Error Messages And Warnings - Inficon Modul1000 Operating Manual

10

Error Messages and Warnings

No. Displayed Message
TMP temperature control
E04
defective (E025)
TMP temperature sensor
E05
defective (E026)
E06 TMP frequency too high
TMP power supply unit
E07
defective.
E08 TMP starting time error
TMP-connection TC600 - TMP
E09
defective
TMP controller in TC 600
E10
defective
TMP wrong pump resistance
E11
characteristics
E12 TMP motor control defective
W13 TMP unknown TMP-error
Leak rate is too high! Machine
W15 was switched to Stand-by mode
to prevent HE-contamination!
Service interval of leak detector
W16
has expired!
Service interval of leak detector
has expired!
W17
Description and possible solutions
Short circuit in temperature sensor
Temperature sensor interrupted
Excess speed rate TMP
Replace TMP incl. TC 600.
Contact INFICON Service.
Power supply output voltage of the TC 600 too low.
24 V-powOperating Manualjinb80e1-her supply unit of Modul1000 - check output
voltage
Replace TMP incl. TC 600.
After 15 minutes warm-up time, the speed of the TMP is lower than 1200 Hz.
Fore-vacuum pressure too high
Vacuum system is leaking
Bearing of turbo molecular pump defective
Internal connection TC 600 to TMH 071 defective
Replace TMP incl. TC 600.
Controller of TC 600 defective
Reset the controller with stopped pump (0Hz) using the power switch „ON/OFF"
of the leak detector.
Replace TMH incl.TC 600
Controller detects wrong pump resistance characteristics
Replace TMH incl.TC 600
Contact INFICON Service
Defect in motor output stage or motor control unit
Replace TMH incl.TC 600
Contact INFICON Service
Error message from TC 600, for which there is error code specified in the software
of the leak detector.
The error code of the TC 600 converter is displayed.
The survey function „contamination" is activated. A leak rate higher than the
adjusted value was detected.
Gross leak.
Switch off limit is set too low
Alarm delay time too short
Service interval of the leak test device has expired.
Carry out and acknowledge the service for the leak test device.
The service interval for the turbo molecular pump has expired! Period since the
service > 2 years
Replace the lubricant reservoir of the turbo molecular pump and acknowledge.
Error Messages and Warnings
10-1