6
CI Maintenance
Table 30
Item number
7
8
9
10
11
12
13
14
15
166
Parts list for the CI ion source
Item description
CI drawout plate
CI ion source heater block assembly
Entrance lens
CI ion source body
CI ion focus lens
CI repeller
CI filament
Dummy filament
Tool box
(Figure
31) (continued)
5977 Series MSD Operation Manual