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IMS5420-TH
IMS5420MP-TH
IMS5420IP67-TH
IMS5420IP67MP-TH
Quick Manual
interferoMETER

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Summary of Contents for MICRO-EPSILON interferoMETER IMS5420

  • Page 1 Quick Manual interferoMETER IMS5420-TH IMS5420MP-TH IMS5420IP67-TH IMS5420IP67MP-TH...
  • Page 2 They are available at: Koenigbacher Str. 15 94496 Ortenburg / Germany https://www.micro-epsilon.com/download-file/man--interferometer-5420--en.pdf Tel. +49 (0) 8542 / 168-0 Fax +49 (0) 8542 / 168-90 EtherCAT® is registered trademark and patented technology, e-mail info@micro-epsilon.com licensed by Beckhoff Automation GmbH, Germany. www.micro-epsilon.com...
  • Page 3 General General Symbols used The following symbols are used in this document: CAUTION Indicates a hazardous situation which, if not avoided, may result in minor or moderate injury. NOTICE Indicates a situation that may result in property damage if not avoided. Indicates a user action.
  • Page 4 General Avoid shocks and impacts to the sensor and the controller. NOTICE > Damage to or destruction of the components Never kink optical fibers or bend them in thight radii. > Damage to or destruction of the optical fibers; failure of measurement device Protect the ends of the optical fibers against contamination >...
  • Page 5 WITH IEC 60825-1 ED. 3, AS DESCRIBED IN Operating range LASER NOTICE NO. 56, DATED MAY 8, 2019 Laser label measuring laser The following apply to the interferoMETER IMS5420 and Working distance Thickness sensor IMS5420MP measuring systems: The measuring system works with a pilot laser of a You can find further information about the sensors in the wavelength of 635 nm (visible red) offering max.
  • Page 6 Operating Modes Setup, Connection Options An LED signalizes by illumination that laser radiation emits from the optical opening of the light source Pi- Connect the components together and mount the lot. sensors into the clamps. Operating Modes 2-Port Switch / EtherCAT The interferoMETER measuring system provides highly Junction...
  • Page 7 Setup, Connection Options Sensor Cable A more detailed description of the connection options is available in the operating instructions. Sensor and controller are connected through an 2-Port optical fiber. Switch / EtherCAT- - Do not shorten or extend the optical fiber. Abzweigung - Do not pull or hold the sensor on the optical fiber.
  • Page 8 Electrical Connectors, IMS5420IP67 Electrical Connectors, IMS5420IP67 General Rules As a matter of principle, avoid: Supply Voltage - any contamination of the connector, e.g., dust or Pin Color Comment finger prints Brown +U - unnecessary mating cycles. - any mechanical stress of the optical fiber (bending, 24 VDC ±...
  • Page 9 Electrical Connectors, IMS5420 Electrical Connectors, IMS5420 Description Comments 0 ... 5 V; 0 ... 10 V; R appr. 50 Ohm Analog Out Voltage output 5.5 V / 10.9 V with error, outside measuring range U/I out 4 ... 20 mA; R ≤...
  • Page 10 LEDs Controller LEDs Controller LED IMS5420IP67 Power on Green Supply voltage available Power on Green No error Supply voltage available Status If EtherCAT is active, meaning of the LED is conform with the Ether-CAT guide- lines. Signal in saturation Yellow Signal too low Green Signal ok...
  • Page 11 LED IMS5420IP67 Button Multifunction, IMS5420 The Multifunction button of the controller has multiple functions. It enables, e.g., to operate the light source. The button is factory-set to the Pilotlaser on/off feature. Set / reset Starts or stops the master measurement of the selected signals master value Pilot laser Turns on/off the pilot laser...
  • Page 12 You can check the IP address of the controller, that are connected to a PC / network, with the sensorTOOL.exe program. This program is available online at https://www.micro-epsilon.com/download/software/sen- sorTOOL.exe. IMS5420-TH / IMS5420MP-TH / IMS5420IP67-TH / IMS5420IP67MP-TH Page 12...
  • Page 13 Initial Operation Positioning the Target, Thickness Measurement The red-light pilot laser supports you in aligning the The LED Range on the controller front indicates the sensor to the target during commissioning. position of the target in relation to the sensor. Turn on or off the pilot laser in the menu Settings >...
  • Page 14 Initial Operation Presets, Measurement Configuration Common measurement configurations (presets) for various target surfaces are stored on the controller. This allows you to quickly start with your individual measurement task. In a preset the basic features like peak or material selec- tion and calculation functions are already set.
  • Page 15 Initial Operation Signal Quality Using the Signal quality function, you can influence the measuring rate and the respective averaging. Averaging with the Median function is specified by the preset. The subsequent moving averaging is specified by the Signal quality function. Averaging Description Static,...
  • Page 16 Initial Operation Measpeak Sorting The selection of peak/peaks dictates which region in the signal is used for the thickness measurement. Switch to material selection by going to Settings > Data recording. Switch to the chart type FFT. Choose between First peak and Highest peak. IMS5420 and IMS5420IP67 IMS5420MP and IMS5420IP67MP Peak 4...
  • Page 17 Initial Operation In the case of a target consisting of several transparent layers, the material must be assigned for each layer. The mate- rial selection for a thickness measurement starts with the thinnest layer (layer 1) independent of the physical arrange- ment in the measuring object, see Chap.
  • Page 18 Initial Operation Number of Peaks Number of peaks of the FFT signal used for evaluation in thickness measurement. The number of peaks can be se- lected in the Settings > Data recording > Number of peaks. This function is possible for the following systems: - IMS5420MP and IMS5420IP67MP: max.
  • Page 19 Initial Operation Example of silicon with paste and gap, measurement peak sorting: First, selected material IMP-TH Peak 1 Peak 4 Peak 3 Silicon Peak 5 Peak 6 Peak 2 Range [%] The IMS5420MP and IMS5420IP67MP controllers can also measure the thickness of combined layers of the same material.
  • Page 20 Initial Operation Material Selection The refractive index needs to be corrected in the controller for an exact thickness measurement. Only air may be pres- ent between the sensor face and the measuring object (Material Infront); other media such as water or alcohol are not permissible.
  • Page 21 Initial Operation The surface area of the following material is also required for calculating the thicknesses. Click the icon to change an existing entry. Click the icon to add another material. Click the icon to save another or changed material. Click the icon to cancel the operation without saving.
  • Page 22 Initial Operation witch to material selection by going to Settings > Data recording. Assign the materials to the individual layers according to the target used. Peak 1 Layer 1 Peak 2 Layer 2 Peak 4 Peak 4 Compared to the example on the left, the Peak 3 Layer 3 Peak 1...
  • Page 23 Initial Operation Output Values Output value Description Scaling Unit 01ABS (2048 x 16Bit) FFT signal 2047 value / 2048 * 100 01SHUTTER Exposure time 100000 value / 10 µs 01ENCODER1 Encoder UINT32_MAX value Encoder ticks 01ENCODER2 Encoder UINT32_MAX value Encoder ticks 01ENCODER3 Encoder UINT32_MAX...
  • Page 24 Thickness Measurement, Web Page Display Thickness Measurement, Web Page Display Align the sensor vertically to the target object. Then, move the sensor (or the target) closer, until you more or less reach the working distance for your sensor. Once the object is within the sensor’s measuring range, the Range LED (green or yellow) on the front of the controller will light up.
  • Page 25 Thickness Measurement, Web Page Display In the window on the left, the signals can be enabled or disabled both during and after the measurement. Inactive graphs are gray. Click on the check mark to add them. The changes take effect when saving the settings. Use the eye symbols to show and hide the single signals.
  • Page 26 Data Output, Interface Selection Data Output, Interface Selection The controller supports - three digital interfaces that can be used in parallel for data output, ƒ Ethernet: enables fast data transfer, but provides no real-time capabilities (packet-based data transfer). Both measurement and FFT data can be transferred.
  • Page 27 Set IP Address Set IP Address Change to the menu Settings > Outputs > Ethernet Settings and enter the new IP address. Click on Apply settings to confirm. Start the web interface with the new IP address. Save the new device settings. Click on Save settings. Switching between Ethernet and EtherCAT You can switch between Ethernet and EtherCAT using an ASCII command, the web interface or an EtherCAT object.
  • Page 28 MICRO-EPSILON or to your distributor / retailer. MICRO-EPSILON undertakes no liability whatsoever for damage, loss or costs caused by or related in any way to the product, in particular consequential damage, e.g., due to...