5
General Maintenance
Table 25
Item number
7
8
9
10
11
12
13
14
15
16
17
136
Parts list for extractor ion source
Item description
Spring washer
Lens insulator
Entrance lens
Ion focus lens
Repeller insulator
Repeller
Flat washer
Belleville spring washer
Repeller nut
Source heater block assembly
Insulator
(Figure
22) (continued)
5977 Series MSD Operation Manual