Primes FocusParameterMonitor FPM 60 Original Instructions Manual page 57

Measurement settings
The following example starts off with the longest possible exposure time, with the FPM already delivering
good measurement results.
Exposure times of 200 µs and 35 ms are used as a reference point for usable measurements.
To illustrate the optimization process, the measurement data for each iteration step are read out and listed.
To graphically illustrate the changes, the results are also shown as excerpts from the display in PRIMES' own
LDS software.
% of the beam saturated
used exposure time
optimal exposure time
exposure time
irridation failure
GroupWarnSingle
WarnSingle
Here the measurement is overmodulated and the beam reaches out to the edge of the measurement
window. A considerable part of the beam surface is overmodulated.
% of the beam saturated
used exposure time
optimal exposure time
exposure time
irridation failure
GroupWarnSingle
WarnSingle
The overmodulated portion of the beam area decreases more and more in the next measurements.
% of the beam saturated
used exposure time
optimal exposure time
exposure time
irridation failure
GroupWarnSingle
WarnSingle
Revision 06 EN 02/2023 57