically controls the valve. Before the calibration, enter the corresponding value of the calibration leak which shall be used for calibrating the Modul1000 in the settings of the Modul1000. This can be done via the optional control unit or the RS232 interface.

  • Page 52: Calibration In Commander Mode

    The calibration procedure is the same as it is for the vacuum mode. Machine factor The machine factor takes into account that the Modul1000 is used in parallel with a pumping system.(partial flow method). Because in such a system configuration only a part of the leak gas flow reaches the leak test device and is detected, first.
  • Page 53 The machine factor can also be used to correct the leak rate display referred to the air equivalent. The machine factor for this correction is: 3.7 x 10 When this setting is used, this status will be displayed by „COR“. 6-12 Operation...

  • Page 54: Menu Structure

    Menu structure Scale linear/logarithmic Display range auto/manual Time axis View Contrast Background in standby Lower display unit Mode Trigger level 1 Trigger level 2 Trigger level 3 Volume Trigger & Alarms Units Alarm delay Audio alarm type Internal automatic Internal manual CAL Calibration External automatic External manual...
  • Page 55 Save as PARA SET 1 Save as PARA SET 2 Save as PARA SET 3 Parameter load/save Load default Load PARA SET 1 Load PARA SET 2 Settings Load PARA SET 3 Calibration request Paging function RC1000 Contamination protection Monitoring functions Pressure limits for vacuum ranges Pressure limits for sniff mode...

  • Page 56: Explanation Of Menu Items

    Explanation of Menu Items The menu items on which the explanation refers to are written in bold letters. Pressing the MENU button displays the selection menu. The software menu opens the menu level which was left before. If you press the MENU button once more, you can leave the software menu again. With pressing the MENU button for 2 seconds the display changes to the upper menu level, the Main Menu.

  • Page 57: Main Menu Mode

    Trigger Level 1 (2 or 3) In this menu item, you have the choice of up to three leak rate trigger thresholds. If the measured leak rate exceeds the set trigger threshold, the Modul1000 reacts as follows: Display: At the bottom of the display, the symbols for the trigger 1,2, or 3 are displayed in inverted colours.
  • Page 58 "Loud- speaker". Beep sound: The "Beep On" or "Beep Off" buttons serve for switching On/Off the beep sound of the Modul1000. If the beep is switched on, the Modul1000 indicates certain changes of status by short audio signals. Units The units which are measured by the Modul1000 can be altered.

  • Page 59: Main Menu Calibration (Cal) Mode Vacuum

    "Start" button. After starting the calibration process, the Modul1000 evacuates the inlet area. As soon as the maximum intake pressure of the Modul1000 has been reached, first, the Modul1000 displays a varying measuring signal in the shape of a bar display.
  • Page 60 No entries are required during the running calibration phase. In the last step, the Modul1000 saves the newly determined calibration factor. If the newly determined calibration factor deviates from the prior calibration factor by the factor 2, the new value has to be acknowledged by acceptance.

  • Page 61: Main Menu Settings

    Standby mode. If you press the "Stop/Vent" button for a longer time, the inlet of the device will be vented additionally. How long the Stop/Vent button must be pressed to vent the inlet of the Modul1000, depends on the time set in the Delay/Vent menu.
  • Page 62 Reference measurement In this menu, the reference measurement can be started. Main menu Settings Vacuum settings Commander Functions In the menu item „Commander Functions“, all parameters of the commander function can be configured. Commander Timing The individual process times can be set here. The adjustment range is from 0.1 to 999.9 seconds t_A evacuation time Maximum time to achieve the set sample pressure "p_B evacuation pressure"...
  • Page 63 Machine factor After internal calibration, the machine factor considers the relation between the effec- tive pumping speed of the Modul1000 and of the system pump stand in measuring mode. The machine factor takes into account that an additional external pumping system is used.

  • Page 64: Main Menu Settings Zero & Background

    He (helium isotop with mass 3) 6.9.6.4 Main menu Settings Interfaces In the "Interfaces" menu, the electric interfaces of the Modul1000 can be configured. Main Menu Settings Interfaces Control location The Modul1000 is controlled via the digital input. The START, STOP and ZERO buttons of the device are disabled.
  • Page 65 Modul1000 cannot be controlled via the keyboard. Control interfaces PLC, RS232 and Local Local and PLC The Modul1000 is controlled via the START, STOP and ZERO buttons on the device and via the digital inputs. Local and RS232 The Modul1000 is controlled via the START, STOP and ZERO buttons on the device and via the digital inputs.
  • Page 66 The zero point (pressure value) of the connected sensors can be Zero point: assigned with the corresponding current or voltage value. The full scale (pressure value) of the connected sensors can be Full scale: assigned with the corresponding current or voltage value. Main Menu Settings Interfaces...

  • Page 67: Main Menu Settings Miscellaneous

    The default language is English. If accidentally a wrong language has been set, English can be set during the run-up of the Modul1000 after it has been switched on, when the buttons 2 and 6 are simul- taneously pressed. The settings are not saved automatically but have to be saved via this menu item.

  • Page 68: Settings Load/Save Parameters

    7 were taken into consideration. Warning If the maintenance message is ignored and the contaminated filter is not replaced, there will be the risk of overheating for the Modul1000. 6.9.6.6 Main menu Settings Load/Save Parameters Save in “PARA SET 1”...

  • Page 69: Settings Monitoring

    By pressing the buttons "Save in PARA SET 1" to "Save in PARA SET 3", the current menu settings can be saved in the Modul1000. On the now appearing menu screen, the saved parameter set can be renamed by pressing the "Edit name" button.
  • Page 70 Contamination protection If this mode is switched on, the Modul1000 closes all valves as soon as the measured leak rate exceeds the value limited by the contamination protection. Thus no more Helium gets into the mass spectrometer.

  • Page 71: Main Menu Info

    This menu point spans across several pages to show all kinds of internal data. Vacuum diagram The vacuum diagram of the Modul1000 is displayed. Opened and closed valves are also shown. In Partial Flow mode and when the Commander functions are used, the corresponding vacuum diagrams are displayed on the menu screen.

  • Page 72: Main Menu Access Control

    Here, you can lock and unlock the access to the calibration function. Change DevicePIN The access to the Modul1000 can be restricted by entering or editing the Device-PIN. Is the Devise-PIN not 0000, the Modul1000 will request this PIN immediately after switching on.

  • Page 73: Maintenance Tasks

    The components and assemblies used correspond with the highest quality standards and are generally need low-maintenance. However, to maintain the warranty claim for the Modul1000 it is required, to keep the maintenance intervals as listed below: It is recommended signing a maintenance contract for the Modul1000 with INFICON or a service partner authorized by INFICON.
  • Page 74 It is intended for the maintenance of the turbo-molecular pump TMH 071. When the before mentioned maintenance intervals have expired, the control unit of the Modul1000 will display a warning every time the device is switched on. The message appears as long as the maintenance interval has been acknowledged. The maintenance counter 2 is only enabled for the service steps II and III in the service menu.

  • Page 75: Maintenance Schedule

    Perform maintenance work according to time • depending on the environment and use • Relevant to the process Maintenance intervals The maintenance schedule for the Modul1000 can be subdivided in 4 maintenance groups. • 1500 hours maintenance • 5000 hours maintenance •...
  • Page 76 Spare Filter Cell for the fans 200001552 5000 hours -Maintenance The 5000 hours maintenance should be performed by an INFICON service technician or an other person authorized by INFICON. The valve drives have to be inspected and cleaned every 5000 operating hours and the valve seals or the valve caps have to be replaced.

  • Page 77: Description Of The Maintenance Work

    TMH 071 The 2-years-maintenance of the operating fluid reservoir of the turbo-molecular pump TMH 071 should be performed by a INFICON service technician or by a person authorized by INFICON. Customers who have received pertinent instructions from an authorized person can perform maintenance at their own responsibility.

  • Page 78: Opening Of The Device

    Before removing the cover of the device you must disconnect the leak test device from the mains cord. Open the Modul1000 as follows: Switch off the line switch and remove the power cable. Remove the clamp ring for quick release.

  • Page 79: Tmh 071 Replace The Lubricant Reservoir

    For flooding the TMH 071 disconnect the fore vacuum connection to the Modul1000 and switch the device on for about 10 to 25 s. After about 10 s, valve V2 opens and the mass spectrometer and the turbo-molecular pump are flooded.
  • Page 80 Fig. 7-3 Cover of the lubricant reservoir TMH 071 Item Description Item Description Fore-vacuum connection Cover of the lubricant reservoir TMH 071 Pocket for special tool Inspection port Unscrew the cover on the bottom of the TMH71 using a special tool (calliper face spanner).
  • Page 81 Fig. 7-4 Replace the Lubricant Reservoir Item Description Item Description Operating fluid reservoir O-Ring Maintenance tasks...

  • Page 82: Fuse Replacement

    Fuse replacement 7.7.1 Overview on Electrical Fuses Mains switch housing chassis: Designation Technical data Fuse for Mains switch 2 x T 6.3 A Power supply unit fuse (2-phase OFF) Wiring plane: Designation Technical data Fuse for T 6,3 A Power supply unit TC 600 T 0,8 A Fans Power supply unit ZWS240PAF-24/TA:...

  • Page 83: Replace Mains Fuse

    Required material • Safety fuse 2xT 6.3A The main fuses of the Modul1000 are housed in the mains switch of the equipment. • For replacing the main fuses, open the cover of the fuse insert using a screwdriver For this, insert the screwdriver into the respective groove and open the cover.

  • Page 84: Replace Fuses On Interface Board

    Allen key SW 8 Required material • Complete set of fusesOrder No.: 200 000 641 Access to the fuses is only possible when the cover of the Modul1000 has been removed. Follow the instructions in 7.5.1 Opening of the Device.

  • Page 85: Replacing Of Parameter Memory (I•Stick)

    Screwdriver size 1 Required material • I•STICK Access to the I•STICK is only possible when the cover of the Modul1000 has been removed. Follow the instructions in 7.5.1 Opening of the Device. Please observe the safety instructions in this chapter.

  • Page 86: Replace Vent Filter

    Required material • Replacement filter (2 pcs.) Order No.: 200 000 683 Access to the flood filter is only possible when the cover of the Modul1000 has been removed. Follow the instructions in 7.5.1 Opening of the Device. Please observe the safety instructions in this chapter.

  • Page 87: Transport And Disposal

    If it is contaminated, also indicate the nature of the hazard. INFICON must return any equipment without a Declaration of Contamination to the sender’s address.

  • Page 88: Disposal

    Disposal When disposing the Modul1000, consider your federal law concerning the disposal of electronic devices. Transport and disposal...

  • Page 89: Technical Data

    Audio alarm dB(A) Contamination level (to IEC 60664-1) Overvoltage category (to IEC 60664-1) Mains connection line 9.1.3 Characteristics Max. inlet pressure (Modul1000) 0.4 mbar Max. inlet pressure (Modul1000b) 3.0 mbar Minimum detectable Helium leak rates in vacuum mode (ULTRA) < 5×10...

  • Page 90: Environmental Conditions

    9.1.4 Environmental Conditions For use within buildings Permissible ambient temperature (during operation) +10° C … +40° C 50° F … 104° F Permissible storage temperature 0° C … +60° C 32° F … 140° F Maximum relative humidity 80% at 31°C / 88°F, linearly decreasing to 50 % at 40 °C / 104 °F Max.

  • Page 91: Control Via The Plc Inputs And Outputs

    9.2.1 PLC inputs Caution The electronic system of the Modul1000 may be damaged by too high input voltages. The maximum permissible input direct voltage is 30V. The 14-pin Phönix-connector box is located at the back of the device and is marked with PLC In / Audio.
  • Page 92 ZERO Edge-controlled input Change from LOW to HIGH: Activate ZERO. Change from HIGH to LOW: Deactivate ZERO START/STOP Edge-controlled input Change from LOW to HIGH: activate START Change from HIGH to LOW: activate STOP START Edge-controlled input Change from LOW to HIGH: carry out START STOP Edge-controlled input Change from LOW to HIGH: activate STOP...
  • Page 93 CAL INT Edge-controlled input Change from LOW to HIGH: start internal automatic calibration. CAL EXT Edge-controlled input Change from LOW to HIGH: Start external manual calibration. CYCLE (inverted START / STOP input) Status-controlled input Change from LOW to HIGH: In the Standby status, START will be executed and in the Measurement status, STOP will be executed.

  • Page 94: Plc Outputs

    9.2.2 PLC Outputs The 16-pin Phönix-connector box is located at the back of the device and is marked with PLC Out. The pin assignment of the connector box is freely selectable. Relay outputs (pin 3-12): Maximum load 60V DC / 25V AC / 1A ohmic load, Notice: for maximum 500,000 switching operations.
  • Page 95 TRIGGER 1, 2, 3 Closed, when the lower trigger level has not been reached and the device is in Meas- urement mode. ZERO ACTIVE Closed when the ZERO-function has been switched on. READY Closed, when the device is ready for measurement (Emission ON, no error). STANDBY Closed, when the device is in STANDBY mode.
  • Page 96 EMISSION ON Closed when emission has been switched on. CYCLE ACTIVE Closed when the device is in evacuation, measuring or calibration mode. PUMP DOWN Closed when the device is in evacuation mode. SNIFF Closed, when the device is in SNIFF mode. This output has a feedback function for the PLC input "SNIFF".

  • Page 97: The Digital Valve Outputs

    It must safely be separated from the power supply network and may apply maximum 30 V. The 24V-power supply unit of the Modul1000 can be used for supplying the valves. The valve switches connect to the 24 V-power supply unit on pin 3. Each valve switch may be loaded with maximum 0.2 A.

  • Page 98: Analogue Output

    Notice: spite of this, hum interference occurs, we recommend supplying the Modul1000 and the recorder by the same mains phase. If this is not possible, you must make sure that the frame ground of both instruments is kept at the same potential.
  • Page 99 Fig. 9-1 TPR-characteristics (P1, P2; Recorder Output) p1 (Inlet pressure) / p2 (Fore-vacuum pressure) UL200 The inlet pressure p1 or the fore-vacuum pressure p2 is displayed. This assignment refers to the logarithmic recorder output of the leak detector UL200. Pressure logarithmic: U = 1 to 10 V;...
  • Page 100 LR exponent The leak rate exponent is displayed as step function: U = 1…10 V with steps of 0.5 V per decade, starting with 1 V = 1×10 -(11-E) LR=10(V-E)*10 LR log. H. LR = leak rate V = output voltage E = output voltage values rounded-up (1V, 2V, 3V, 4V, ...) Voltages between 1 V to 1.1 V, 2 V to 2.1 V, 3 V to 3.1 V etc.

  • Page 101: Pin Assignments

    Pin Assignments 9.5.1 PLC IN / AUDIO All inputs are electrically isolated by opto-couplers. +24V +24V GND 24V SPG GND AUDIO OUT GND 24V Fig. 9-2 External circuitry, e.g. PLC with external voltage supply unit. Item Description External, active loudspeaker 9-13 Technical Data...
  • Page 102 +24V +24V GND 24V SPG GND AUDIO OUT GND 24V Fig. 9-3 External circuitry, e.g. PLC with internal voltage supply unit. 9-14 Technical Data...

  • Page 103: Plc Out

    9.5.2 PLC OUT +24V n.c. Fig. 9-4 PLC OUT PIN 3 - 12: Relay contacts, max. 60 V DC / 25 V AC / 1 A PIN 13, 14: Semiconductor relays, max. 30V DC / 1 A 9-15 Technical Data...

  • Page 104: Pressure Gauge

    Input 1 GND 1 Input 2 GND 2 Fig. 9-5 Internal power supply +24 V Item Description Pressure sensors Modul1000 +24V, 0.8 A GND 24V 4 … 20 mA Input 1 GND 1 Input 2 GND 2 Fig. 9-6 External supply voltage 24V with common GND...
  • Page 105 +24V, 0.8 A 4 … 20 mA GND 24V Input 1 GND 1 Input 2 GND 2 Fig. 9-7 External sensor supply 24 V with electrically isolated installation of mass The voltage difference between pin 2 and the pins 4 and 5 is maximum ± 4 V. Connection of sensors with 0 …...
  • Page 106 +24V, 0.8 A GND 24V Input 1 GND 1 Input 2 GND 2 Fig. 9-9 Connection with separated mass arrangement The voltage difference between pin 2 and the pins 4/6 may be maximum ± 4 V. 9-18 Technical Data...

  • Page 107: Valves

    9.5.4 Valves Internal power supply +24V +24V Fig. 9-10 Connection example Item Description Valves I max < 0.2 A, maximum 8 pcs Valves I max < 1A 9-19 Technical Data...
  • Page 108 External power supply +24V +24V Fig. 9-11 Connection example Item Description Valves I max < 0.2 A, maximum 8 pcs Valves I max < 1A 9-20 Technical Data...

  • Page 109: Recorder

    9.5.5 Recorder Analog Out1 Analog Out2 Fig. 9-12 Load resistance >10k Accuracy of the analogue output: Final value: 10V: 1.2% of the final value Offset ±1% of the final value 9-21 Technical Data...

  • Page 110: Installation Diagram Of The Control Unit For Rackinstallation

    Installation diagram of the control unit for rackinstallation Fig. 9-13 Cut-out of the switch cabinet for the installation of the control unit 9-22 Technical Data...

  • Page 111: Commander Mode

    Commander mode Fig. 9-14 Flow Chart 9-23 Technical Data...

  • Page 112: Ce-Certificate

    CE-Certificate Fig. 9-15 9-24 Technical Data...

  • Page 113: Error Messages And Warnings

    Replace TMP incl. TC 600. Contact INFICON Service. Power supply output voltage of the TC 600 too low. TMP power supply unit 24 V-powOperating Manualjinb80e1-her supply unit of Modul1000 - check output defective. voltage Replace TMP incl. TC 600. After 15 minutes warm-up time, the speed of the TMP is lower than 1200 Hz.
  • Page 114 Software problem. Overflow of EEPROM parameter queue Please contact the INFICON Service! Voltage monitoring input AD24 A/B > 11.5 V. External supply voltage (24 V) External power supply on one of the 24 V outputs of the terminal connector of the too high interface board.
  • Page 115 Displayed Message Description and possible solutions Signal MVPZN on the MSV board is active. 24 V voltage on the MSV board is too low, U <18.3 V. Fuse F1 on the MSV board has burned through. 24 V voltage at MSV board is Reference voltage UREF on the MSV board XT7/1 is too high, U>5 V.
  • Page 116 Displayed Message Description and possible solutions Signal MPKZN on MSV board is active. Cathode current is too low, I < 0.2 A. Cathode current is too low! MSV board is defective. Defective ion source plug or cable. Signal MSIBE on MSV board is not active. Emission of cathode 1 cannot be switched on.
  • Page 117 Displayed Message Description and possible solutions Ambient temperature is too high. Unfavourable placement of the leak test device. (heat accumulation) Temperature of the electronic Fan failure unit is too high! (60°C) Air filter very soiled; Defective temperature sensor Temperature sensor on the wiring backplane shows that T<2 °C. Longer warm up period of the ext.
  • Page 118 Displayed Message Description and possible solutions In the most insensitive measurement range the pre-amplifier signal has exceeded 10 V for 10 s. Strong helium contamination of the high-vacuum system. W64 Pre-amplifier signal is too high. The pre-amplifier is faulty. High contamination in the mass spectrometer. TMP frequency of nominal speed dropped in sniffer mode.
  • Page 119 Displayed Message Description and possible solutions The amplifier-voltage produced by the test leak is 2 x 10E-14 A. The test leak used for the calibration is too low! W79 The test leak signal is too low. The external test leak valve is not open or defective. Internal test leak is defective.
  • Page 120 Displayed Message Description and possible solutions Missing or changed parameters in the I•STICK and new software version number were detected. Parameters are initialized in the I•STICK! Please check the A software update was performed and one or more new parameters were settings! detected.
  • Page 121 Displayed Message Description and possible solutions Time t1 > than the set evacuation time t_A. Valve V30 does not open. Residual gas evacuates too Fore pump defective slow. Wrong time setting for t_A. t_A < than the evacuation time of residual gas. Wrong setting for the evacuation pressure p_B.
  • Page 122 10-10 Error Messages and Warnings...

  • Page 123: Ordering Information

    Ordering Information Description Cat. no. Control Panel Desktop Operation 551-100 Control Panel Rack Installation 551-101 Connecting cable to control panel, 1 m 551-103 Connecting cable to control panel, 5 m 551-102 Sniffer line SL200 140 05 Remote control – RC1000WL remote control, wireless 551-015 –...
  • Page 124 11-2 Ordering Information...

  • Page 125: Index

    INDEX Fore-pump, refer to pump Control Unit Control units Cycle 6-31 Access control Accessories air filter Data • internal 6-17 Alarm delay 6-30 – view 6-16 6-30 Alarms • recorded 9-10 6-26 Analogue output Date 6-24 ASCII Declaration of contamination 6-17 Audio Alarm Type Device PIN...
  • Page 126 I•STICK Open 7-13 • interchange • Device – Tools 6-30 Info Operating fluid reservoir Interface boards 7-12 11-1 • 3-2 Ordering Information Interfaces • RS232 Parameter 6-27 • Save/Load 6-26 Language Part number Leak rate Partial flow • minimum detectable Partial Flow Mode 6-26 Leak rate filter...
  • Page 127 6-15 Remote control time axis 6-24 6-26 RS232 Protocol – Touch • Display Run-up Transient time Run-up time 6-27 • CAL Trigger Turbo-molecular Save • Refer to turbo-molecular pump 6-27 • Parameter Turbo-molecular pump Series error message • Auto Leak Test 11-3 Service Centers 6-17...
  • Page 128 INFICON GmbH, Bonner Strasse 498, D-50968 Cologne, Germany UNITED STATES TAIWAN JAPAN KOREA SINGAPORE GERMANY FRANCE UNITED KINGDOM HONG KONG Vi sit o ur we bsi t e fo r con t act i nfo rm ati on an d o t her sal es o ffice s wo rl dw id e. w w w . i n f i c o n . c o m...

This manual is also suitable for:

550-300a550-330a550-310a

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