Table 24
Item number
8
9
10
11
12
13
14
15
16
17
18
5977 Series MSD Operation Manual
Parts list for the standard or inert EI ion source
Item description
Spring washer
Lens insulator
Entrance lens
Ion focus lens
Repeller insulator
Repeller
Flat washer
Belleville spring washer
Repeller nut
Source heater block assembly
Repeller block insert
General Maintenance
(Figure
21) (continued)
5
133