Table of Contents
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Brooks Automation
Part Number: 628651 Rev.
A
Table 2-22: Replacing the Controller Harness or Slave Controller
Step
Remove the foam side cover from J5, the foam end cover from J4, and the J5 cover plate
1.
2.
Copyright © 2024, Brooks Automation
Replacing the J4 to J5 or J5 to J6 Controller Harness, J5 or J6 slave controller in the
Action
2. Service Procedures
PFDD6
48
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