Inficon Modul1000 Operating Manual page 116

No. Displayed Message
E44 Cathode current is too low!
Emission for cathode 1 can not
W45
be switched on.
Emission of cathode 2 cannot
W46
be switched on.
Emission on both cathodes
E47
cannot be switched on!
Several specimens in
succession are defective!
W49
Execute reference
measurement.
No communication with turbo
E50
pump.
Turbopump frequency is too
E52
low!
Temperature of the electronic
W53
unit is too high! (55°C)
10-4
Error Messages and Warnings
Description and possible solutions
Signal MPKZN on MSV board is active. Cathode current is too low, I < 0.2 A.
MSV board is defective.
Defective ion source plug or cable.
Signal MSIBE on MSV board is not active. Emission of cathode 1 cannot be
switched on. The Module 1000 switches over to cathode 2. Order new ion source.
Cathode 1 is defective
Defective ion source plug or cable.
MSV board is defective.
Signal MSIBE on MSV board is not active. Emission for cathode 2 cannot be
switched on. The Module 1000 switches over to cathode 1. Order new ion source.
Cathode 2 is defective
Defective ion source plug or cable.
MSV board is defective.
Signal MSIBE on MSV board is not active. Emission on both cathodes cannot be
switched on! After having exchanged the ion source it must be possible to switch
on both cathodes manually via the service menu.
Both cathods are defective. Replace the ion source.
Defective ion source plug.
MSV board is defective.
Leak test device detects several defective specimens in succession.
Check the setting, for which number of pieces the error is reported.
Background signal has been increased very high.
Repeat the reference measurement.
No communication with drive electronic unit TC 600.
Fuse F10 on wiring backplane has blown.
Connector RS 485 on cross wiring backplane or electronic drive control TMH 071
nit plugged.
Electronic drive control TC 600 defective, replace TMH 071
MC 68 is defective
The speed of the turbomolecular pump TMH 071 is too low after a 5 min. starting
period.
Prepressure of TMH 071 is too high
Turbo molecular pump TMH 071 is faulty.
Electronic drive control TMH 600 is faulty.
Ambient temperature is too high.
Unfavourable placement of the leak test device. (heat accumulation)
Fan failure
Air filter very soiled;
Defective temperature sensor