Description Of The Maintenance Work - Inficon Modul1000 Operating Manual

2-years Maintenance Operating
fluid reservoir TMH 071
7.5

Description of the maintenance work

The certificate of the internal helium standard leak is valid for one year after
Notice:
delivery. The annual refurbishing of the internal Helium standard leak is
recommended and an other certificate will be delivered. In the procedure,
all functions of the internal helium standard leak are checked and a new
certificate is released for the next year.
Work to be performed
Clean the valve drives, replace
the valve seals and the valve caps
(5000 hours)
Check/replace vent filters (5000/
15000 h)
Clean the valve block completely
(15000 h)
Recalibrate the internal test leak
(recommended yearly)
Inspection and recalibration of
Pirani sensors (15000 h)
The 2-years-maintenance of the operating fluid reservoir of the turbo-molecular
pump TMH 071 should be performed by a INFICON service technician or by a person
authorized by INFICON. Customers who have received pertinent instructions from
an authorized person can perform maintenance at their own responsibility.
The operating fluid reservoir of the turbo-molecular pump TMH 071 must be replaced
after 2 years, regardless of the operating hours achieved. Please follow the instruc-
tions in 7.6 when replacing the operating fluid reservoir.
Work to be performed
Replace the operating fluid reser-
voir TMH 071
Only trained specialist staff may modify the Modul1000 in a way that exceeds the
standard scope of maintenance.
For maintenance works described in this chapter it will not be required to remove the
cover of the device. However the replacement of fuses requires the device to be
opened. To exclude possible danger in this case, follow the described procedure:
Required materials
• Set of seals for valves
• Spare filter for venting and
purge line
• Sealing set of detection
system complete
Required materials
• Operating fluid reservoir for
TMH 071
Maintenance tasks
P/N
200000594
200000683
200002002
P/N
200000577
7-5