Agilent Technologies G7035A Operation Manual page 118

4
Operating in Chemical Ionization (CI) Mode
Table 20
MFC
(%)
10
15
20
25
30
35
40
Familiarize yourself with the measurements on your system under operating
conditions and watch for changes that may indicate a vacuum or gas flow
problem. Measurements will vary by as much as 30% from one MSD and gauge
controller to the next.
118
Mass flow controller settings and typical pressure readings
Methane
EI/PCI/NCI MSD
(Turbo pump)
10
–5
×
5.5
10
–5
×
8.0
10
–4
×
1.0
10
–4
×
1.2
1
–4
×
1.5
10 –4
×
2.0
10 –4
×
2.5
Pressure (Torr)
Ammonia
EI/PCI/NCI MSD
(Turbo pump)
5.0
7.0
8.5
1.0
1.2
1.5
2.0
5977 Series MSD Operation Manual
–5
×
10
–5
×
10
–5
×
10
–4
×
10
–4
×
10
–4
×
10
–4
×
10