Inficon Modul1000 Operating Manual page 20

3-2
Description of equipment
5
6
11
10
Fig. 3-2 Right side view and back view
Item Description
3 Openings for unlocking
the cover
4 Recess handles
5 Status LED
6 air filter
Fig. 3-3 Cut-out in the bottom side of Modul1000
Item Description
1 Connection for the fore-vacuum pump (screwed flange)
Item Description
9 Mains socket with main switch and
Mains fuses
10 Connection DN25 KF for
Fore-vacuum pump or sniffer line
11 Electrical interfaces
9
4
3