Pumping Performance - EBARA EV-A03 Instruction Manual

P.19

3.6 Pumping Performance

Gas ballast valve : OFF Gas ballast valve : ON
400
350
300
250
200
150
100
50
0
1.0E-01 1.0E+00 1.0E+01 1.0E+02 1.0E+03 1.0E+04 1.0E+05
Pressure [Pa]
Note) The gas ballast mechanism is an option.
EBARA
CORPORATION
PM10U