Primes FocusParameterMonitor FPM 60 Original Instructions Manual page 76

FPM status:
measurement running = 0?
t15
(282.1)
ready for measurement = 0?
(282.0)
Laser OFF
FPM status:
t16
measurement finished = 1?
(282.2)
idle = 1? (282.4)
FPM status:
measurement failure = 0?
(282.3)
measured parameters (FPM)
(304 - 350)
Fig. 12.7: Flow Chart combined measurement
76
B
measurement failures (FPM)
(288 - 302)
End
FocusParameterMonitor FPM
≈
t17
FPM status:
ready = 0?
(284.0)?
FPM status:
measurement running = 1?
(284.1)
irradiation time
> 1s
t18
FPM Command:
do close shutter = 1 (259.2)
FPM status
shutter is closed = 1?
(285.1)s
t19
FPM Command:
do close shutter = 0 (259.2)
t20
thermal time >11s?
(xxx.x)s
FPM status:
measurement running = 0?
t21
(284.1)
measurement finished = 1?
(284.2)
idle = 1? (284.4)
measured parameters (FPM)
(352 - 390)
Revision 06 EN 02/2023