Calibration In Vacuum Mode - Inficon Modul1000 Operating Manual

6.6.1

Calibration in Vacuum mode

Internal Calibration
6-9
Operation
The Modul1000 can be calibrated in two different ways: For each calibration, cali-
brate the mass spectrometer to achieve maximum sensitivity (Autotune).
Depending on the applied test leak, internal or external calibration is required.
No matter, which control location is used, the calibration can be started in the follow-
ing ways:
Internal manual
Internal automatic
External manual
External automatic
For the internal calibration, the test leak integrated in Modul1000 is used.
For the external calibration, a separate test leak is required. External calibrations
have the advantage that they can be carried out under boundary conditions (pres-
sure, measuring time) similar or equal to the later measurements.
If a control unit is connected to the Modul1000, the LEDs in the buttons START,
STOP / VENT and ZERO light up during the calibration.
To get an optimized calibration the machine has to warm up for at least 20
Notice:
minutes before use.
If a partial flow pump is used in measuring mode, set the correct machine factor
before the 1st calibration.
The internal calibration is not done in partial flow mode, not even if it is set to „Partial
flow in measuring mode". It will be corrected via the set machine factor.
Automatic Internal Calibration
After starting the calibration, the whole calibration procedure runs automatically.
In this case, the signal transient time of the test leak (CAL-transient time) is used
which can be set in the menu. Before, it must be adjusted to the volume at the inlet.
The CAL-transient time increases depending on the volume enclosed at the inlet.
Manual Internal Calibration
After starting the Calibration, the Modul1000 opens the internal test leak and evacu-
ates the inlet. The signal transient time stretches depending on the connected
volume stretches.
Therefore the user has to confirm that the signal has become constant.
Set control location
LOCAL, RS232 ASCII
LOCAL, RS232 ASCII, RS232 BINARY, PLC
LOCAL, RS232 ASCII, RS232 BINARY, PLC
LOCAL, RS232 ASCII