5
General Maintenance
Table 26
Item number
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
144
Parts list for the standard or inert EI ion source
Item description
Source body
Drawout cylinder
Drawout plate
4-turn filament
Spring washer
Lens insulator
Entrance lens
Ion focus lens
Repeller insulator
Repeller
Belleville spring washer
Flat washer
Repeller nut
Source heater block
Repeller block insert
(Figure
24) (continued)
5977 Series MSD Operation Manual