Inficon Modul1000 Operating Manual page 76

1500 hours -Maintenance
5000 hours -Maintenance
7-4
Maintenance tasks
The 1500 hours maintenance can be performed by an operator or a maintenance
person. The maintenance intervals can be adapted to the ambient conditions of the
device and are variable.
If desired, the maintenance interval can be switched off.
Within the 1500-hours maintenance, the filter inserts in the chassis cover have to be
inspected and if contaminated, replace them. The filter inserts can be replaced on
the running device without the need to open it.
For replacement refer to
Fig. 7-1 Remove the filters form the chassis housing.
Item Description
1 Filter insert
Work to be performed
Check/replace air filters
The 5000 hours maintenance should be performed by an INFICON service
technician or an other person authorized by INFICON.
The valve drives have to be inspected and cleaned every 5000 operating hours and
the valve seals or the valve caps have to be replaced. The flood filter needs to be
inspected after 5000 hours depending on the application, however it will be neces-
sary to replace it after 15000 operating hours.
After 15000 operating hours, a complete cleaning of the valve block will be required.
This requires the disassembly of the valve block.
Fig. 7-1.
Item Description
2 Chassis Modul1000
Required materials
• Spare Filter Cell for the fans
P/N
200001552