Safety Guide .................................................................................................................................................................1
Handling Precautions....................................................................................................................................................8
Names of Parts ...........................................................................................................................................................12
1.
Checking the Product..........................................................................................................................................16
1.1
Components ................................................................................................................................................16
1.2
1.3
How to Read Model Nameplate ..................................................................................................................17
1.4
How to Read Model Number .......................................................................................................................17
2.
Specification........................................................................................................................................................18
3.
Life.......................................................................................................................................................................33
3.1
3.2
4.
4.1
Installation Environment ..............................................................................................................................35
4.2
5.
Installation ...........................................................................................................................................................36
5.1
Installation ...................................................................................................................................................36
5.2
Notes on Installation ....................................................................................................................................37
5.3
Installing the Main Body ..............................................................................................................................38
5.3.1
5.3.2
5.4
5.5
5.6
Clamp Screws .............................................................................................................................................42
5.7
Cleanroom Specification .............................................................................................................................43
5.7.1
Recommended Suction Rate................................................................................................................. 43
5.7.2
Suction Joint ..........................................................................................................................................43
6.
Connection with Controllers ................................................................................................................................44
6.1
Wiring ..........................................................................................................................................................44
7.
Options................................................................................................................................................................48
7.1
Brake ...........................................................................................................................................................48
7.2
Reversed Home Specification .....................................................................................................................48
7.3
7.4
Slider Roller Specification ...........................................................................................................................48
7.5
8.
Motor/Encoder Cable ..........................................................................................................................................49
8.1
PMEC/PSEP Controller Cables...................................................................................................................49
8.2
PCON/PSEL Controller Cables ...................................................................................................................50
Table of Contents
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