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Brooks Automation
Part Number: 628651 Rev. A
Step
For the PFDD6, simply remove the J4 foam end cover and unplug the J4 end of the clockspring
5.
harness from the J4 slave amp (GSBP).
Remove the air hose clamp plate and thru hole bushing and pull the air hose up through J3.
6.
7.
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Replacing the J3 Clock Spring Harness to the J4 Motor
Action
2. Service Procedures
44
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