6
CI Maintenance
Figure 29
Disassembling the CI ion source
Table 29
Item number
1
2
3
4
5
6
7
160
Parts list for the CI ion source
Item description
Setscrew
Filament screw
CI interface tip seal
CI repeller insulator
CI lens insulator
CI drawout cylinder
CI drawout plate
(Figure
29)
5977 Series MSD Operation Manual