Related Manuals for Brooks ATM 100
Summary of Contents for Brooks ATM 100
- Page 1 (217) 352-9330 | Click HERE Find the Brooks / PRI Automation ABM-407B-1-S-CE-S293 at our website:...
- Page 2 Brooks Automation Atmospheric Single-Arm Robot User’s Manual for the Atmospheric Top Mount ATM 100, 200, 300, 400, 500 the Atmospheric Bottom Mount ABM 100, 200, 400, 500 and the Flat Panel Display FPD 400, 500, 700 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
- Page 3 If you have any questions or comments about this manual, please complete the Reader’s Comment Form pro- vided at the back of this manual and return it to the Technical Publications Dept. at Brooks Automation. AcuLigner, AcuLine, AcuTran, AcuTrav, AquaTran, Atmospheric Dual Arm Controller, Atmospheric Express,...
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Page 4: Table Of Contents
Seismic Specifications ..........1-15 Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... - Page 5 Material Safety Information ..........2-30 Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ...
- Page 6 Wafer Pre-Aligner ..........4-3 Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ...
- Page 7 Testing the Flipper ..........6-19 Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ...
- Page 8 Required Parts and Tools .........9-11 Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ...
- Page 9 Common Problems ...........10-11 Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ...
- Page 10 Aftermath Analysis ...........10-29 Contact Brooks Automation Technical Support ......10-31 Appendices Appendix A: Factory Default Settings .
- Page 11 Contents Atmospheric Single-Arm Robot User’s Manual This Page Intentionally Left Blank Brooks Automation viii Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 12: Figures
Hole in Nut Holder ..........9-8 Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... - Page 13 TTR-200 Teach Pendant DB68 ........12-4 Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ...
- Page 14 Information in a 16-bit Status Word for Command RNCS ... .10-18 10-9 Bit Comparison Between 6.0+ Firmware and Earlier Versions..10-20 Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
- Page 15 11-2 Hana Laser Sensor Model Numbers and Options ....11-4 Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 16: Changes
Overview Changes may be made to this manual to ensure that it will continue to provide the most complete documentation possible for the Brooks Automation Atmospheric Sin- gle-Arm Robot. This section provides a brief description of each change. This manual is not a controlled copy. Updates to this manual may be made as Tech- nical Support Bulletins or as a new revision. - Page 17 Changes Atmospheric Single-Arm Robot User’s Manual This Page Intentionally Left Blank Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 18: Introduction
User’s Manual Introduction Overview This Introduction provides a brief overview of Brooks Automation Atmospheric Sin- gle-Arm Robot, highlighting its features, subsystems, operation, and specifications. Additionally, the chapter organization and a description of each chapter’s contents is presented, and notation conventions are explained. -
Page 19: Atmospheric Single-Arm Robot Overview
Figure 1-1: Atmospheric Single-Arm Robots Brooks Automation robots handle wafers from 75 mm (3 in) to 300 mm (12 in) in size. The robots vary in size. The smallest robots handle loads of up to five pounds, mov- ing vertically about 7 in. - Page 20 DBM can be used in a fixed position or bottom mounted on a track system. Options include a laser scanner, but not a flipper or integrated pre-aligner. Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 21: Robot Accessories
A dual end effector has two surfaces for lifting wafers. The ends are directly opposite each other. Brooks Automation does not sell dual end effectors, but does provide the software for operating them. Each end effector is defined by a number and each taught station is assigned an end-effector number. -
Page 22: Robot Systems
Options include a pre-aligner, an optical scanner (or mapper), and a linear track. A cassette tilter is an option in an Integrated Front-End System. Details on these compo- nents are given in other Brooks Automation manuals; this section gives only a brief overview. - Page 23 The Galil motion control boad controls the track as a single axis. Figure 1-5: Robot Mounted to the Linear Track Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 24: User Interfaces
Brooks Automation Terminal Emulation (EQT) Brooks Automation Terminal Emulation (EQT) is a user interface for commu- nicating with the ESC through your host computer or an external PC. EQT32 runs on Windows 95 and Windows NT. You can communicate from your PC with the ESC in three modes: Terminal Mode: This is real-time, two-way communication. -
Page 25: Configuration
Robot is determined by the user and is based on the Figure 1-7: Teach Pendant Basic Configuration needed and the System Integra- tion Level required. Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... - Page 26 ABM-405 with one vaccuum line plus mapper and flipper. CE Mark ATM-XXX-xx-CE Wet Process ATM-XXX-xx-WET Available with 7" or 10" Z travel Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 27: About This Manual
Be sure you are using the axis assignments and parameter files intended for your level of firmware. The robot is one component in a robotic system, which includes a Brooks Automation Smart Controller (ESC) and any of the following optional items: Pre-aligner, laser scanner, or track. -
Page 28: Note, Hazards, Andpictograms
A DANGER indicates an imminently hazardous situation which, if not avoided, will result in serious injury or death. DANGER Figure 1-8: Note, Caution, Warning, and Danger Brooks Automation 1-11 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 29: Specifications
Introduction Atmospheric Single-Arm Robot Specifications User’s Manual Specifications The Brooks Automation Atmospheric Single-Arm Robot is a high reliability product. The specifications for the product and its subsystems are detailed below. Robot Specifications Repeatability: 3 sigma repeatability at +/- 25 microns... -
Page 30: Center Of Gravity
X, Y, and Z axes. Weight tolerance is 5% and distance tolerance is 10 %. Table 1-2: Center of Gravity Dimensions Model Arm Length Weight Distance ATM 100 5 inches 27 pounds 9.25 inches ATM 200 5 inches 29 pounds 10.50 inches... -
Page 31: Electrical Specifications
Top mount robots typically mount through a hole in a base plate in the host equip- ment. This hole should be 0.5 in (12.5 mm) larger than the robot body diameter. Four user-supplied #1/4-20UNC or M6 cap screws secure the robot to the base plate. The Brooks Automation 1-14 Revision 1... -
Page 32: Vacuum Specifications
The recommended vacuum source is 25-in. Hg at > 1 SCFM freeflow. Seismic Specifications The robot should be bolted firmly into the system where it is being used. Brooks Automation 1-15 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... - Page 33 Introduction Atmospheric Single-Arm Robot Specifications User’s Manual This Page Intentionally Left Blank Brooks Automation 1-16 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 34: Safety
User’s Manual Safety Overview This chapter describes safety guidelines for the Brooks Automation Atmospheric Sin- gle-Arm Robot. All personnel involved in the operation or maintenance of the Atmo- spheric Single-Arm Robot should be familiar with the safety precautions outlined in this chapter. -
Page 35: Regulatory Compliance
Laser safety requirements applicable on its date of manufacture. The robot is intended to be integrated into an end-user system. If the robot is used in a manner not specified by Brooks Automation, the protection provided by the robot assembly is compromised. Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... -
Page 36: Safety Considerations
Safety Considerations Safety Considerations Brooks Automation performs safety assessments for each product manufactured by Brooks. The safety issues generated during these assessments are discussed in this manual. The complete Safety Analysis is available by request. WARNING Only qualified personnel are permitted to transport, assemble, oper- ate, or maintain the Atmospheric Single-Arm Robot. -
Page 37: Equipment Safety Guidelines
Ensure that the product receives proper air flow for cooling. • Do not remove any Warning, Hazard, or Equipment Identification labels. • Turn OFF power before inserting or removing power cables. Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... - Page 38 Whenever power is applied, the possibility of automatic movement of the components within the Atmospheric Single-Arm Robot exists, which could result in personal injury. Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 39: Robot Safeguards
For the safety of the operating personnel, Brooks Automation requires that robotic systems are enclosed behind safety doors and interlocks. In addition, the safety train- ing of personnel required by ANSI/RIA R15.06 should be followed. -
Page 40: Emergency Stop (Ems/Moff)
Brooks Automation does not provide a robot stop on the system, but a TTR-200 Teach Pendant has an EMER- GENCY STOP button. - Page 41 Pin 24 (+24/+5 Vdc) Interlock Power Power Safety Interlock Pin 67 (-return) Cut-off Circuit SCSI 68 Figure 2-2: Emergency Stop Circuit and Interconnect Diagram Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 42: Emc And Esd Protection
A third party has tested the product to ensure electromagnetic compatibility for both emissions and immunity. The product complies with the EMC Directive. For protection against Electromagnetic Interference (EMI), it is strongly recom- mended that you place the Brooks Automation Smart Controller (ESC) as close to the root as possible. ESD/EMI Precautions Protection against electrostatic discharge (ESD) is designed into the robot. -
Page 43: Safety Labels
The laser scanner should not be serviced in the field. Customers who remove the laser scanners from the robot should not attempt to troubleshoot or repair them. Instead, return them to Brooks Automation for service. Brooks Automation 2-10 Revision 1... -
Page 44: High Voltage Label
The fuse safety label is attached adjacent to the power supply input on the con- troller. Caution - Risk of Fire Replace with R5A 250V Fuse Brooks Automation 2-11 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 45: Underwriter Lab Label
The controller manufacturing label lists the power rating. It is located adjacent to the power supply input on the controller. The robot manufacturing label is located on the left front of the robot. Brooks Automation 2-12 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 46: Semi S2 Systems
To restore automatic operation, the user must exit the restricted envelope, restore the safeguards required for automatic operation, and initiate a deliberate start-up proce- dure. Brooks Automation 2-13 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 47: Safety Interlocks
For more details, refer to . To custom configure other than the default settings, contact your Brooks Automation representative. Brooks Automation 2-14 Revision 1 Artisan Technology Group - Quality Instrumentation ... -
Page 48: Mechanical Hazards
Mechanical Hazards Mechanical Hazards The Brooks Automation Atmospheric Single-Arm Robot is a complex electromechan- ical device. Only persons with the proper training should service or operate the product. All facilities to the product must be disconnected as outlined in the facilities’ lockout/ tagout procedure before servicing, or injury may result from the automatic operation of the equipment. - Page 49 Trip hazard exists if the facilities connections (power and communications cables, gas and vacuum lines) for the Atmospheric Single-Arm Robot are not routed to ensure they don’t cause a safety hazard. Brooks Automation 2-16 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 50: Electrical Hazards
Brooks Automation recommends that you use a Lockout/Tagout method to prevent anyone from reconnecting power without assistance from service personnel. The robotic system is not intended to be a stand-alone unit. Brooks Automation rec- ommends that the robot be installed only in a host system with lockout/tagout provi- sions. -
Page 51: Electrical Hazard Classifications
Perform Tagout procedure above, but also disconnect AC to the End Tool and lockout per local Lockout procedures. Electrical Hazard Classifications The following table describes the four types of electrical hazard classifications as per SEMI S2-0200. Brooks Automation has designed the product to require minimum Brooks Automation 2-18 Revision 1... - Page 52 Potential exposures are greater than 30 volts RMS, 42.4 volts peak, 60 volts DC, or 240 volt-amps in dry locations. Brooks Automation 2-19 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 53: Laser Hazards
User’s Manual Laser Hazards Brooks Automation robots with or without laser scanners are sold solely as a compo- nent intended for incorporation into another product. The laser scanner is used to detect the presence of wafers and whether or not they are cross-slotted. -
Page 54: Gas Hazards
Whenever any compressed gas is used during service of the product, the facilities’ standard precautions for use of that gas must be employed. Brooks Automation 2-21 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 55: Chemical Hazards
Chemical Hazards User’s Manual Chemical Hazards The Brooks Automation Atmospheric Single-Arm Robot does not make use of any hazardous chemicals. However, it may be recommended that Isopropyl alcohol be used for cleaning sections of the product during routine maintenance procedures. -
Page 56: Thermal Hazards
WARNING Allow the system chamber and robot to completely cool before per- forming maintenance involving volatile chemicals. Brooks Automation 2-23 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 57: Vacuum Hazards
Atmospheric Single-Arm Robot Vacuum Hazards User’s Manual Vacuum Hazards The Brooks Automation Atmospheric Single-Arm Robot uses vacuum to hold the wafer on the end effector. WARNING Whenever any vacuum pump exhaust is vented, the facilities’ envi- ronmental procedures must be followed regarding the venting of gases. -
Page 58: Fire And Explosion Hazards
Fire and Explosion Hazards Fire and Explosion Hazards The Brooks Automation Atmospheric Single-Arm Robot provides no direct fire or explosion hazard. However, the use of Isopropyl alcohol or other flammable solvents around the product while power is applied does present the possibility of fire or explosion. -
Page 59: Environmental Hazards
Environmental Hazards User’s Manual Environmental Hazards Noise The Brooks Automation Atmospheric Single-Arm Robot provides no direct noise haz- ard. . Vibration The Brooks Automation Atmospheric Single-Arm Robot provides no direct vibration hazard. Any vibrations produced are minimal and cause no hazardous conditions. -
Page 60: Teach Pendant
Using the Dead-Man Switch OEM Systems recommends that there is only one control of robot movement at any given time. When you use the TTR 200, commands that initiate robot movement work Brooks Automation 2-27 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... - Page 61 Teach Pendant connections. When the Teach Pendant is in Teach mode, only the teacher is allowed in the restricted envelope and has sole control of any hazardous movement. Brooks Automation 2-28 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 62: Matrix Of Emergency And Corrective Response Actions
Gas Leak Turn off and disconnect gas from the Atmo- spheric Single-Arm Robot Brooks Automation 2-29 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 63: Material Safety Information
The following material safety information is provided as a guideline for proper con- duct when working with hazardous materials and corrective action if exposed to them. Brooks recommends that MSDS sheets for these materials be obtained from the materials’ supplier. -
Page 64: Isopropyl Alcohol Safety Information
15 minutes. • In case of contact with skin, wash skin with soap and water. Remove and isolate clothing and shoes at the site. Brooks Automation 2-31 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 65: Msdss For C Grease
Thermal decomposition or combustion may produce carbon monoxide and/or carbon dioxide. Hazardous May occur Conditions to Polymerization Avoid: None Will not occur Section VI Health Hazard Data Brooks Automation 2-32 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... - Page 66 Rubber Other Protective Clothing or Equipment Launder contaminated clothing before reuse. Work/Hygienic Practices After working, wash hands well with soap and water. Brooks Automation 2-33 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 67: Msds For Lg 2 Grease
Remove victim to fresh air and provide oxygen if breathing is difficult. Get medical attention. Ingestion: Get medical attention. Section 6 Supplemental Information None identified. Brooks Automation 2-34 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... - Page 68 Launder contaminated clothing before using. Discard leather goods if they cannot be decontami- nated. Wash before eating or smoking. Observe good personal hygiene. Brooks Automation 2-35 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 69: Msds For Braycote 803
Ingestion: This product may cause gastrointestinal distress with symptoms of nausea, vomiting, diarrhea, and abdominal pain. Inhalation: Inhalation of decomposition products (occurs if heated >300°C) or of smoke from Brooks Automation 2-36 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... - Page 70 RCRA definitions of hazardous waste. Under RCRA it is the generator's responsibility to determine the status of the waste at the time of its disposal. General Disposal Considerations: All recovered material should be packaged, transported and disposed Brooks Automation 2-37 Revision 1...
- Page 71 It is the User's responsibility to assure the proper use and disposal of these materials as well as the safety and health of all personnel who may work with or otherwise come in contact with these materials Brooks Automation 2-38 Revision 1...
- Page 72 Alignment and Calibration..........3-24 Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ...
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Page 73: Site Requirements
CAUTION All drawings within this manual are generic and may not reflect spe- cific builds of the Atmospheric Single-Arm Robot. To obtain a com- plete and current set of drawings and documents contact Brooks Automation Customer Support. Environmental The site for the Atmospheric Single-Arm Robot must meet the minimum environmen- tal requirements specified in Chapter 1 to ensure proper operation of the product. - Page 74 Robot and the facilities’ power source, ensuring it complies with the correct electric codes. Service to the product should have the appropriate fuse or circuit breaker rating. Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 75: Unpacking And Inspection
Inspect and verify the contents of the crate against the QR. Do not remove any protective wrapping. Remove the cover of the shipping crate for the Brooks Automation Smart Con- troller. Inspect and verify the contents of the crate against the QR. Do not... - Page 76 NOTE: Save the shipping crate for possible future use. If the product is returned to Brooks for service or shipped to another location, the original shipping crate must be used. Remove cables, floppy disk, and manuals from the shipping box.
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Page 77: Installation Procedure
Mounting The robotic system is not intended for stand-alone use. The host tool provides power and instructions to the robot system. Brooks Automation recommends that you locate the operating controls outside the restricted envelope and protect it against inadvert- ent operation. -
Page 78: Moving The Robot Or Robotic System
The smallest robot weighs about 35 pounds (15.88 kg) and the largest robot weighs about 85 pounds (38.56 kg). To lift a robot or a robot mounted on a track or frame, Brooks Automation recommends using the following lifting rings or a comparable load-rated substitute: •... -
Page 79: Attaching The Robot To The Frame
You can use standard mounting hardware to attach the robot to a host system frame. If you purchased your frame from Brooks Automation, all hardware, mounting, and leveling brackets are included. If you provide your own frame, be sure to include lev- eling brackets to level the robot. - Page 80 Installation Procedure Because of manufacturing tolerances, the end effector might have a different angle with respect to gravity at each station. Brooks Automation recommends that each sta- tion is independently adjustable for roll and pitch. Use the following procedure to level the robot, the arm links, and the end effector.
- Page 81 Level all other stations to make sure the end effector, cassette platforms, and stations are level. That is, the end effector must be parallel to the wafers at each station. Brooks Automation 3-10 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 82: Connecting The Robot And Controller
Connecting the Robot and Controller Connecting the Robot and Controller Brooks Automation provides an RS-232C connection for host control. The system host transmits ASCII commands to the controller through a DB25 male connector. The RS- 232 serial port is located on the CPU card at the back of the controller box. -
Page 83: Overcurrent Protection
Connect Interlock or I/O cables to the DB37 connector. Ensure that the signals are in normal running states. For more information on I/O, refer to the Smart Controller Hardware and Software User’s Manual. Brooks Automation 3-12 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 84: Facilities Connections
EMO system. Vacuum Connect the vacuum line from the system that the robot is mounted in to the Atmo- spheric Single-Arm Robot. Brooks Automation 3-13 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 85: Communication Connections
Never connect or disconnect the communications lines with power applied to the product as damage to internal components may result. NOTE: Alterations or changes to the software should only be made by qualified Brooks Automation personnel. Brooks Automation recommends that each operator control station that can initiate robot motion, has a readily accessible EMERGENCY STOP or EMO device. -
Page 86: Connecting The Teach Pendant
TTR 200 DB15 connector to an RJ12 connector. To avoid potential ESD and EMI problems, Brooks Automation provides a shielded cable for both the TTR-100 and the SEMI S2 compliant TTR-200. If you are using a TTR 100 and do not have the shielded cable, skip Steps 1 to 3 in the following instructions. -
Page 87: Installing The Eqt 32 Interface
To execute EQT 32, click the EQT icon. The Terminal Mode Window is dis- played. Brooks Automation 3-16 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... - Page 88 A status message or code of 1000 or 1008 indicates all devices are working. Refer to the Troubleshooting chapter for more information on EQT 32 displays of command responses. Brooks Automation 3-17 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 89: Setup
Amplifier board under power. 0 indicates amplifier power supply ok. 1 indicates amplifier board is not receiving enough voltage from the linear power supply. INPUT 12 Motor power supply indicator. Brooks Automation 3-18 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 90: Adjusting The Vacuum Sensor
• A red LED light indicates an error, such as servo motors are off, I/O board is not ready, or there is a system error. Brooks Automation 3-19 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 91: Safety Verification
Activate the safety interlock by opening a panel or door, or by triggering a presence-sensing device. Manually push the robot. If the robot can move freely, the safety interlock is functional. Brooks Automation 3-20 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 92: Teaching And Operating
Brooks Automation recommends training for anyone who programs, teaches, oper- ates, maintains, or repairs a robot or robotic system. Brooks Automation offers end- user training courses that provide proper safety training to people responsible for the safe programming, operation, or maintenance of the robot. - Page 93 (a to z) might be stands. For a cassette station, you need to teach only the first wafer slot. The controller will use the pitch for each station to determine the distance between slots in the cassette. Brooks Automation 3-22 Revision 1...
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Page 94: Check-Out
Robot has been properly installed and is ready for alignment. CAUTION Do not attempt to operate the Atmospheric Single-Arm Robot until all setup procedures described in this chapter have been completed. Brooks Automation 3-23 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 95: Alignment And Calibration
User’s Manual Alignment and Calibration The Brooks Automation Atmospheric Single-Arm Robot must be aligned with the system that it will be operating in. Note that even a small misalignment can interfere with proper product operation and may cause wafer breakage. - Page 96 User’s Manual Subsystems Overview This chapter provides a review of all major subsystems within the Brooks Automation Atmospheric Single-Arm Robot. Chapter Contents System Overview ............4-2 Smart Controller.
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Page 97: System Overview
1 0 0 / 1 2 0 / 2 2 0 / 2 4 0 V A C Figure 4-1: Atmospheric System Overview Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 98: Smart Controller
Sensing capabilities automatically align to the major flat or notch. Direct encoder feedback on the wafer chuck and a linear light source provide optimum illumination of the charged couple device (CCD) sensor. For more information about the Brooks Automation Atmospheric Pre-Aligner refer to the Brooks Automation Atmospheric Pre-aligner User’s Manual. -
Page 99: User Interfaces
For more information about the user interface refer to the Smart Controller Hardware and Software User’s Manual. Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 100: Robot Accessories
This is compared to the expected position of each slot to generate a wafer map. Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... - Page 101 Subsystems Atmospheric Single-Arm Robot Robot Accessories User’s Manual This Page Intentionally Left Blank Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
- Page 102 Atmospheric Single-Arm Robot User’s Manual Operational Interfaces Overview This chapter provides a description of all the operational interfaces to the Brooks Automation Atmospheric Single-Arm Robot. These interfaces provide communica- tions and power to the product from the controller. Chapter Contents Interface Overview .
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Page 103: Interface Overview
PC bus and the linear power supply provides power to the amplifier modules. Figure 5-1 shows the typical connections for a typical system using the Atmospheric Single-Arm Robot. Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... - Page 104 1 0 0 / 1 2 0 / 2 2 0 / 2 4 0 V A C Figure 5-1: Typical Robot Connections Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 105: Power Connections
Replace with T5A 250V Fuse Only Ground Connections As a safety precaution, visually inspect all green and yellow safety ground wires to ensure they are securely in place. Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 106: Robot Cables
Figure 5-3. Figure 5-3: Folded Cable Tie-Wrapped Press the gathered cable against the metal robot chassis. Pack the cable tightly against the chassis. Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... - Page 107 Operational Interfaces Atmospheric Single-Arm Robot Interface Overview User’s Manual This Page Intentionally Left Blank Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 108: Operation
Atmospheric Single-Arm Robot User’s Manual Operation Overview This chapter provides complete operation directions for the Brooks Automation Atmospheric Single-Arm Robot. The operation of the product is covered for both nor- mal conditions and emergency conditions. Chapter Contents Theory of Operation ...........6-2 Moving and Homing a Robot Axis . -
Page 109: Theory Of Operation
Theory of Operation This chapter is intended to give users of these systems general information on how the Brooks Automation Atmospheric Single-Arm Robot operates. It is not intended to be a complete reference for someone developing the associated software and hardware necessary for Atmospheric Single-Arm Robot operation. -
Page 110: Moving And Homing A Robot Axis
The robot axis then moves to the Customized home position, which is also defined in the Robot Parameter File. The default for the customized home position is 0, but you can re-define it. Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 111: Teaching Stations
100, the offset is 35, and the stroke is 75, then the upper Z- travel limit is 135 (taught position + offset) and the lower Z-travel limit is 60 (taught position + offset - stroke). Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 112: Setting The Optional Z-Axis Brake
Re-send the command: OUTP 4,1 The brake should remain off. You can now move the Z column manually. Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 113: Teaching A Robot Only
Manually place a wafer on Station C. • Get the wafer from Station C. • Put the wafer in slot 1 of Station A. Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 114: Teaching A Robot And Pre-Aligner
Manually orient the robot arm to the first slot in the cassette while raising or lowering the Z axis with the Z-axis control button. Manually adjust the R axis Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... - Page 115 With the aligned wafer still on the end-effector, manually move the robot arm out of the cassette. Turn on the servo motors for the T and R axes. Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 116: Scanner Mapping
Scanner Mapping For 6.0+ firmware, if Scanner support is not enabled on your system, scanner com- mands will return a ? prompt. If this happens, contact your Brooks Automation rep- resentative for information on enabling features. The mapping operation consists of several steps. You run the MAP macro (MAP <sta- tion name>) by issuing the command from Terminal mode on the Teach Pendant,... - Page 117 100011111221111100011221 The first digit represents slot 1 and slot 1 has a wafer. The second digit is slot 2, and slot 2 has no wafer, and so on. Brooks Automation 6-10 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 118: Teaching The Scanner Mapping
Access Terminal Mode on the Teach Pendant. Check the system status by running the STAT command. Verify that STAT returns an OK indication. A normal return is 1000 or 1008. Brooks Automation 6-11 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... - Page 119 CALIBRATE? Y/N”. Press Y. The robot will run the TSCN macro and stop. Press CTRL+X to exit from Teach Mode. Run MAP Station where the station is the one you just taught. Brooks Automation 6-12 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 120: Teaching The Scanner In Special Situations
Measure and move the sensor to the 1.75” focal distance from the wafers. • Slide out the wafer in slot #1 so you can move to the correct Z-axis position. Brooks Automation 6-13 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 121: Robot Parameter File
Reserved - Not used *For firmware earlier than 6.0, these PID parameter values can differ: 50,30,40 GN, Proportional gain 0,0,0; FA, Servo acceleration forward Brooks Automation 6-14 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 122: Adjusting Robot Parameters
Operational acceleration Operational speed Operational deceleration Servo error limit Positive software limit switch RPSL SPSL Negative software limit switch RNSL SNSL Ramp slope Brooks Automation 6-15 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 123: Flipper End Effector
Table 6-3: Galil Commands to Find the Edge of the Home Switch for the W Axis Enter: Servo Here for the W axis SH W Find Edge of Home Switch FE W Brooks Automation 6-16 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 124: Applying Tension To The Spring
For a 90º flip, follow these steps, but use a smaller increment. To redefine the current position as 0, enter: DP,,,0 Brooks Automation 6-17 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 125: Saving The Positions
SCSI A, 15, 123 The SCSI command stores the value in the station coordinate (*.cor) file. To read back a value, use the RCSI command. For our example, RCSI A,13 reads Brooks Automation 6-18 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 126: Testing The Flipper
Table 6-5: Macros to Test the Flipper Enter: Move the Flipper to the 0 degree position IFLIP 0 Move the Flipper to the 180 degree position IFLIP 123 Brooks Automation 6-19 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... - Page 127 Operation Atmospheric Single-Arm Robot Flipper End Effector User’s Manual This Page Intentionally Left Blank Brooks Automation 6-20 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 128: Adjustments And Calibration
User’s Manual Adjustments and Calibration Overview This chapter provides complete adjustment and calibration directions for the Brooks Automation Atmospheric Single-Arm Robot. Chapter Contents Atmospheric Single-Arm Robot Alignment .......7-2 Required Tools and Test Equipment. -
Page 129: Atmospheric Single-Arm Robot Alignment
Atmospheric Single-Arm Robot Alignment User’s Manual Atmospheric Single-Arm Robot Alignment The Brooks Automation Atmospheric Single-Arm Robot must be aligned with the system that it will be operating in. Note that even a small misalignment can interfere with proper system operation. -
Page 130: Alignment Process
Become familiar with the safety warnings and the procedures to ensure safety while performing the procedures. Become familiar with all attached subsystems, and the User Interface/teach pendant. Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 131: Leveling The Atmospheric Single-Arm Robot
For a single end effector or the first end effector, enter: OUTP 0,0 Without a wafer on the end effector, turn the potentiometer counter-clockwise until the red LED lights. Consider this position A. Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... - Page 132 If you have a dual end effector, tune the second vacuum sensor. To turn on the vacuum, use the command: OUTP 1,0 To turn off the vacuum, use the command: OUTP 1,1 Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 133: Flipper Setup
Flipper Setup This procedure provides information about how to set up a stepper flipper on a Brooks Automation ATM or ABM robot. Setting up the Flipper Before you set up the flipper in Galil mode, be sure that the flipper is offset to about the midpoint of its travel. - Page 134 ; Exit Galil mode CTRL+I Enter the number of steps for 180-degree flip into the Coordinate Special Item #14 by typing the command Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
- Page 135 Test the flipper using the following commands: ; Move Flipper to the 0 degree position. IFLIP 0 ; Move the Flipper to the 180 degree position. IFLIP 123 Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 136: Tuning Pid Motor Parameters
Proportional gain Integrator Damping (or Derivative) KP is the proportional element (KP) of the filter and acts as gain. GN is Brooks Auto- mation’s equivalent command. KI is the integrator function (KI) represented by the parameter KI. It improves the sys- tem accuracy. - Page 137 The values are not the same on different machines and does not remain permanent on a given machine. Also when the weight of the object to be carried by End effector changes, it can affect on the movement of the robot. Brooks Automation 7-10 Revision 1...
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Page 138: Robot Radial Home Flag, Index, And Offset Adjustments
Adjust the index and offset values any time they are out of specifications. This proce- dure is designed to be used only by a certified technician with a working knowledge of Brooks Automation’s hardware and diagnostics Tools and Equipment •... - Page 139 Type RETH to move the arm to the measured distance in Step #1of this procedure, if Customer Home Position in the parameter file for radial is set for Zero. Brooks Automation 7-12 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 140: To Check And Adjust The Physical Position At The Index Position
Figure 7-3: Center Overlapping Position (COP) The software sends response "Lock R Axis and Release the Belt". The Radial motor servos on. Brooks Automation 7-13 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 141: To Set The Home Offset
After completing this diagnostic step, select OK. Escape from the diagnostic screen to the terminal mode. Type SAV to save the Offset into the parameters file. Brooks Automation 7-14 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 142: Command Reference
Command Reference Firmware Revision 6.0 Overview This chapter provides an overview of the embedded control software for the Brooks Automation Atmospheric Single-Arm Robot. The control software provides a broad range of command options, including a number of sophisticated, integrated com- mand sequences. -
Page 143: Description
Atmospheric Single-Arm Robot Description User’s Manual Description The Brooks Automation Atmospheric Single-Arm Robot provides a command set that allows complete control of all product functions. These commands provide a broad range of command options, including a number of sophisticated integrated command sequences. -
Page 144: Coordinate File
The parameter file that is delivered with your robot contains parameters set for your particular robot and application. You will not need to change them unless you have special circumstances. Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 145: Commands And Macros For Robots
(station) you want the robot to remember. When you teach the sta- tion to the robot, the coordinates are saved for that station in a coordinate file (*.cor) Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... - Page 146 SCSI A,15,25 Station B coordinates T, R, and Z SPC B,25517,10269,2870 Station B offset for stroke SOF B,50 … SPC C,25320,10675,2887 SOF C,50 … Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
- Page 147 Command Reference Atmospheric Single-Arm Robot Commands and Macros for Robots User’s Manual This Page Intentionally Left Blank Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
- Page 148 User’s Manual Maintenance Overview This chapter provides maintenance schedules and procedures for the Brooks Automa- tion Atmospheric Single-Arm Robot. The first section of this chapter provides pre- ventive maintenance schedules and procedures. The second section of this chapter provides repair procedures for subsystem repair and replacement.
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Page 149: Preventive Maintenance
Brooks Automation. All Preventive Maintenance procedures and schedules provided here assume that the Brooks Atmospheric Single-Arm Robot is operating in a clean, dry, inert environ- ment. Any deviation from this basic environment will affect the scheduling of PM and may also require additional PM procedures be performed. -
Page 150: Preventive Maintenance Schedule And Procedures
Preventive Maintenance Schedule and Procedures Preventive Maintenance Schedule and Procedures The following maintenance schedule and procedures will provide the information required for standard user maintenance of the Brooks Automation Atmospheric Sin- gle-Arm Robot. Table 9-1 is provided as a quick reference to all scheduled mainte- nance. -
Page 151: Cleaning
Wipe must be moistened only; squeezing the wipe should not cause any isopropyl alcohol to drip. Do not allow alcohol to come in contact with bearings, seals, etc. Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... - Page 152 Do not allow water to come in contact with bearings, seals, etc. Once all residues have been removed, use dry cleanroom wipes to dry all sur- faces. Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 153: Robot Leadscrew Lubrication Procedure
Remove the robot from the tool. Move the robot to a work bench Remove all screws that attach the access cover to the large cover. Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 154: Determining Which Grease To Use On Your Robot
The purge port is filled in with solder. Procedure for lubricating with LG2 grease: Locate your 6mm 45 degree "zerk" fitting that is to be installed. Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 155: Robot Leadscrew Lubrication Procedure
Figure 9-1: Zerk Fittings Locate the threaded hole in nut holder. Figure 9-2: Hole in Nut Holder Install "zerk" fitting on bottom of Bearing Nut. Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... - Page 156 Locate your 6mm 45 degree "zerk" fitting that is to be installed. (Figure 9-1 on page 9-8) Locate the threaded hole in the nut holder. (Figure 9-2) Brooks Automation Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
- Page 157 When you have completed greasing the leadscrew install the access cover and be sure that the screws are tight. Then return the robot for use or store it in an appropriate location. Brooks Automation 9-10 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 158: Vacuum Hose Replacement For The Outer Arm Link
Remove the two hex head screws then remove the clamp and screws, placing them in a safe place. Locate the four hex head screws that fasten the scanner base to the outer arm Brooks Automation 9-11 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... - Page 159 If there is a second vacuum hose, please repeat this section from step 3. To install a new vacuum hose: Thread a new vacuum hose through the arm links and attach it to the vacuum Brooks Automation 9-12 Revision 1...
- Page 160 If the hose kinks or rubs, orientate the hose correctly to insure that the hose does not touch anything. Check all hardware to make sure there is not any loose screws. Replace the scanner hardware. Brooks Automation 9-13 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 161: Checking The Integrity Of The Belts In The Robot
2 and 3. Locate the belt on the outside tube that connects to the ball spline. This belt will rotate when the R-axis is moved. Inspect the belt using steps 2 and 3. Brooks Automation 9-14 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... - Page 162 Inspect the belts to see if there is any obvious damage or dark discoloration to the belts. Check to see if any of the belts are frayed or cut. Replace the cover and tighten all hardware. Brooks Automation 9-15 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 163: Diagnostics For The Single-Arm Robot
Test the laser scanner and laser sensor on Do not look at the laser beam! page 9-30 robots with a laser scanner and no speed interlock mapping. Brooks Automation 9-16 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 164: Using Eqt To Run Diagnostics
The Diagnostic window displays the available tests. Double-click the step you need or select it and press the Run button. The ten tests are discussed here in numerical order. Brooks Automation 9-17 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 165: Test 1: Nvs-Ram Test
Download button. If the NVS-Ram status is BAD, re-initialize NVSRAM and then download all the files by accessing the Format NVSRAM dialog. Brooks Automation 9-18 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 166: Test 2: Galil And I/O Test
Testing input G indicates the controller internal connection based on the Port G infor- mation. Input G should be all zerses when all cables, including robot signal cable, are connected. If any bits are 1, press the Details button to view a description of each bit. Brooks Automation 9-19 Revision 1... - Page 167 Click on each bit button to toggle each bit on/off. Observe the lights on the tester. If this test fails, check wiring continuity. If the wiring is correct, replace the I/O board. Brooks Automation 9-20 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 168: Test 3: Encoder Read
If this doesn’t resolve the problem, replace the robot signal cable. If the problem per- sists, replace the robot interface board. If the problem persists, replace the Galil board. If the problem persists, replace the Flex-PCB. Finally, replace the motor. Brooks Automation 9-21 Revision 1... -
Page 169: Test 4: Limit And Home Test
If the Limit switches remain on at all times, unplug the signal cable. If the limit switch then turns off, replace the limit switch assembly. If the limit switch remains on, replace the signal cable or Galil board. Brooks Automation 9-22 Revision 1... -
Page 170: Test 7: Servo Test
Manually move one axis at a time. You should feel the motor apply counter- directional force smoothly and continuously without jerking. Repeat Step 3 for another axis. Increase torque limit and repeat. Brooks Automation 9-23 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 171: Test 8: Home Test And Set
3 . M o v e t o I n d e x 4 . D is t a n c e t o I n d e x Figure 9-12: Homing the Z Axis Brooks Automation 9-24 Revision 1... -
Page 172: Adjusting The Distance To Index On An Abm 400 Series With Track
To apply the hardware correction: Use these steps to chang the distance to index to be within 1000 and 3000 range count by making these hardware changes. Brooks Automation 9-25 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... - Page 173 Galil commands to determine if the distance to TP is between 1000 and 3000 counts. If it is not, continue with the pro- cedure until the TP is in the correct range. Brooks Automation 9-26 Revision 1...
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Page 174: Test 9: R-Home Test And Set
NOTE: EQT automatically saves the new home offset to the Robot Parameter File in NVS- RAM upon exiting this step. For more details, refer to the description of STEP #9 (R-HOME TEST & SET) descrip- tion. Brooks Automation 9-27 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 175: Test 10: Scaling Factor Test
Move the R-axis. Measure the physical movement, that is, the displacement of the axis, not the absolute position. Compare your result with the reading on the screen. Brooks Automation 9-28 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 176: Test 11: Vacuum Valve And Vacuum Sensor Test
Refer to “Adjusting the Vacuum Sensor” in the installation chapter for instructions on adjust- ing the sensitivity. Brooks Automation 9-29 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 177: Test 13: Scanning Test
DANGER When running this test, do not look at the laser beam. The laser radi- ates an invisible infra-red spectrum. Brooks Automation 9-30 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 178: Using The Teach Pendant To Run Diagnostics
HERE. After each step, press HERE (or ENTER) to advance to the next Step. STEP #1 (NVSRAM Test) NVSRAM Test first checks the Non-Volatile Static RAM (NVSRAM) and then checks Brooks Automation 9-31 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 179: Step #2 (Galil & I/O Test)
Ensure that all cables are correctly connected. The Main Menu is displayed. Repeat the test. If the test fails a second time, check the jumper settings. If the jumper settings are correct, replace the I/O board. Brooks Automation 9-32 Revision 1... - Page 180 46V), replace the amplifier board. If no voltage, check motor power supply (torroidal transformer) and relay Motor Power Supply Check I/O to power supply cable and I/O board. indicator Brooks Automation 9-33 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
- Page 181 Testing Ext. Output Enter Bit# to toggle IO Read: XXXXXXXX On the numerical keypad, use 0 through 7 to toggle the outputs. If this test fails, contact Brooks Automation Customer Support. Brooks Automation 9-34 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 182: Step #3 (Encoder Read Test)
If the Limit switches remain on at all times, unplug the signal cable. If limit switch then turns off, replace the limit switch assembly. If the limit switch remains on, replace the signal cable or Galil board. Brooks Automation 9-35 Revision 1... -
Page 183: Step #5 (Amp. Board Setup)
In the following graphic, the robot Z axis is homed. The homing procedure moves an axis to its home switch and then moves in the opposite direction to find the encoder index. (The encoder index is up to one encoder revolution mark.) Brooks Automation 9-36 Revision 1... - Page 184 ESC to start over or press Enter to continue. While the motor is moved to position, the display reads MAKING CORREC- TION… Brooks Automation 9-37 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 185: Step #9 (R-Home Test & Set)
Loosen the screws on the big pulley inside the lower link of the R axis as shown in Figure 9-19 on page 9-39. Brooks Automation 9-38 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... - Page 186 You are prompted to adjust R at Index. Press the Y button. The robot moves to the Encoder Index. You are prompted to move R to the Index position as shown in xx. Brooks Automation 9-39 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
- Page 187 Robot Parameter File in NVSRAM. For earlier firmware, send these commands to save the new home offset: RSA A Brooks Automation 9-40 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 188: Step #10 (Scaling Factor Test)
If the sensor remains on at all times, decrease the sensitivity. If it remains off, increase the sensitivity. Refer to “Adjusting the Vacuum Sensor” in the Installation chapter for instructions on adjusting the sensitivity. Brooks Automation 9-41 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 189: Step #12 (Robot I/O's)
When running this test, do not look at the laser beam. The laser beam radiates on invisible infra-red spectrum. To exit Diagnostics, press CTRL+ESC. Brooks Automation 9-42 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... - Page 190 Aftermath Analysis ...........10-29 Contact Brooks Automation Technical Support ......10-31...
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Page 191: Troubleshooting
This chapter gives information on using these com- mands, interpreting the responses, and taking recovery actions. • For problems you cannot solve, gather information and contact Brooks Auto- mation Customer Support. Use the Aftermath Analysis form given at the end of this chapter. -
Page 192: Troubleshooting Robot Start Up
Servo off on one or more axes SVON Error on COM2 AST 2 Not used (always 1) NV-SRAM error RNCS Controller error Error on COM1 AST 1 Brooks Automation 10-3 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... - Page 193 Robot Interface Power Supply indicator. Low if powered Switcher indicator. Low if Switcher is on Bus Power indicator. Low if all voltages are good Brooks Automation 10-4 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
- Page 194 Figure 10-1: Robot Will Not Start Up Flow Chart Brooks Automation 10-5 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 195: Robot Will Not Home Procedure
P a r a m e t e r f ile Figure 10-2: Robot Will Not Home Flow Chart Brooks Automation 10-6 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... - Page 196 Robot Interface Power Supply indicator. Low if powered Switcher indicator. Low if Switcher is on Bus Power indicator. Low if all voltages are good Brooks Automation 10-7 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 197: Robot Will Not Servo On
E q u ip e T e c h n o l o g ie s T e c h n i c a l S u p p o r t a t 1 - 8 8 8 - 7 7 5 - 7 7 0 0 Figure 10-3: Robot Will Not Servo On Flow Chart Brooks Automation 10-8 Revision 1... - Page 198 Servo off on one or more axes SVON Error on COM2 AST 2 Not used (always 1) NV-SRAM error RNCS Controller error Error on COM1 AST 1 Brooks Automation 10-9 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 199: Using The Teach Pendant And Eqt 32 To Troubleshoot
Instructions for using the Teach Pendant and EQT 32 to perform diagnostics are given in chapter 9. General instructions for using the Teach Pendant and EQT 32 are given in the Smart Controller Hardware and Software User’s Manual. Brooks Automation 10-10 Revision 1... -
Page 200: Common Problems
• Is the signal cable correctly connected? If not, correct it. If the robot does not home, make sure the signal cable is correctly connected. Brooks Automation 10-11 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 201: Frequently Asked Questions
If the two serial numbers are the same, re-download the file from the diskette. • If the serial numbers are different, contact Brooks Automation Cus- tomer Support. What do I do if I get a new controller? To make sure that the controller and robot are compatible, load the correct parameter and macro files from the diskette that came with the robot or by uploading the files from the original controller. - Page 202 To save the macros to NVSRAM, enter the command: SMCR Re-teach the stations. The old coordinates will be close, but not exactly the same. Brooks Automation 10-13 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 203: Checking Robot Status
Select Information Request and press the Run button. Nine commands are executed and the results are displayed as text messages. Problems are highlighted with a red box. Brooks Automation 10-14 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 204: Using The Stat/Stat2 Command
The setting of each status bit is caused by one or more reasons. Sometimes the cause is fatal and needs immediate action to recover, and sometimes the cause is harmless and does not require any direct action. The following table lists the probable cause of Brooks Automation 10-15 Revision 1... - Page 205 Sending AST 2 usually COM2 mand for more information. clears Bit 11. Not used Not used. Bit 12 is always set to 1. None Brooks Automation 10-16 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
- Page 206 Error on There are several possible causes. Use AST 1 com- Sending AST 1 usually COM1 mand for more information. clears the bit. Brooks Automation 10-17 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 207: Checking Nvsram With Rncs Command
Upload all macros to the host computer. After teaching all stations, upload the coordinate files to your host computer. Whenever you edit the macro file, upload the *.mac file to your host computer. Brooks Automation 10-18 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 208: Checking Limit Switch Status With The Rls Command
For 6.0+ firmware, the bits for a robot-only system are standard with the bits listed in this table. For earlier firmware, the bits for a robot-only system are defined in the second table to follow. Brooks Automation 10-19 Revision 1... - Page 209 1-axis pre-aligner neg t trig. (4) Flipper negative W triggered (4 Flipper negative t triggered (4) Flipper negative W triggered (8) Flipper negative W triggered (8) Brooks Automation 10-20 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
- Page 210 RLS command again. If it clears, it is likely that the robot was instructed by software to go too close to the limit. This can occur even during teaching, if the position taught was beyond the limit. This Brooks Automation 10-21 Revision 1...
- Page 211 If the RLS command you sent after changing the robot position cleared all bits, this indicates a problem in the limit switch assembly. The robot might need to be serviced. Call Brooks Automation Customer Support for assistance. Brooks Automation...
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Page 212: Using The Glst Command
Track w motion complete (8) Track w axis motion complete (8) Brooks Automation 10-23 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... - Page 213 Robot R axis motion complete Robot Z axis motion complete Robot T-axis servo off Robot R-axis servo off Robot Z-axis servo off Reserved Reserved Brooks Automation 10-24 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 214: Problem Causes And Suggested Actions
Send ABM command. Try to servo-on again. Response to ABM Bits 0, Check Galil jumpers. Replace Galil board. command is "?" 10, and Brooks Automation 10-25 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... - Page 215 Send RLS to determine which axis. Replace move at all Home switches and 9 limit switch assembly. are active all the time Brooks Automation 10-26 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
- Page 216 Then re-teach the stations. from one station to Encoder index set Reset index. another. too close to home switch Brooks Automation 10-27 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
- Page 217 Response. Press Enter several times. If you Galil board receive ">" response, replace Galil board. If problem persists, re-route grounding and proper shielding. Interrupted Replace flex-PCB. Encoder signal Brooks Automation 10-28 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 218: Aftermath Analysis
Do not reset the controller, power off, or send any commands other than those listed. Send the commands in the order listed. Send your Aftermath Analysis to Brooks Automation for use in trouble- shooting. - Page 219 RSP A ________,________,_______ RAD A ________ ? D,[R20] ________ ? D,[R21] Go to Galil mode GALIL ________,________,_______ ________,________,_______ Return from controller mode Brooks Automation 10-30 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 220: Contact Brooks Automation Technical Support
Atmospheric Single-Arm Robot Troubleshooting User’s Manual Contact Brooks Automation Technical Support Contact Brooks Automation Technical Support Even the most reliable products require service and support. To help you receive the most value from our Specialists, have the following information ready before you contact Brooks Automation Technical Support. - Page 221 Troubleshooting Atmospheric Single-Arm Robot Contact Brooks Automation Technical Support User’s Manual Brooks Automation 10-32 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
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Page 222: Appendices
Appendices Overview The following appendices are included to provide the user with a single location for specific information related to the Brooks Automation Atmospheric Single-Arm Robot. Contents Appendix A: Factory Default Settings ........11-2 Appendix B: Approved Laser Scanners . -
Page 223: Appendix A: Factory Default Settings
M_OFF goes active, dis- and the laser scanner. connecting power to all PWM amplifiers and the laser scanner. Brooks Automation 11-2 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com... -
Page 224: Appendix B: Approved Laser Scanners
The specifications for several approved laser scanners are listed in the following table. For questions about additional laser scanners, contact your Brooks Automation sales representative. All models listed in the table are Class 1. The WX scanners are original Class 1 from HAMA. -
Page 225: Available Configurations Of The Hama Laser Sensors
User’s Manual Available Configurations of the HAMA Laser Sensors Brooks Automation provides three series of Hama Laser Sensors, for the purpose of mapping wafer cassettes. These include the DD Series, DX Series and the WX Series. Each series may be made up of one or more models with various options available. - Page 226 Switch #3: Remote Off/On. In Remote Off, the laser will emit radiation when- ever +VCC and GND are correctly applied. In Remote On the sensor requires a separate "Enable" signal along with +VCC and GND to operate. Brooks Automation 11-5 Revision 1...
- Page 227 Appendices Atmospheric Single-Arm Robot Appendix B: Approved Laser Scanners User’s Manual This Page Intentionally Left Blank Brooks Automation 11-6 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
- Page 228 User’s Manual Drawings Overview This section provides wiring schemetics of some of the parts of the Brooks Automa- tion Atmospheric single-arm Robot. These documents are provided to allow service personnel to identify specific parts within the product. All drawings and other related documents provided with this manual are generic and may not reflect specific builds of the product.
- Page 229 Scan and up to speed Laser Power Z up to speed Z Encoder EMS Sense XILINX 2 Figure 12-1: I/O Version 3 Schematic Brooks Automation 12-2 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
- Page 230 Atmospheric Single-Arm Robot Drawings User’s Manual The next two schematics show the connections for the TTR-200 Teach Pendant. Brooks Automation recommends that you use the default DB37 configuration, the first sche- matic, or alternatively, the DB68 configuration, the second schematic.
- Page 231 Drawings Atmospheric Single-Arm Robot User’s Manual Figure 12-3: TTR-200 Teach Pendant DB68 Brooks Automation 12-4 Revision 1 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...