MICRO-EPSILON interferoMETER IMS5420 Quick Manual page 18

Initial Operation
Number of Peaks
Number of peaks of the FFT signal used for evaluation in thickness measurement. The number of peaks can be se-
lected in the Settings > Data recording > Number of peaks.
This function is possible for the following systems:
- IMS5420MP and IMS5420IP67MP: max. 5 layers
Make sure to count the peaks in the correct manner, see Chap. Measpeak Sorting.
The material selection for a thickness measurement starts with the thinnest layer (layer 1) independent of the physical
arrangement in the measuring object.
Example of a layer of silicon and gap, measpeak sorting: First, corresponding material selection
IMP-TH
Silicon
Peak 3
Gap
0 20 40
IMS5420-TH / IMS5420MP-TH / IMS5420IP67-TH / IMS5420IP67MP-TH
Peak 2
Peak 1
Range [%] 60 80 100
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