Design Of A Leak Detector System - Inficon Modul1000 Operating Manual

5.4.1

Design of a leak detector system

5-5
Working Modes
Design of a leak detector system with Modul1000- - -Commander function is mainly
the same as that of the conventional integrated leak test system.
The vacuum chamber is evacuated by the Modul1000, optionally also in partial flow
mode (Fig. 5-1 Partial flow
connected to the helium filling station through the chamber walls and is filled with
helium after the chamber has been evacuated.
Due to the difference between the helium pressure in the test sample and the
vacuum in the vacuum chamber, the helium of a leaky part flows out of the leak into
the vacuum chamber and into the leak test device where it can be measured as gas
leak.
Fig. 5-2 Leak detector system
Item Description
V30 Valve evacuation (test sample)
V31 Flood valve (test sample)
V32 Valve for helium recovery
V33 Filling valve (test sample)
Emergency valve (de-energized
V34
open)
mode). The test sample in the vacuum chamber is
Item Description
1 Vacuum chamber
2 Test sample
3 Pressure gauge
4 Vacuum valve (test sample)
5 Fore-pump (Modul1000)