Partial Flow Mode - Inficon Modul1000 Operating Manual

5.2

Partial Flow Mode

To increase the effective pumping speed on the vacuum chamber or the test sample,
an external partial flow valve can be connected to the valve output V20. The
increased pumping speed accelerates the evacuation processes and the signal
response time of the Modul1000.
Depending on the settings, the partial flow pump can optionally be added via an
external partial flow valve only for evacuation or for evacuation during the measure-
ment.
If the partial flow pump is also added during the measurement, the pumping speed
of the partial flow pump for helium has to be considered. In this case, adjust the
machine factor as required (refer to chapter 6.9). Furthermore, an external calibration
is recommended (refer to chapter 6.6).
For fast venting of the device, the connection of an additional external vent valve V21
will be possible.
Fig. 5-1 Partial flow mode
Item Description
V20 Partial flow valve
Item Description
V21 Ventilating valve
Working Modes
5-2