MICRO-EPSILON interferoMETER IMS5420 Quick Manual page 6

Operating Modes
An LED signalizes by illumination that laser radiation
emits from the optical opening of the light source Pi-
lot.
Operating Modes
The interferoMETER measuring system provides highly
accurate measurements of thicknesses for transparent
layer materials, e.g. silicon wafers, at a wavelength of
1100 nm.
Silicon
0.05 ... 1.05 mm
Air
0.2 ... 4 mm
Measuring ranges for thickness measurements
The possible resolution here is in the nanometer range.
To get started quickly, it is recommended to use saved
configurations (presets) for various target surfaces and
applications, see instruction manual Chap. 6.6.
1) Measuring range at n=3.82 (silicon); measurable
thickness depends on doping
2) For air gap measurement between two glass plates
(n~1) the measuring range is 0.2 ... 4 mm. The mea-
suring object must be within the working distance.
IMS5420-TH / IMS5420MP-TH / IMS5420IP67-TH / IMS5420IP67MP-TH
1
2
Setup, Connection Options
Connect the components together and mount the
sensors into the clamps.
Patch cable 2x RJ45
Controller
Patch cable 2x RJ45
PS 2020
SC2471-x/RS422/OE
IF2001/USB
Connection examples on IMS5420, IMS5420MP
2-Port
Switch /
EtherCAT
Hub
Junction
Run
X1
X2
IPC
PLC
Sensor
USB
IPC
Page 6