Mounting Axes; Order Of The Axes And Height Compensation With Spacers - kruss DSA100 Installation And Operation Manual

Mounting axes

7 Mounting axes

Usually the axes are already assembled when the instrument is delivered. This
chapter describes the assembly of axes or tables that were acquired afterwards.
SPA C SPA C SPAC SPAC
7.1

Order of the axes and height compensation with spacers

Up to three axes, manual or software-controlled, can be assembled on the frame.
Setup with one vertical axis and two horizontal axes
Sample table
z-Axis (lifting table)
y-Axis
x-Axis
Base Spacer
Alternative setups
Not mounted x- or y- axes are replaced by an additional spacer respectively.

Instead of an x-axis, a rotating table (wafer table) can be mounted. The wafer

table is mounted onto a z-axis.
Instead of a sample table, an environmental chamber (temperature chamber,

humidity control) may be mounted.
SPA C SPA C SPAC SPAC
page 31