7. SPECIAL ADJUSTMENT FUNCTIONS
(2) Requirements conditions of SEMI-F47 standard
Table 7.2 shows the permissible time of instantaneous power failure for instantaneous power failure of
SEMI-F47 standard.
Table 7.2 Requirements conditions of SEMI-F47 standard
Instantaneous power
failure voltage
Rated voltage × 80%
Rated voltage × 70%
Rated voltage × 50%
Permissible time of
instantaneous power
failure [s]
1
0.5
0.2
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