Primes FocusParameterMonitor FPM 60 Original Instructions Manual page 58

% of the beam saturated
used exposure time
optimal exposure time
exposure time
irridation failure
GroupWarnSingle
WarnSingle
% of the beam saturated
used exposure time
optimal exposure time
exposure time
irridation failure
GroupWarnSingle
WarnSingle
...until the limit value of overmodulation of 5% of the beam area is underrun. Thus the entry for overdriving
is omitted in the warning code. The maximum level visible in the display of the measurement data is still at
max. 4096 cts.
% of the beam saturated
used exposure time
optimal exposure time
exposure time
irridation failure
GroupWarnSingle
WarnSingle
58
FocusParameterMonitor FPM
Revision 06 EN 02/2023